臺灣博碩士論文加值系統

本文為奈米碳管電子元件場效電晶體特性研究與應用。主要利用奈米碳管優良的電子傳導特性製作ON-OFF效應良好的場效電晶體。奈米碳管具有質量輕、體積小、表面積大、以及優良的電子傳輸等優點，因此本文利用奈米碳管優異的電性傳導，設計製作奈米碳管場效電晶體，ON-OFF效應平均可達3~6個數量級(order)大小，並且將已製作完成的奈米碳管場效電晶體舖上一層薄的氧化鋅(厚度平均約4~7nm)，發現場效電晶體效應由半導體型改質為金屬型場效電晶體，此方法將可簡易控制場效電晶體之半導體效應與金屬型效應，有助於奈米碳管場效電晶體效應的應用。

此外，本文將已舖上氧化鋅之奈米碳管場效電晶體元件置入具有一氧化碳(CO)氣體環境中，量測在常溫下不同一氧化碳氣體濃度的電性反應，藉由電性反應變化偵測一氧化碳氣體濃度，在本文中可在常溫下，低濃度的一氧化碳環境中偵測到氣體濃度變化，CO氣體感測靈敏度比市售氣體感測器高。希望冀由此定性之氣體感測量測提升CO的氣體感測技術。

In this paper, we researched on the carbon nanotube transistors and their applications. Znic Oxide (ZnO) film was sputtered on the surface of the carbon nanotube, which was used for transferring electrical properties of CNTs and developing carbon monoxide (CO) gas sensor. Moreover, we developed the fabrication of the carbon nanotube field effect transistor (CNTFET). It was successfully to convert semiconducting p-type CNTFET into metallic CNTFET through sputtering ZnO film. It was a simple method transferring electrical properties of CNTFET and could obtain the high resistance metallic coducting wires. Furthermore, the metallic CNTFET used as the gas sensor measured different concerntration of the carbon monoxide due to the change of the electric properties in the atmospheric environment. The metallic CNTFET gas sensor is better than the commercial gas sensor.

中文摘要………………………………………………………………..i
英文摘要…………………….…………………………………………ii
目錄…………………………………………………………………..iii
圖目錄………………………………………………………………...iv
表目錄…………………………………………………………………vii
第一章 序論…………………………………………………………….1
1-1前言………….……………………………………………………..2
1-2文獻回顧…………………..……………………………………….3
1-3研究動機….………………………………………………………..7
1-4研究目標……………………………………………………….....8
第二章 奈米碳管電子元件特性改質與應用....................10
2-1奈米碳管……………………….………………………………...10
2-2奈米碳管場效電晶體效應(CNTFET)……………………………..14
2-3奈米碳管氣體感測器……………………………………………..18
2-4奈米碳管CO氣體感測器設計與製作…………………………....35
第三章 實驗方法與製程…………………………………………....43
3-1實驗製程設計………………………………………………………43
3-2 金屬型奈米碳管場效電晶體元件製作………………………….46
3-3 CO氣體量測……………………………………………………….62
第四章 實驗結果……………………………………………………..64
4-1 P型奈米碳管場效電晶體元件製作…………………………….64
4-2奈米碳管場效電晶體特性量測………………………………....75
4-3轉質之金屬型奈米碳管場效電晶體電性量測…………………..85
4-4 一氧化碳氣體感測量測………………………………………….95
4-5 實驗結果與討論…………….………………………………….104
第五章 結論與建議………………………………………………...107
第六章 參考文獻…………………………………………………...109

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