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研究生:范宗禮
研究生(外文):Tsung-Li Fan
論文名稱:微電熱式致動器第二冷臂尺寸對變形與應力之影響
論文名稱(外文):Effect of the second cold arm on deformation and stress of micro electro-thermal actuator
指導教授:林孟儒林孟儒引用關係
指導教授(外文):Meng-Ju Lin
學位類別:碩士
校院名稱:逢甲大學
系所名稱:機械工程學所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2006
畢業學年度:94
語文別:中文
論文頁數:60
中文關鍵詞:微電熱式致動器有限元素分析
外文關鍵詞:microactuatorsfinite element analysis
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微機電系統(Micro-Electro-Mechanical System,MEMS)元件包含微致動器、微感測器及相關之傳動元件。其中微致動器是提供整個微機電系統的動力來源,使系統能有效的運作。本論文是利用有限元素分析軟體ANSYS做微致動器的分析模擬。微致動器因施加電壓,使結構因內電阻產生焦耳熱,並因熱膨脹現象使微結構產生變形。電熱效應所產生的應力與電壓成正比並近似線性,應力與因為兩懸臂樑膨脹效果不同所造成的側向位移也近似線性。本文就第二冷臂尺寸對性能的影響,由分析結果發現,當第二冷臂越靠近自由端時最高溫度會因此下降,而微致動器的設計目的;側向位移,也相對的上升。而第二冷臂的寬度對致動器的性能影響不大,有第二冷臂的會比單一冷臂的致動器有較小的應力,但是不同電壓下的位移相差則不是太多。
Devices of Micro-electro-mechanical System (MEMS) include microactuators, microsensors and their transducers. Where, the microactuators drive the whole system and enable the system to operate effectively. Electro-thermal actuators are one of the most important microactuators of MEMS. Therefore, how to optimize the size of electro-thermal microactuators is an important topic. Using numerical methods of finite element method by the software ANSYS, the performance of electro-thermal actuators is analyzed for details. Due to heat generation from applied voltages and thermal expansion of material, the microactuators will deform. The relation between stresses and applied voltages is in direct proportion and is linear. The relation between stresses and deformation with the side direction that cause in result two cantilever beams expand is linear, too. From the analysis results, the second cold arm has effect on the performance. As the results shown, when the cold arm is more near the free end, the highest temperature lowers down and the lateral displacement increases. It is also found that the width of the second cold has almost no significant effect on performance of the microactuator. Comparing the electro-thermal microactuators with two and single cold arms, the actuator with two cold arm will have smaller stresses than the actuator with single cold arm. However, the displacement of the actuators with two cold arms and single cold arm has no difference under different applied voltages.
中文摘要 ……………………………………………Ⅰ
英文摘要 ……………………………………………II
目錄 ……………………………………………III
圖目錄 ……………………………………………VI
表目錄 ……………………………………………VIII

第一章 緒論…………………………………………1
1.1 前言……………………………1
1.2 文獻回顧………………………………………2
1.3 研究動機與目的……………………………6
1.4 本文內容概要……………………………… 6

第二章 電熱式微致動器設計與相關理論基礎……7
2.1 電熱式微致動器結構設計與致動原理…………7
2.2 基本理論基礎………………………………8
2.2-1 電阻、焦耳熱及熱變形…………………………8
2.2-2 電場分析理論………………………………9
2.2-3 溫度場分析理論……………………………10
2.2-4 熱應力場分析理論…………………………15
2.2-5 電熱有限元素方程式..………………………16

第三章 電熱式微致動器之模擬分析………18
3.1 分析基本假設…………………………………19
3.2 ANSYS有限元素分析軟體之分析流程…………19
3.3 耦合分析………………………………………21
3.3-1 前處理………………………………………21
3.3-2 求解…………………………………………26
3.3-3 後處理………………………………………26

第四章 結果與討論…………………………………30
4.1 改變所加第二冷臂位置與施加不同電壓之影響…30
4.2 改變所加第二冷臂長度與施加不同電壓之影響…34
4.3 改變所加第二冷臂寬度與施加不同電壓之影響…38
4.4 有無第二冷臂對微致動器性能的影響比較………41


第五章 結論與未來研究方向……………………45
5.1 結論…………………………………………………45
5.2 未來研究方向………………………………………46

參考文獻 …………………………………………47
參考文獻
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