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研究生:李鑫
研究生(外文):Shin Lee
論文名稱:Al2O3-TiO2非晶複合膜應用於193奈米波長之高穿透率衰減式相位偏移光罩之光學特性研究
論文名稱(外文):Optical properties of the amorphous Al2O3-TiO2 composite film for H-T APSM at 193nm wavelength
指導教授:黃繼遠
指導教授(外文):Chi-Yuan Huang
學位類別:碩士
校院名稱:大同大學
系所名稱:材料工程學系(所)
學門:工程學門
學類:綜合工程學類
論文種類:學術論文
論文出版年:2005
畢業學年度:93
語文別:英文
論文頁數:78
中文關鍵詞:高穿透率衰減式相位偏移光罩
外文關鍵詞:H-T APSM
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利用R.F. 磁控濺鍍於室溫下在含氮氣和氧氣的氣氛中鍍製(Al2O3)x-(TiO2)1-x非晶複合膜。(Al2O3)x-(TiO2)1-x複合膜於O2/Ar流量比為2時是完全氧化的。(Al2O3)x-(TiO2)1-x複合膜之光學常數和(Al2O3)x-(TiO2)1-x複合膜中Al2O3的莫耳分率是呈現線性的關係。符合高穿透率衰減式相位偏移光罩(HT-APSM)之光學要求的光學常數可藉由調整(Al2O3)x-(TiO2)1-x複合膜中Al2O3的莫耳分率來達成。計算出符合使用於ArF 193nm微影技術之HT-APSM之光學要求的 (Al2O3)x-(TiO2)1-x複合膜之Al2O3莫耳分率範圍為78%~86%。在193nm波長下的反射率小於10%且在257nm波長下的檢測穿透率小於50%都符合在HT-APSM中關鍵的2個光學要求。為了得到具有最佳穿透率為20%之HT-APSM,我們製備出一Al2O3-TiO2複合膜,其光學性質符合ArF–line HT-APSM之最佳光學要求。所有膜之化學抗蝕性測試後之表面粗糙度和附著性測試皆符合要求。故單層Al2O3-TiO2複合膜對於使用HT-APSM去設計出65nm線寬之圖形來說是一可考慮的新材料。
Amorphous (Al2O3)x-(TiO2)1-x composite films are prepared using R.F. unbalanced magnetron sputtering in an atmosphere of argon and oxygen at room temperature. (Al2O3)x-(TiO2)1-x composite films are completely oxidized using an O2/Ar flow rate ratio of 2.0. The optical constants of (Al2O3)x-(TiO2)1-x composite films are linearly dependent on Al2O3 mole fraction in (Al2O3)x-(TiO2)1-x composite film. By tuning the Al2O3 mole fraction in the (Al2O3)x-(TiO2)1-x composite films, the optical constants can meet the optical requirements for a high transmittance attenuated phase shift mask (HT-APSM) blank. It can be found that the Al2O3 mole fraction in (Al2O3)x-(TiO2)1-x composite films which meet the optical requirements at 193 nm wavelength of an HT-APSM blank in ArF lithography is calculated to be between 78% and 86%. The reflectance of less than 10% at 193 nm wavelength and the inspection transmittance of less than 50% at 257 nm wavelength meet two key optical requirements for an HT-APSM blank. In order to obtain an HT-APSM blank with optimized transmittance of 20%, one Al2O3-TiO2 composite film is fabricated and its optical properties meet the optimized optical requirements for ArF –line HT-APSM blanks. All the films meet the requirements of surface roughness after the chemical durability test and the adhesion test. Therefore, monolayer Al2O3-TiO2 composite film is a new candidate material for HT-APSM blanks to be utilized to design fine pattern with dimensions as small 65nm.
Abstract………………….…………………..…….……………..Ⅰ
Contents…………………...…………………………….…..……Ⅳ
Table List…………………………...………….…………………Ⅶ
Figure List………………………………………………………..Ⅶ

Chapter1 Introduction…………………….………………...…...1

Chapter2 Paper review……………………………………........10
2-1 Phase Shifting Mask (PSM)……………………………………..….10
2-2 Attenuated Phase Shifting Mask (APSM)…………………………….11
2-3 Requirement of APSM………………………………………………..14
2-3-1 Optical requirement of APSM……………………………………14
2-3-2 Thin film structure of APSM……………………………………..16
2-3-3 Stability of APSM at ArF laser…………………………………..16
2-3-4 Adhesion between substrate and thin film of APSM…….………16
2-3-5 Chemical Stability of APSM……………………………………..17
2-4 Introduce of thin film of APSM,s materials…………………………..17
2-5 Magnetron sputtering technique…………………………………...….19
2-5-1 Principle of sputtering…………………………………...……….20
2-5-2 Principle of magnetron……………………………….…………..22
2-5-3 Thin film deposition…………………………………….………..25
2-6 Measuring of optical constants…………………………...…………...26

Chapter3 Experiment Method……………………………….....30
3-1 Choosing of HT-APSM,s materials…………………….......................32
3-2 Substrates and chemicals……………………………………………...32
3-2-1 Substrates………………………………………………………...32
3-2-2 Chemicals………………………………………………………...34
3-3 Cleaning of substrates………………………………………………...34
3-4 Thin film deposition…………………………………………………..35
3-4-1 Experimental apparatus…………………………………………..35
3-4-2 Thin film deposition condition…………………………………...36
3-4-3 Thin film deposition procedures…………………………………36
3-5 Measuring of thin film properties……………………………….…….38
3-5-1 Measuring of surface roughness……………………....................38
3-5-2 Measuring of transmittance and reflectance……………………..39
3-5-3 Measuring the composition of thin film…………….....................39
3-6 Calculation and simulation of optical properties……………………..39
3-6-1 Calculation of refractive index (n) and extinction index (k)……..39
3-6-2 Simulation of thin film,s spectra…………………………………41
Chapter4 Results and Discussions……………………………...42
4-1 Discuss the targets of Al2O3-TiO2 composite films………….………..42
4-2 Optical properties of Al2O3-TiO2 composite films……………………43
4-3 Analyzing the composition of Al2O3-TiO2 composite films…………..50
4-4 Adhesion test of Al2O3-TiO2 composite films………….......................53
4-5 Roughness test of Al2O3-TiO2 composite films……………………….54

Conclusion…………………………………………………..……56

Reference…………………………………………………………58

Appendix
Appendix A reflectance-transmittance mode
Appendix B The paper of publication
65nm-technology-node HT-AttPSM blanks using
amorphous composite Al2O3-TiO2 thin films
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