臺灣博碩士論文加值系統

奈米級氧化鈰粉體的製備是由硫酸鈰溶液添加尿素並進一步陳化，在本研究中，硫酸鈰經由添加尿素會產生大量的沉澱物，由XRD 圖譜判別此沉澱物為非結晶鈰的前驅物，如果以傳統製程此前驅物必須在400oC 的煅燒下，才顯現出氧化鈰立方晶螢石結構的特性峰，而本研究發現在低溫下添加尿素溶液並進一步陳化,此常壓水熱陳化製程有助於氧化鈰粉體的形成，且為晶形傾向八面體的成長。由TEM的觀察得知經陳化 5 小時後, 所得沉澱物為奈米級氧化鈰，本研究進一步發現在較高尿素濃度下，能產生結晶性較佳的氧化鈰粉體。
本實驗亦比較添加不同沉澱劑及使用不同價數鈰鹽，探討其陳化製程對晶形及晶粒的影響，由實驗結果得知，尿素-硫酸鈰陳化系統及氨水-硝酸鈰陳化系統有較佳的八面體晶形及窄的粒徑分佈，並且能由小型CMP 拋光實驗求證。
由研磨實驗的結果，以尿素-硫酸鈰及氨水-硝酸鈰所合成的漿料有較佳的磨除率，其磨除率分別為116Å/min 和 93 Å/min，此結果符合八面體晶形及較大粒徑的氧化鈰能有較佳的磨除率。

In this article, cerium oxide powder with fluorite structure is formed by the traditional process of precipitation and calcinations at the temperature above 400oC. Nano-grade cerium oxide powder is prepared by the method of precipitation cerium sulfate with urea and aging. According to the experimental results, the precipitate of urea and cerium sulfate is amorphous. The precipitate is transferred to the nano grade cerium oxide with fluorite structure after aging at 100 oC for 5 hours. Adding urea to cerium sulfate and adding ammonia to cerium nitrate, respectively can obtain the well crystalline octahedron and narrow distribution particle size. Two
kinds of ceria slurries one is formed by cerium sulfate and urea, another is formed by cerium nitrate and ammonia hydroxide are examined by polishing test. The removal rate of the product of cerium sulfate and urea is about 116 Å/min and the removal rate of product of cerium nitrate and ammonia hydroxide is about 93 Å/min.

目錄
中文摘要…………………………………………………………………………………Ⅰ
英文摘要…………………………………………………………………………………Ⅱ
致謝………………………………………………………………………………………Ⅲ
目錄………………………………………………………………………………………Ⅳ
表目錄……………………………………………………………………………………Ⅵ
圖目錄……………………………………………………………………………………Ⅶ
符號說明…………………………………………………………………………………Ⅹ
第一章 緒論………………………………………………………………………………1
1-1 氧化鈰粉體之介紹…………………………………………………………………1
1-2 氧化鈰粉體的應用…………………………………………………………………2
1-3 前人之氧化鈰合成文獻回顧………………………………………………………4
1-4 研究動機……………………………………………………………………………7
第二章 原理部分…………………………………………………………………………8
2-1 粉體合成製程簡介…………………………………………………………………8
2-2 顆粒的陳化步驟……………………………………………………………………9
2-3 化學機械研磨原理介紹……………………………………………………………10
2-4 化學機械研磨中研磨液之種類及簡介……………………………………………12
2-5 氧化鈰粉體與晶圓表面鍵結………………………………………………………16
2-6淺溝絕緣層(STI)平坦化……………………………………………………………18
2-7化學機械研磨之Preston方程式……………………………………………………20
第三章 實驗部分…………………………………………………………………………21
3-1 藥品…………………………………………………………………………………21
3-2 實驗分析儀器………………………………………………………………………22
3-3 實驗方法與實驗步驟………………………………………………………………23
V
3-3-1 以傳統煅燒方式…………………………………………………………………23
3-3-2 以常壓水熱陳化方式……………………………………………………………23
3-3-3 改變不同沉澱劑下陳化…………………………………………………………23
3-3-4 改變不同價數的鈰鹽的熟成……………………………………………………23
3-4 研磨實驗部分………………………………………………………………………27
3-5 分析方法……………………………………………………………………………29
3-5-1 粉體型態及粒徑大小與其分佈…………………………………………………29
3-5-2 由XRD 分析粉體之組成…………………………………………………………29
3-5-3 由XRD 之檢測推算粉體粒徑……………………………………………………29
3-5-4 由XRD 檢測粉體晶形之分析……………………………………………………30
3-5-5 陳化過程中之pH值之量測………………………………………………………30
第四章 結果與討論………………………………………………………………………32
4-1 沉澱前趨物之形態…………………………………………………………………32
4-2 煅燒方式下合成……………………………………………………………………34
4-3 常壓水熱陳化方式下合成…………………………………………………………40
4-4 比較不同沉澱劑下的陳化…………………………………………………………51
4-5 不同價數鈰鹽的所得氧化鈰之比較………………………………………………57
4-6 不同條件下合成的氧化鈰漿料對研磨結果的影響………………………………64
第五章 結論………………………………………………………………………………68
參考文獻…………………………………………………………………………………70

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