臺灣博碩士論文加值系統

近年來，微機電系統(MEMS)元件技術的發展相當迅速，而以微馬達作為驅動元件的技術，更是微機電系統技術的主流。對於微機電系統的微小尺寸(微米範圍之內)，靜電力可以有效地被用來當作驅動的方式。本文將對靜電微馬達最佳化機電參數設計作深入探討。
目前國內外研究微馬達所遭遇的問題不外乎是運轉轉矩的不平順和運轉轉矩低，運轉特性欠佳及使用壽命短等。為了改善上述問題，本論文利用有限元素軟體ANSYS來分析微馬達的電場分佈及特性，藉以提升及改善微馬達的運轉特性。
本論文將針對擺動式及凸極式兩種靜電微馬達來進行下列問題的探討及分析：(1)微馬達設計時所需考慮的設計機電參數，(2)微馬達不同的外加激勵電壓方式，(3)提出改善各種影響微馬達運轉的因素，以提高運轉轉矩。上述問題皆會影響微馬達電場強度及靜電力，進而影響轉矩。因此值得需要深入探討，本論文分析所得可作為微馬達設計及製作之重要參考依據。

In recent years, the development of the MEMS component technology is quite fast, many countries invest the huge fund to research and develop relevant application, and regard micromotor as the technology of driving the component, it is the mainstream of MEMS technology even more. Regard the small size of MEMS, the electrostatic force can be used for the way to drive effectively. Therefore, this thesis will probe into the optimum electromechanical parameter of the electrostatic micromotor.
At present, studying micromotor meet issue nothing more than operation torque is not smooth-going, low operation torque and low lifetime etc. In order to improve above-mentioned problems, this thesis uses of finite element software ANSYS to analyse the electric field characteristic of the micromotor.
For the improving operation characteristic of the micromotor, this thesis will probe into the two kinds of wobble and pole electrostatic micromotor following problems are included：(1) the better design of electromechanical parameters in micromotor, (2) different modes of voltage are excited on the micromotor, (3) improving factor of influence on operation for micromotor is proposed. Above-mentioned problems will influence the electric field intensity and electrostatic force of the micromotor, and influence the operation torque, therefore, investigations should be continuous, analyse incomes may become important reference of design for micromotor in this thesis.

中文摘要i
英文摘要ii
誌謝iii
目錄iv
圖目錄vi
表目錄xi
第一章 緒論1
1-1 研究動機與目的1
1-2 文獻探討3
1-3 研究方法與論文架構6
第二章 相關理論分析8
2-1 有限元素法8
2-2 理論分析與邊界條件9
2-3 ANSYS分析模擬流程與設定15
第三章 擺動式靜電微馬達22
3-1 擺動式靜電微馬達22
3-2 數學模式25
3-3 擺動式靜電微馬達機電參數分析28
3-4 轉矩特性與機電參數關係31
第四章 凸極式靜電微馬達33
4-1 凸極式靜電微馬達33
4-2 凸極式靜電微馬達機電參數分析37
4-3 轉矩特性與機電參數關係40
第五章 靜電微馬達之設計機電參數41
5-1 Paschen’s Law41
5-2 擺動式靜電微馬達設計46
5-2-1靜電力與間隙和轉子擺動角度關係46
5-2-2轉矩漣波產生原因與改善方法49
5-3 凸極式靜電微馬達設計54
5-3-1靜電力和轉子轉動角度關係54
5-3-2轉矩漣波與轉子轉動角度關係57
5-4 外加激勵電壓與靜電力的關係64
5-5 空氣阻力與微馬達運轉特性關係之探討72
第六章 結果與討論77
6-1 結論77
6-2 未來與展望79
參考文獻 80
簡歷 83

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