本研究探討三種不同之鑽石修整器對磨耗腐蝕之影響。分別以鎳電鍍層(ED)和鎳
鉻硬焊層(BD)兩種合金來結合鑽石磨粒於不鏽鋼基板上；另外，再以真空陰極電弧法
沉積一層類鑽碳膜(DLC)於鎳鉻硬焊層之鑽石修整器(BDD)表面。經由磨耗腐蝕實驗
得知，相較於電鍍方式，以鎳鉻硬焊製成之鑽石修整器，明顯無鑽石磨粒剝離情形。
由於電鍍製成鑽石修整器之鑽石排列較密集，與對磨塊接觸容易產生滑動現象，同時
造成較低的摩擦係數以及較少之對磨塊重量損失。適當的鑽石排列有利於鑽石磨粒刺
入對磨物體之表面，以更有效率的來修整阻塞表面。與單純鎳電鍍或鎳鉻硬焊之鑽石
修整器比較，類鑽碳膜鍍在鎳鉻硬焊鑽石修整器表面，可提高25%的移除率，在抗磨
耗與抗腐蝕方面均有極佳的表現。
為了進一步改善類鑽碳膜在磨耗腐蝕之應用，本研究利用田口實驗設計法來探討
陰極電弧法將類鑚碳膜沉積於無電鍍鎳基材時，基板偏壓(bias)、電弧電流(current)、
氬氣流量(argon flow)及氮/氬氣比例(N2/Ar ratio)等四個製程控制因子對腐蝕磨耗特性
的影響。實驗結果顯示，以氮/氬氣比例及基板偏壓對薄膜結構、粗糙度、硬度與磨
耗腐蝕性質影響最大。隨著氮/氬氣比例增加，造成薄膜成分中氮/碳比例(N/C ratio)
上升，拉曼光譜強度比(ID/IG)增加，代表薄膜結構趨向石墨化；因此而降低薄膜硬度
與耐磨耗腐蝕特性。基板偏壓的增加，造成表面溫度提高，引起薄膜之拉曼光譜強度
比(ID/IG)上升，石墨相聚集，因而提高表面粗糙度與腐蝕電流密度。

There are three kinds of conditioners discussed; they were bonded by electroplating
nickel, brazing Ni-Cr alloy and DLC films deposition on the brazed conditioner. After a
wear corrosion test, the brazing process shows no diamond fall-out when compared with
the electroplating process. The dense distribution of diamond grits caused a lower
friction coefficient and a weight loss of counterpart, due to the formation of sliding
phenomenon during the wear-corrosion test. The suitable clearances between each
diamond grit benefits the penetration against counterpart, and indeed scrape efficiently.
DLC films deposited on the conditioner surface of brazed Ni-Cr alloy conditioner which
exhibits the best overall performance in terms of a higher removal rate, a lower wear loss
and a better corrosion resistance compared with electroplating and brazing conditioners.
Subsequently, in order to evaluate the effect of proceeding parameter with
wear-corrosion properties of DLC films using cathodic arc deposition. There were four
factors with three levels for the evaluation as L9 orthogonal array which were substrate
bias, arc current, argon flow rate, N2/Ar ratio, in deposited procedure respectively. The
two factors, N2/Ar flow and substrate bias were significant factors for structure, roughness,
hardness, and wear-corrosion properties in the DLC films. When N2/Ar ratio increased,
promoted the N/C ratio raising and the ID/IG enlarging, thus decreased the hardness and
wear-corrosion properties. With increased substrate bias, lead to an over-heat on
substrate, the ID/IG was increased due to sp2 cluster size enlarge, roughed its surface.

Abstract (in Chinese)……………………………………………………………………………… i
Abstract (in English)……………………………………………………………………………… ii
Acknowledgments………………………………………………………………………………… iv
Contents…………………………………………………………………………………………… v
Table list……………………………….………………………………………………………….. vii
Figure list………………………………………………………………………….………………. viii
1. Introduction………………………………………………………………….………………….. 1
2. Literature survey…………………………………………………………….………………….. 8
2.1 Diamond conditioner……………………………………………….………………… 8
2.2 Diamond-Like Carbon………………………………………………………..……… 11
3. Experimental procedure………………………………………………………………………… 15
3.1 Material Preparation……………………………………………………..…………… 15
3.2 Surface analysis……………………………………………………………….……… 17
3.3 Analysis the Bonding Structure of Diamond-Like Carbon…………………………… 17
3.3.1 ESCA………………………………………………………….…........………… 18
3.3.2 Raman……………………………………………………………...........……… 18
3.4 Mechanical Hardness…………………………………………………………….…… 19
3.5 Electrochemical test………………………………………………………...………… 20
3.6 Wear-Corrosion test………………………………………………………...………… 21
4. Results and discussion……………………………………………………………………..…… 24
4.1 Wear-Corrosion Properties of Diamond Conditioners in CMP Slurry…………..…… 24
4.1.1 Surface analysis……………………….………………………………………… 24
4.1.2 Electrochemical properties……………………………………………………… 24
4.1.3 Wear-corrosion properties…………….………………………………………… 25
4.1.4 Worn surface observation……………..………………………………………… 27
4.2 Wear-Corrosion properties of Diamond-Like Carbon in 3.5% NaCl Aqueous
Solution…………………………………………………………………………………
29
4.2.1 Bonding structure…………………..…………………………………………… 29
4.2.1.1 N/C ratio……………………..……………………………………………… 29
4.2.1.2 ID/IG ratio…………………….……………………………………………… 30
vi
4.2.2Roughness………………………………………………………………………… 31
4.2.3 Hardness………………………………………………………………………… 31
4.2.4 Electrochemical properties……………………………………………………… 32
4.2.5 Wear-corrosion properties…………………………………….………………… 33
4.2.5.1 Wear-corrosion current density……………………………………………… 33
4.2.5.2 Friction coefficient………………………………………..………………… 33
5. Conclusions…………………………………………………………………...………………… 58
6. References……………………………………………………………………………………… 60

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