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研究生:張恒豪
研究生(外文):Heng-Hao Chang
論文名稱:利用交錯沈積法提高光學薄膜之非均向性
論文名稱(外文):Enhance the anisotropic optical properties of thin films by bideposition technique
指導教授:任貽均
口試委員:陳學禮吳俊傑李正中
口試日期:2005-06-25
學位類別:碩士
校院名稱:國立臺北科技大學
系所名稱:光電工程系所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2005
畢業學年度:93
語文別:中文
論文頁數:60
中文關鍵詞:偏極光雙折射交錯沈積法鋸齒狀薄膜
外文關鍵詞:polarized lightbirefringentbidepositionzigzag thin-film
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本論文利用斜向柱狀薄膜特有的雙折射特性研製垂直正向入射之光學元件。理論上以矩陣法分析多層非均向性膜每一界面的電磁場邊界條件,進而計算整個膜系的反射係數,另一方面,以光學導納圖推算並解釋非均向性薄膜,其雙折射的實際成因。
實驗上,運用Fabry-Perot的原理,以交錯沈積方式製作鋸齒狀薄膜,控制鋸齒結構的週期,使不同偏極態的垂直入射光有不同的共振光譜,產生垂直入射之偏極選擇現象。另一方面,鍍膜中旋轉基板,製鍍螺旋結構之奈米薄膜,控制螺旋旋轉週期,觀察各種情形下,左旋入射光與右旋入射光之穿透率差異,以期實現左(右)旋光選擇器之目的。
In this study, various sculptured thin films are prepared and analyzed their anisotropic optical properties. Optical features including the reflectance and transmittance of stratified anisotropic media are calculated using the Berreman 4×4 matrix. The admittance diagram is applied to simulate the equivalent admittance of the anisotropic film.
Zigzag bideposited thin films with different period are prepared as the space layers of metal-dielectric-metal Fabry-Perot filters. The polarization spectra of filters are measured and analyzed the polarization selection effect upon normal incident. Helicoidally bideposited thin films with different pitch numbers have different transmittance spectra for right handed circular polarization and left handed circular polarization.
中文摘要.....................................i
英文摘要.....................................ii
誌謝.........................................iii
目錄.........................................iv
圖目錄.......................................vi
第一章 緒論.................................1
1.1文獻回顧..................................1
1.2非均向光學薄膜簡介........................2
1.3各種微觀結構薄膜..........................3
1.4以M-D-M結構探討交錯沈積的非均向特性.......4
第二章 原理介紹.............................5
2.2空間軸與主軸的轉換........................6
2.3主軸的Fresnel’s方程式....................7
2.4薄膜矩陣法................................9
2.5透射率與反射率............................13
2.6非均向導納法..............................18
2.7螺旋薄膜之旋光性..........................21
第三章 實驗與分析方法.......................26
3.1蒸鍍系統..................................26
3.2蒸鍍流程..................................29
3.3交錯沈積行為..............................30
3.4量測方法..................................33
3.4.1F-P的量測方式 ...........................33
3.4.2螺旋薄膜的量測..........................35
3.4.3斜向交錯薄膜的量測方式 ..................36
3.5分析方法..................................38
第四章 結果與討論 ...........................39
4.1結果.......................................39
4.2討論.......................................50
第五章 結論..................................56
5.1結論.......................................56
參考文獻......................................57
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