超大積體電路（Very Large Scale Integration；VLSI）的發明，導致半導體業界蓬勃發展，帶動了電子工業的快速發展。大量產品化角色的半導體製造業可以說居功厥偉。也因此，半導體製造的過程以及其管理，也被許多學者專家拿出來研究，以求能在效能、產能等方面改進，進而增加該產業的獲利。
而系統模擬（System Simulation）是這些相關研究中，廣泛被使用的方法。而為了能夠適應本來就動態多樣的半導體晶圓廠特性，一個具備高彈性、高延展性的模擬軟體就顯得更是重要。
因此，本論文以漸進式雛形開發法建構一套以物件導向為基礎的模擬軟體，同時我們以UML來分析設計整個物件程式庫。最後，我們介紹整個軟體物件程式庫（Library of Software Objects）的繼承關係，同時也說明設計的基本原則。

Because of the invention of very large scale integration（VLSI）technology, the semiconductor industry has been one of the most important industry. And because of this, the electronic industries grow faster than ever in the last fifty years. In order to improve the production efficiency of semiconductor manufacturers, a lot of researcher has done a lot of studies regarding production of semiconductor.
System simulation is one of the most popular technologies used by these researchers. To study dynamic nature of the semiconductor fabrication, a high flexibility and extensibility of the simulation software is required.
In this research, we use incremental prototyping methodology to construct the simulation software. Owing to the natural of the incremental prototyping method, this method is very suitable for creating object-oriented software. We also demonstrate how to apply this method on a simulation software development by using UML. An object software library created by using this method and the design principles are also presented.

指導教授推薦書…………………………………………………………
口試委員會審定書………………………………………………………
授權書…………………………………………………………………..iii
簽署人須知……………………………………………………………...iv
誌謝 ……………………………………………………………...v
中文摘要 ……………………………………………………………...vi
英文摘要 ……………………………………………………………...vii
章節目錄 ……………………………………………………………...viii
圖表目錄 ……………………………………………………………...xi
第一章 前言 1
1.1 研究背景 1
1.2 半導體晶圓製造流程簡介 1
1.3 研究動機與目的 6
1.4 論文架構 8
第二章 文獻探討 11
2.1 物件導向的觀念 11
2.1.1 物件導向的特性 12
2.1.2 物件導向分析 16
2.1.3 物件導向設計 16
2.1.4 物件導向程式設計 17
2.2 系統發展理論 17
2.2.1 瀑布式系統發展 18
2.2.2 雛型式系統發展 23
2.2.3 漸進式系統發展 26
2.3 物件導向系統分析方法論 29
2.3.1 物件導向系統分析方法論整理 30
2.3.2 統一模型化語言(Unified Modeling Language) 32
2.4 系統模擬 37
2.4.1 系統模擬概念 38
2.4.2 離散事件模擬概念 39
第三章 漸進軟體開發方法 45
3.1 漸進式系統開發系統理論概念 45
3.2 半導體晶圓廠模擬系統雛型系統開發 50
3.2.1 系統範圍規劃 50
3.2.2 建立初代雛型系統 52
3.2.3 建立第二代雛型系統 59
3.2.4 第三代雛型系統以及第四代雛型系統 68
第四章 物件導向模擬軟體模型 70
4.1 類別庫發展環境之選擇 70
4.1.1 JAVA的歷史 70
4.1.2 JAVA優點 71
4.2 半導體晶圓模擬雛型系統發展原則 72
4.3 雛型系統類別庫 74
第五章 結論與建議 82
5.1 研究結論 82
5.2 未來展望 85
參考文獻 87

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