臺灣博碩士論文加值系統

在微機電系統(Micro-electro-mechanical System，MEMS)中，微致動器是系統驅動力的來源，使系統可以作動。本文針對多晶矽電熱式微致動器，以分塊動態模型的方式進行解析及模擬分析，並藉以探討系統幾何參數對於系統動態響應的影響

In micro-electromechanical system (MEMS), the micro-actuator is the core part that provides motion. This thesis presents a lumped dynamic model for polysilicon electro-thermal micro-actuators. Based on proposed model, analytical and simulation analysis is conducted to investigate the effects of the actuators’ geometric parameters on the system’s dynamic response.

中文摘要 …………………………………………... Ⅰ
英文摘要 …………………………………………... II

目錄 …………………………………………... III

圖目錄 …………………………………………... VI


第一章 緒論 ………………………………………. 1
1.1 前言…………… ………………………………... 1
1.2 文獻回顧 ………………………………………... 2
1.3 研究動機與目的 ....……………………………... 5
1.4 本文內容概要 …………………………………... 8

第二章 電熱式微致動器設計與相關理論基礎…... 9
2.1 電熱式微致動器結構設計與致動原理 ……….. 9
2.2 基本理論基礎 …………………………………... 10
2.2-1 電阻、焦耳熱及熱變形理論 …………………... 10
2.2-2 位移分析理論 ………………………………....... 11

第三章 分析及建模…..………................................. 14
3.1 各別部份………………………………………… 14
3.1-1 電路部份 ……….………..………..…………... 14
3.1-2 熱源部份………………………………………... 14
3.1-3 熱傳部分………………………………………... 15
3.1-4 膨脹變形部份………………………………........ 16
3.1-5 迴授效應部份………………………………......... 17
3.2 系統整合……………………............................... 18
3.3 模擬分析…………………………………………. 22
3.3-1 冷臂長度由短變長對極點位置的影響…………. 22
3.3-2 幾何參數等比例放大或縮小時對極點位置的影響…………………………………………………. 24
3.3-3 冷臂寬度的變化對極點位置的影響……………. 26
3.3-4 冷臂長度對Kstatic (static gain)影響……………. 27
3.3-5 冷臂寬度對Kstatic (static gain)影響……………. 28
3.4 模擬結果討論……………………………………. 30

第四章 結論與未來研究方向……………………... 31
4.1 結論……………………….…………………........ 31
4.2 未來研究方向……………………………............. 33

參考文獻 34

附錄A 37

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