臺灣博碩士論文加值系統

因應微奈米精密工業的發展，系統小型化與精密定位的需求日漸遽增，本研究設計一新式盤型史都華六軸平台，係採用多層內凹型負波桑比之連桿放大機構之設計原理，完成六組雙層非對稱放大機構，並以一體化之設計與加工，以消除元件與組裝之背隙誤差，達到平台之高精度微量位移，並實際應用於微小空間中。
本研究設計之微平台其基板與上平台尺寸分別為Φ70mm及Φ10mm，高度為20mm，機構設計係以電腦輔助設計軟體進行有限元素之模擬，分析單層、雙層及非對稱機構之應力、應變及放大倍率等。模擬結果顯示此盤型史都華機構平台之輸出行程較傳統PZT之行程放大約7.1倍，系統水平位移可達50μm、垂直位移可達50μm、旋轉角度為0.5°。

The systematic miniaturization and precise demand makes a reservation increase day by day to endure the device development of the nano industry. The research uses double-layer flexure enlarge hinge that the negative passion’s ratio structure to design 6 axle stage with asymmetry enlarge mechanical structure design mainly of micro stewart platform. This stage reach the high accuracy and the demand relatively small-scale in volume.
The appearance size of base plate and moving plate is 70mm and 10mm respectively, and the height is only 20mm. The integrated chain design without mechanical backlash and wear has the results the more accuracy. And dispel the assembling, have omitted the difficult work among the components of small scale. This enlarge structure with the concept of designing by single layer, double layers and asymmetry of negative passion ratio is used the simulation of the computer. The finite element software is applied to analysis the stress, strain , displacement and the enlarged relation of the structure. The characteristic of the 6 degree of freedom stage has high accuracy and micro-displacement with relative small volume. The double-layer asymmetry enlarging structure is enlarged by 6 timesfor the piezoelectric ceramic actuator. The six axle stawert stage has the horizontal displacement 50μm, the vertical displacement is 50μm and rotate angle 0.5 degree.

中文摘要 i
英文摘要 ii
誌謝 iii
目錄 iv
表目錄 vi
圖目錄 vii
符號說明 xiii
第一章 緒論 1
1.1 研究動機 1
1.2 文獻回顧 2
1.2.1 Stewart Platform發展史 7
1.3 模擬分析流程 8
1.4 研究目的 9
1.5 本文章節提要 11
第二章 盤型史都華六軸平台機構設計 12
2.1壓電陶瓷致動器 12
2.2負波桑比結構 14
2.3撓性鉸鍊 19
2.4.撓性鉸鍊模擬分析 21
2.4.1Rectangle Cross Section撓性鉸鍊模擬分析 21
2.4.2 Circular Notch Hinge撓性鉸鍊模擬分析 27
2.4.3 Corner-filleted撓性鉸鍊模擬分析 33
2.4.4 新式撓性鉸鍊模擬分析 39
2.5壓電放大機構設計 47
2.5.1單層壓電放大機構設計 47
2.5.2單軸雙層壓電放大機構設計 48
2.5.3單層非對稱壓電放大機構設計 48
2.6六軸史都華平台基本簡介 49
2.7六軸平台演算 50
2.8新式盤型史都華六軸平台設計 52
第三章 盤型史都華六軸平台模擬分析 54
3.1元素模型的建立 54
3.2單層放大機構分析 54
3.3單軸雙層放大機構分析 59
3.3單層非對稱壓電放大機構分析 63
3.4六軸平台模擬分析 68
第四章 實驗結果與分析 71
4.1單軸單層放大機構實測 74
4.2單軸雙層放大機構實測 76
4.3非對稱單軸放大機構實測 78
第五章 結論 80
5.1 研究成果 80
5.2 未來研究方向 81
參考文獻 82
簡歷 85

1.朱怡銘，「奈米級XYZ三自由度微定位平台之設計製造與分析」，國立台灣大學機械工程研究所，碩士論文，民國八十九年。
2.林高輝，胡雅慧，謝清吉，黃加閔，「微型史都華平台機構設計與數值模擬」，中國機械工程學會第二十二屆全國學術研討會，C6 174~152頁，中壢，民國九十四年十一月二十五日。
3.林高輝，胡雅慧，黃加閔，傅建榮，「微型五軸壓電平台之機構設計與模擬」，清雲學報，第二六卷第一期，25 ~ 33頁，民國九十五年三月。
4.吳冬立，「並聯式六自由度奈米定位平台研究」，國立台灣大學電機工程研究所，碩士論文，民國九十二年。
5.吳朗， 電子陶瓷壓電， 全欣科技圖書， 83 年12 月初版。
6.黃耀庭，「負波桑比機構之設計與分析」，國立中央大學機械工程研究所，碩士論文，民國九十一年。
7.黃宜正，謝士渠，劉保國，「精密微米致動器的設計及實際應用」，第三屆全國機構與機器設計學術研討會論文集，pp.17~24，12月，2000.
8.簡宏彰，「三自由度超精密微定位平台之研究」，國立台灣大學機械工程研究所碩士論文，民國八十六年。
9.蔡奇陵，「六自由度超機密奈米定位平台研製」，國立台灣大學電機工程研究所，碩士論文，民國九十年。
10.簡揚昌，「壓電長行程定位平台驅動控制器之研製」，國立台灣大學機械工程研究 所，碩士論文，民國九十二年。
11.Fredric, E., Scire, E. and Teague, C., “Piezodriven 50-µm range stage with subnanometer resolution”, Rev. Sci Instrum., Vol. 49, pp. 1735-1740, 1978.
12.Geng, Z. and Haynes, L., “Neural network solution for forward kinematics problem of a Stewart platform”, Int.Conf. on Robotics and Automation , pp. 2650-2655, 1991.
13.Herakovich, C. T., “Composite Laminate with Negative Through-the-Thickness Poisson’s Ratios”, Journal of Composite Materials, Vol.18, pp. 447- 455, 1984.
14.Lakes, R., Foam “Structures with a Negative Poisson’s Ratio”, Science, Vol. 235, No. 27, pp. 1038- 1040, 1987.
15.Larsen, U. D., Sigmund, O. and Bouwstra, S., “Design and Fabrication of Compliant Micromechanisms and Structures with Negative Poisson’s Ratio”, Journal of MEMS, Vol.6, No.2, pp. 99-106, 1997.
16.Lempriere, B. M., “Poisson’s ratio in orthotropic materials”, AIAA Journal, Vol.6, No.11, pp. 2226- 2227, 1968
17.Lobontiu, N., Paine, J.S.N., “Goldfarb, M., and Garcia, E. Corner-Filleted Flexure Hinges”, ASME Journal of Mechanical Design, vol. 123, no. 3, pp. 346-352, 2001.
18.Mamin, H. J., Abraham, D. W., Ganz, E. and Clarke, J., “Two - Dimensional, Remote Micr - positioner for a Scanning Tunneling Microscope”, Rev. Sci. Instrum.,Vol. 56, No. 11, 1985
19.Matey, J. R., Crandall, R. S. and Brycki, B., “ Biomorh-DrivenX-Y-Z Translation Stage for Scanned Image Misroscopy”, Rev. Sci. Instrum., Vol. 58, No. 4, 1987
20.Merlet, J. P., “Direct kinematics and assembly models of parallel manipulators”, Int. J. of Robotics Research, Vol. 11, No. 2, pp. 150-162, 1992.
21.NEC TOKIN，http://www.twnsatori.com.tw/taiwan/product/tokin_top
22.Paros, J. M. and Weisbord, L., “How to design flexure hinge”, Machine Design, Vol. 37, pp. 151-157, 1965
23.Quinn, R. D. and Lin, N. J., “Dynamics and Simulation of an Insect-Like Walking Robot”, Proceedings of the Ninth VPI&SU Symposium on Dynamics and Control of Large Structures, U.S.A., May 1993.
24.Raghavan, M., “The Stewart platform of general geo-metry has 40 configurations”, AMSE J. of Mechanisms, Vol. 115, pp. 277-282, 1993.
25.Chang, S. H. and Du, B. C. “A Piezodriven Precision Linear Mechanism with Large Travel range,” Proceedings, 1997 International Conference on Precision Engineering, Taipei, Taiwan, ROC, Nov. 18-21, 1997.
26.Sigmund, O., “Tailoring materials with prescribed elasticproperties”, Mechanics of Materials Vol. 20, pp. 351- 368, 1995
27.Stewart, D., “A Platform with Six Degrees - of - Freedom”, Proc. Inst. Mech. Eng., Vol. 180, No. 1, pp. 371-386, 1965.
28.Smith, S. T. and Chetwynd D. G. “Foundations of Ultraprecision Mechanism Design”, Gordon and Breach Science Publishers, 1992.
29.Gonda, S., Kurosawa T. and Tanimura Y. “Mechanical performances of a symmetrical, monolithic three-dimensional fine-motion stage for nanometrology ” , Meas. Sci. Technol., vol. 10, pp. 986-993, 1999.
30.Trease, B. P., Moon, Y. M. and Kota, S. Design of large-Displacement Compliant Joints, Trans. of the ASME, Vol. 127, pp.788-798, 2005.
31.Xu, Wei; King, Tim “Flexure hinge for piezoactuator displacement amplifiers: flexibility, accuracy, and stress considerations” ,Precision Engineering, vol: 19, issue: 1, pp.4-10, July, 1996.
32.Yamamoto, Y., Konishi R., Negishi Y., Kawakami T., “Prototyping Ubiquitous Micro-Manipulation System” Proceedings of the 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, pp.709-713,2003.7.