臺灣博碩士論文加值系統

在微機電元件中，慣性力隨著元件本身之重量急遽減少而降低，以致兩元件間表面波峰尖端之表面力對界面性能有顯著影響，尤其在表面粗糙度降低至奈米等級時更顯現其對微機電元件界面性能的重要性。其中間隙、磨擦與磨損的控制是微運動元件最關心的難題。在微機械或精密機械具有相對運動之接觸表面間，實際上常存有不同外來粒子、磨屑或液體膜等，因此本文建立一個界面存有顆粒、液體及表面具有粗糙度的三體微接觸黏附模式，以了解顆粒及液體表面效應在兩接觸界面間對接觸特性的影響。過去表面和表面及表面和顆粒兩種不同的黏附力模式，可利用此三體黏附力模式簡化得到。
本文亦利用此新模式推導可預測微元件之黏附磨擦與砂磨磨損之公式，以同時考慮材料、顆粒大小、負荷、試件表面粗度與表面能對脫離力、真實接觸面積、磨擦力、平衡間隙、黏附力與毛細力的影響。結果顯示微機件界面間之間隙與力量控制，除了在極小表面能或極污染表面外，深受黏附力影響，有時需用外力壓近兩相對表面，有時需要拉離相對表面方可達到微機件需要之適當間隙。本文亦設計製造不同表面粗糙度之表面，探討其加工表面形貌對微元件之真實接觸面積、黏附力及毛細力的影響效應，以取得較佳之表面形貌，提供專業參考選用。此表面粗度、表面能、顆粒大小、間隙、磨擦與磨損六者之相互關係可由本文之分析得知，因此本文理論分析結果與實作表面可作為各項微機件製造與設計之參考。

In the microelectromechanical system (MEMS), inertial force is reduced as the weight of the component reduces rapidly. Surface forces occurs at the peaks of the asperities on interface and is pronounced when the surface roughness effect is small, due to the nanometer level. In the MEMS and precision machine, particles and liquid films are often presented at contact interfaces. In this paper, a three-body adhesion model for rough surfaces with particles and liquid films are proposed in order to understand the effects of particles and liquid films between surfaces on contact characteristics. Both transitional surface-to-surface and particle-to-surface two-body microcontact adhesion model simulations can be obtained according to the simplification of this model.
The new adhesion model was also used to analysis the friction and wear between rough surface in MEMS and precision machine. The effects of surface roughness, material, lead, particle size, surface energy of surface and particles on pull-off force, friction coefficient, equilibrium gap, real contact area, wear and capillary force investigated. Moreover, in order to design the optimal surface, the effects of adhesion and capillary force of surface micromaching on the real contact area of microparts are investigated. It is shown that the separation and the applied load between the interfaces of microparts were considerably affected by the adhesion, except under small surface energy or contaminated surfaces. The results show that, in some cases, it needs external force to close the opposite surface or external load was needed to separate it to reach the appropriate separation in other cases. The relationship between surface roughness, particle size, surface energy, separation, friction and wear between the contacting surfaces can be obtained in this paper. The analytical results particle manufacture surface can to be a base for manufactory and design of microparts.

摘要(中文)............................................................... i
摘要(英文)............................................................... ii
誌謝..................................................................... iii
目錄..................................................................... iv
表目錄...................................................................vii
圖目錄...................................................................viii
符號說明.................................................................xi
第一章 緒論
1.1 前言................................................................. 1
1.2 微接觸理論文獻回顧................................................... 3
1.3 黏附力文獻回顧....................................................... 5
1.4 考慮黏附力之微接觸理論文獻回顧....................................... 6
1.5 毛細力理論文獻回顧................................................... 7
1.6 研究動機與論文架構................................................... 8
第二章 未考慮表面力之微接觸理論分析
2.1 前言.............. .................................................. 11
2.2 相對試件之統計接觸分析............................................... 11
2.3 顆粒與試件及上、下試件兩者之接觸分析................................. 13
2.3.1 顆粒與相對試件三者接觸均完全塑性變形............................... 13
2.3.2 顆粒與上、下試件接觸均彈性變形..................................... 16
a.單一顆粒與試件之接觸分析............................................... 16
b.界面間顆粒與試件之統計接觸分析......................................... 19
c.考慮顆粒效應之試件間接理論分析......................................... 20
d.上試件波峰與顆粒的平均及最大接觸負荷................................... 23
2.3.3 顆粒與其中一試件為完全塑性變形與另一試件為彈性變形................. 24
a.單一顆粒與試件之接觸分析............................................... 24
b.界面顆粒與工件之統計接觸分析........................................... 25
c.作用在下試件與上試件接觸間的顆粒效應................................... 26
d.研磨粒、研磨墊及工件與外加負荷之力平衡................................. 27
e.下試件波峰與顆粒的平均及最大接觸負荷................................... 28
第三章 考慮表面力三體接觸理論及磨擦與磨損分析
3.1 前言................................................................. 31
3.2 顆粒與上、下試件之黏附力分析......................................... 31
3.2.1上試件與下試件接觸黏附力分析........................................ 31
3.2.2顆粒與下試件接觸黏附力分析.......................................... 33
3.2.3顆粒與上試件接觸黏附力分析.......................................... 33
3.3 顆粒與上、下試件之毛細力分析......................................... 35
3.4 顆粒之砂磨磨損分析................................................... 39
3.5 顆粒與上、下試件之黏附磨擦分析....................................... 41
第四章 實驗與理論分析驗證
4.1前言.................................................................. 50
4.2真實接觸面積實驗台.................................................... 50
4.3試驗試件.............................................................. 50
4.4粗度儀量測系統........................................................ 51
4.5實驗驗證.............................................................. 51
4.6理論驗證.............................................................. 51
第五章 理論分析之結果與討論
5.1 力量-間隙平衡點...................................................... 55
5.2 脫離力............................................................... 58
5.3 接觸變形負荷比....................................................... 59
5.4 實際接觸面積......................................................... 61
5.5毛細力................................................................ 62
5.6黏附磨擦與砂磨磨損.................................................... 63
第六章 微表面形貌之加工、評估與選用
6.1 前言................................................................. 89
6.2 實驗之加工方式說明................................................... 89
6.3 奈米測試儀(Nano teat)簡介............................................ 90
6.4 原子力顯微鏡(AFM)簡介................................................ 91
6.5 實驗與評估說明....................................................... 92
第七章 結論與建議........................................................ 94
參考文獻................................................................. 97

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