臺灣博碩士論文加值系統

近年來由於微機電與生醫技術的快速發展，使得生物晶片的開發與應用越趨廣泛。應用高分子微成型技術製作具有微流道之生物晶片載具，取代以玻璃為基板生物晶片之製作，可達量產與降低生產成本之目的，進而提昇市場應用潛力。其中以微熱壓成型技術具有精度高、可成型面積大、高微流道深寬比、可批次生產與製程簡單等優點，而適合生物晶片之成型製造。
本研究中，設計出具有深與寬分別為30μm與100 μm之生物晶片，與具1/2、1、5/3與10/3之不同深寬比微流道，利用UV光將微流道圖案定義在SU-8光阻上，再以電鑄技術製作出具有高強度之鎳鈷合金母模。而後以厚度為1mm和直徑分別為70㎜與45㎜之PMMA與PC圓形薄板為基板配合3D顯微鏡量測，來探討微熱壓成型時壓印溫度、壓印力與壓印時間三項參數對微流道成型之影響。並針對不同深寬比之微流道成型作做一有系統之研究。
研究結果發現壓印力與壓印溫度對微流道成型正確性有很大之影響。提高壓印溫度會使高分子融膠的黏度降低而增加壓印深度與寬度之正確性，然成型週期亦會增長；而側壁脫模角之尺寸則不受壓印溫度之影響。微流道成型深度、寬度與側壁脫模角之複製正確性皆隨壓印力之增大而增加，同時亦達到一飽和值。壓印時間的增長，使高分子基材有足夠之時間來充填微流道，因此也可提高微流道之成型精確度。由不同深寬比微流道的成型可以發現微流道較小者，因成型所需融膠較少而較容易成型。但於生物晶片微流道系統與不同深寬比微流道之成型實驗，皆顯示較高之成型壓印溫度與壓印力會使產品薄化並容易黏模。
從本研究中，可充分了解以高分子為基材來成型具有微流道之生物晶片的微熱壓成型特性，相關研究成果並可提供研究人員或相關業者在成型生物晶片時之一參考準則。

Polymers have a great potential to be used for BioMEMS applications because many polymers are low cost, can be processed easily, and possess a broad range of physical and chemical properties.
In this study, the micro-channel array with 30μm in depth, 100μm in width and 50μm in pitch had designed. And another pattern with different aspect ratio had also designed. The UV light was used to transfer the pattern on SU-8 photoresist, and the Ni-Co based stamp was made by electroforming. PMMA and PC sheet of 70 ㎜ and 45㎜in diameter and 1 mm in thickness was utilized as molding substrate. 3D laser microscope was used to measure the width, depth and sidewall draft angle of the micro-channels.
The processing conditions studied include embossing force, embossing temperature, and embossing time. It was found that embossing force and embossing temperature are two key parameters affecting the molding accuracy significantly. Increasing embossing temperature will make the melt more soften and lower the viscosity of melt to reach good accuracy of imprint depth and width, but the cycle time also increased. All the accuracies of the imprint depth, width and draft angle increase with the applied embossing force until the associated dimensions reach saturated values. Increase of embossing time would increase the replication accuracy. Different aspect ratio micro-channels molding experimental shows that small channel is easily molding.
From this study, it will lead to a better understanding on the molding characteristics of hot embossing for the fabrication of micro-channels within a polymer substrate. The study also provides research worker a molding guideline for molded biochip devices.

目錄
中文摘要 ................................................................Ⅰ
英文摘要 ................................................................Ⅱ
致謝.....................................................................Ⅲ
目錄.....................................................................Ⅳ
表目錄...................................................................Ⅵ
圖目錄...................................................................Ⅶ
第一章 序論.............................................................1
1-1 前言..................................................................1
1-2 微機電系統與LIGA技術..................................................2
1-2-1 微機電系統簡介......................................................2
1-2-2 LIGA技術簡介........................................................3
1-3 微熱壓成型技術........................................................6
1-4 生物晶片..............................................................7
1-5 文獻回顧..............................................................8
1-6 研究動機與目的.......................................................18
1-7 本文架構.............................................................20
第二章 微熱壓成型實驗設備與方法........................................24
2-1 實驗設備.............................................................24
2-2 實驗材料.............................................................26
2-3 實驗方法.............................................................28
第三章 模具製作與微熱壓成型實驗........................................40
3-1 生物晶片微流道模具製作...............................................40
3-2 實驗設計與成型檢測方法...............................................42
3-3 微熱壓成型實驗.......................................................44
3-3-1 微熱壓成型實驗-壓印溫度實驗........................................44
3-3-2 微熱壓成型實驗-壓印力實驗..........................................45
3-3-3 微熱壓成型實驗-壓印時間實驗........................................45
3-3-4 不同深寬比微流道成型實驗...........................................45
第四章 實驗結果與討論..................................................55
4-1 微熱壓成型實驗-壓印溫度實驗結果......................................55
4-2 微熱壓成型實驗-壓印力實驗結果........................................56
4-3 微熱壓成型實驗-壓印時間實驗結果......................................58
4-4 不同深寬比微流道成型實驗結果.........................................60
4-5 微熱壓成型實驗結果討論...............................................62
第五章 結論與未來展望..................................................85
5-1 結論.................................................................85
5-2 未來展望.............................................................86
參考文獻.................................................................88
作者簡歷.................................................................96


表目錄
表1-1 三種微成型技術優缺點比較表........................................22
表3-1 生物晶片鎳鈷模具上的微流道尺寸....................................46
表3-2 不同深寬比鎳鈷模具上的微流道尺寸..................................46
表3-3 生物晶片微流道微熱壓成型參數表....................................46
表3-4 不同深寬比微流道微熱壓成型參數表..................................47



圖目錄
圖1-1 使用MEMS技術將質譜儀微小化........................................23
圖1-2 微熱壓成型示意圖..................................................23
圖2-1 EVG 520微熱壓成型機...............................................32
圖2-2 真空幫浦..........................................................32
圖2-3 冰水機冷卻系統....................................................33
圖2-4 上模加熱線圈......................................................33
圖2-5 加熱燈組..........................................................34
圖2-6 鈦合金模板........................................................34
圖2-7 空氣壓縮幫浦......................................................35
圖2-8 光阻旋塗機(MSC-300D) .............................................35
圖2-9 電熱板(YSC) ......................................................36
圖2-10 曝光機(SUSS) .....................................................36
圖2-11 微電鑄機(EFM-301) ................................................37
圖2-12 彩色雷射3D顯微鏡..................................................37
圖2-13 LIGA-like製程示意圖..............................................38
圖2-14 不同深寬比微流道設計..............................................38
圖2-15 生物晶片微流道系統................................................39
圖3-1 生物晶片微流道之光罩..............................................47
圖3-2 不同深寬比微流道之光罩............................................48
圖3-3 鎳鈷合金之生物晶片微流道金屬模具..................................48
圖3-4 鎳鈷合金不同深寬比微流道金屬模具..................................49
圖3-5 生物晶片微流道量測點A、B、C之位置.................................49
圖3-6 不同深寬比微流道量測點之位置......................................50
圖3-7 微流道的寬度、深度與側壁脫模角度定義..............................50
圖3-8 生物晶片微流道鎳鈷模具雷射3D顯微鏡檢測圖..........................51
圖3-9 不同深寬比微流道鎳鈷模具雷射3D顯微鏡檢測圖........................52
圖3-10 典型的微熱壓成型製程示意圖........................................53
圖3-11 成型基材與模具(左:上模板，右:下模板)..............................53
圖3-12 微熱壓成型自動化電腦參數設定畫面..................................54
圖4-1 微熱壓成型之生物晶片微流道系統....................................65
圖4-2 裁切後之微熱壓成型生物晶片微流道系統..............................65
圖4-3 微熱壓成型之不同深寬比微流道系統..................................66
圖4-4 壓印溫度對於微流道成型寬度的影響..................................66
圖4-5 壓印溫度對於微流道成型深度的影響..................................67
圖4-6 壓印溫度對於微流道側壁脫模角度的影響..............................67
圖4-7 壓印溫度高與壓印溫度低的成型比較..................................68
圖4-8 左邊成型產品薄化且面積變大，右邊為正常之成型產品..................69
圖4-9 壓印力對於微流道成型寬度的影響....................................69
圖4-10 壓印力對於微流道成型深度的影響....................................70
圖4-11 壓印力對於微流道側壁脫模角度的影響................................70
圖4-12 壓印力大與壓印力小的成型比較......................................71
圖4-13 壓印時間對於微流道成型寬度的影響..................................72
圖4-14 壓印時間對於微流道成型深度的影響..................................72
圖4-15 壓印時間對於微流道脫模角度的影響..................................73
圖4-16 壓印時間長與壓印時間短的成型比較..................................74
圖4-17 壓印力4kN時不同成型溫度對不同深寬比之微流道成型影響...............75
圖4-18 壓印力5kN時不同成型溫度對不同深寬比之微流道成型影響...............75
圖4-19 壓印力6kN時不同成型溫度對不同深寬比之微流道成型影響...............76
圖4-20 壓印力7kN時不同成型溫度對不同深寬比之微流道成型影響...............76
圖4-21 壓印力8kN時不同成型溫度對不同深寬比之微流道成型影響...............77
圖4-22 左邊成型產品薄化且面積變大，右邊為正常之成型產品..................77
圖4-23 成型溫度160℃時不同成型壓印力對不同深寬比之微流道成型影響.........78
圖4-24 成型溫度170℃時不同成型壓印力對不同深寬比之微流道成型影響.........78
圖4-25 成型溫度180℃時不同成型壓印力對不同深寬比之微流道成型影響.........79
圖4-26 成型溫度190℃時不同成型壓印力對不同深寬比之微流道成型影響.........79
圖4-27 成型溫度200℃時不同成型壓印力對不同深寬比之微流道成型影響.........80
圖4-28 成型時壓印溫度過低而無法完全將模具押入材料中來成型................80
圖4-29 成型時因壓印力太小而無法迫使融膠流動到角落來成型..................81
圖4-30 壓印時間對於成型的影響............................................82
圖4-31 微熱壓成型時壓印時間不足而導致成型不完全..........................83
圖4-32 成型條件不足與成型條件足夠之比較..................................84

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