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研究生:陳建任
研究生(外文):Chien-jen Chen
論文名稱:以旋轉工作台與羊毛輪進行光學玻璃二階段奈米級拋光加工製程研究
論文名稱(外文):Combined Microgrinding and Nanoscaled Nanopolishing process for Optical Glasses by Using Wool-Felt Wheels and Rotary Table
指導教授:駱榮富
指導教授(外文):R.F louh
學位類別:碩士
校院名稱:逢甲大學
系所名稱:材料科學所
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2006
畢業學年度:94
語文別:中文
論文頁數:166
中文關鍵詞:氧化物磨粒漿料光學玻璃SEM羊毛輪微研削NIP二階段加工Nomarski顯微鏡SPMVIS-IR光譜
外文關鍵詞:MicrogrindingOptical GlassesOxide Abrasive SlurryNanoplanarizationMechanochemical GrindingNomarski MicroscopeNIPSPMWool Felt WheelsVIS-IR Spectroscopy
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光學玻璃為諸多光學與光電產品或系統的重要零組件材料。但光學玻璃硬度高且為脆性材料,隨著不同的加工手法玻璃生坏會有不同程度的尺度偏差,因此需要後續的表面加工工序來達到光學玻璃應用上諸如表面粗度、光穿透度以及尺寸精度等的品質要求。鑒於光學玻璃於加工過程容易產生脆性破壞機制,因此吾人選用高號數且高硬度的鑽石砂輪輔以CeO2漿料於高精度往復式工作台對光學玻璃進行第一階段的微研削表面平坦化。吾人為求更高精度的光學玻璃表面品質,進而開發第二階段的拋光工序,吾人採用軟質羊毛輪配合CeO2、Fe2O3、Al2O3以及SiO2不同的氧化物磨粒漿料於旋轉工作台上進行拋光,第二階段的拋光製程主要目的為利用微量的漿料移除率以及高運作效率的旋轉台來達到表面拋光的效果。
吾人利用兩階段的微研削拋光加工製程所得到的光學玻璃經SEM、SPM、Nomarski顯微鏡、NIP以及UV-VIS光譜等測試結果均顯示經兩階段拋光加工後光學玻璃不管是表面平整度與材料表面硬度以及光學性質均有大幅的提升,實驗結果均有達到吾人所預期的加工品質。
In the first stage of our mechanochemical microgrinding process, optical glasses were planarized in a reciprocal grinding mode by using ceria oxide abrasive slurry and fine-grit diamond wheels. Subsequently, the workpiece attached onto a speed-controlled rotary table was polished by wool felt wheels combined with ultrafine oxide (CeO2, SiO2, Al2O3, and Fe2O3) abrasive slurry to attain a subtle removal rate for the requirements of nanoplanarization. A subsystem of oxide abrasive slurry smoothly pumped into the contact region between superabrasive wheel and optical glass workpiece, where circulation flow rate, pumping pressure, and chilling of slurry can be carefully manipulated during the microgrinding process, was employed in the nanoplanarization process.
The interaction among optical glasses under rotational movements, ultrafine oxide abrasive slurry, and wool felt wheel polishing process, which would lead to the uniform, ductile material removal at the very surface of workpiece. A dynamic balancing gauge for the microgrinding wheel was employed in order to evaluate how the machining operation conditions and wheel parameters affect the surface integrity of workpiece. In course of microgrinding material removal process, microstructural behavior and machining damage of surface and sub-surface for the optical glasses were evaluated by synchrotron X-ray microradiography (SXMR) technique. The glass workpiece after nanoplanarization was analyzed by scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS), scanning prove microscopy (SPM), Nomarski optical microscope (profilometer), nano-indentation probe (NIP) and VIS-IR spectrometer in terms of the variation of surface topology, polishing-induced damages in surface and subsurface, the potential tribochemical reactions, and variation of optical properties after the microgrinding process. The results of two-stage microgrinding process using a rotary table show that a well-accepted surface integrity, hardness, enhanced strength after machining, and optical properties for glass samples were obtained with the optimized process parameters.
中文摘要………………………………………………………………….Ι
英文摘要…………………………………………………………………ΙΙ
目錄 …ΙV
圖目錄 VIIΙ
表目錄 XVΙΙ
第一章 緒 論 1
1.1 前言 1
1.2 研究之背景及目的 2
第二章 理論基礎 7
2.1 光學玻璃材料簡介及其實際應用 7
2.1.1 光學玻璃的簡介 7
2.1.2 光學玻璃的種類與組成 8
2.1.3 光學玻璃的光學性質 10
2.1.4 光學玻璃的其他性質………………………….…12
2.1.5 光學玻璃材料之實際應用…………………….…16
2.2 研磨加工基本原理 18
2.2.1 磨輪和研削力 18
2.2.2 磨粒與加工件表面的交互作用 21
2.2.3 砂輪磨粒的再生作用與研削機制 25
2.2.4 加工件研削區域的型態 28
2.2.5 磨輪的削正與削銳 31
2.2.6 化學機械微研削加工的原理 33
2.2.7 光學玻璃料工件的磨屑形態………………….…35
2.3 旋轉加工機台基本原理 37
2.4 表面鏡面拋光加工 40
2.4.1 拋光加工原理 40
2.4.2 拋光技術的機構 41
2.4.3 影響拋光加工效率的因素……………………….44
2.4.4 各式拋光加工種類概要………………………….45
2.4.5 氧化物搭配軟質磨輪的拋光機制…………..…..45
2.4.6 自由磨粒漿料及自由磨粒……………………….48
2.5 同步輻射X-ray顯微分析 50
2.5.1 同步輻射的發展………………………………………51
2.5.2 同步輻射的優點………………………………………54
2.5.3 同步輻射的應用………………………………………58
第三章 實驗步驟與方法 63
3.1 實驗方法的改進 63
3.2 二階段光學玻璃微研削與拋光加工製程 64
3.3 二階段光學玻璃表面拋光加工製程之工件性質評估 71
3.3.1 氧化物自由磨粒漿料性質分析…………………..…. 71
3.3.2 自由磨粒漿料之懸浮性分析……………….…….......72
3.3.3 加工件之材料移除率計算…………..…………..74
3.3.4 加工件之比研削能量計算………………..…..…75
3.3.5 加工件之Nomarski表面型態分析……………..76
3.3.6 加工件表面的顯微結構及SPM量測觀察分..….76
3.3.7 加工件表面硬度量測………………………..…...80
3.3.8 加工件表面殘留應力量測………..………………......81
3.3.9 穿透率與反射率的量測………………………….83
3.3.10 同步輻射X-ray顯微影像分析…………………83
第四章 結果與討論 85
4.1 BK7光學玻璃加工試片之顯微結構與機械性質 85
4.2 自由磨粒粉體對加工品質影響分析 88
4.3 自由磨粒漿料之懸浮性量測 98
4.4 光學玻璃以羊毛輪於旋轉工作台上拋光之材料移除率與比研削能量 99
4.5 光學玻璃之表面粗度 107
4.6 光學玻璃之表面加工品質評估 113
4.6.1 加工件表面之Nomarski與SEM顯微結構分析113
4.6.2 加工件表面之SPM顯微結構 124
4.6.3 旋轉台轉速改變之SPM顯微結構變化分析…132
4.6.4 二階段拋光後光學玻璃表面硬度變化與殘留應力分布情形…………………………………...…144
4.6.5 二階段拋光後光學玻璃光學性質量測………..147
4.6.6 同步輻射X-ray攝影術表面損傷分析………..149
4.7 本實驗工作的未來方向與建議 154
第五章 結 論 158
致謝…………………………………………………………………….165
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