本研究以快速準確的方式檢測光儲存相變化記錄點，檢測的樣品包含DVD+RW及新世代藍光碟片（HD-DVD、blu-ray disc），使用掃描式電子顯微鏡、導電性原子力顯微儀及掃描表面電位顯微儀等設備進行檢測，結果顯示導電性原子力顯微儀具較高的解析度，而掃瞄表面電位顯微儀可以作定量分析，並利用這兩種方法檢測不同寫入及擦拭參數下記錄點的變化情形。
DVD＋RW記錄點因為過高的寫入功率（15mW～20mW）產生側邊不完整及中心區域結晶化，在適當的寫入功率下則無上述情形產生，其記錄點尺寸僅與雷射功率強度有關。HD-DVD採用兩種不同的膜層結構，在相同寫入策略下會因為膜層結構的差異造成記錄點長度由150nm下降至62nm。
討論擦拭動作對記錄點之影響方面，15mW雷射功率在DVD＋RW所寫下的記錄點，在8mW雷射功率擦拭時，記錄點可以完全被擦拭且其記錄層的結晶度高於未寫入的碟片；在4~6mW擦拭時記錄點的殘留痕跡與未寫入區域功函數差值約4.5mV；2mW擦拭功率則無法擦拭掉記錄點。
使用導電性原子力顯微儀及掃描表面電位顯微儀，可以為光儲存相變化記錄媒體之寫入擦拭策略和製程參數，提供一個具有高度參考價值的撿測衣據，對於未來高密度光儲存相變化記憶的發展有很大的幫助。

In this study, a rapid and precise method was adopted to measure the recording bits of some optical storage that apply phase-change theory. The studies were carried out on DVD+RW and new-generation blue-ray disks (HD-DVD and blu-ray disc). To carry out the experiment, scanning electron microscopy (SEM)、conductive atomic force microscopy (C-AFM) and scanning surface potential microscopy (SSPM) were used. The results show that C-AFM has the highest resolution, while SSPM has the best quantitative analyzing capability. Both C-AFM and SSPM were used to examine the reliability and performance of optical recording with respect to process parameters.
When high power laser (15mW~20mW) was used to write on DVD+RW disk, the sides of the recording bits were affected and the center region showed the sign of crystallization. If lower laser power was used, the size of recording bit would only depend on laser power. However, if laser power was used on a double-layered HD-DVD, which had different layer thickness and structure, the recording bit length changed from 150 nm down to 62 nm.
For erasing study, various erasing power were applied on the recording bit written with 15 mW. It is found that being erased with 8mW, the bits can be completely erased, and the recording region had a higher degree of crystallinity than the unrecorded region. When 4~6 mW were used to erase the recording bits, the difference in work function between the erased region and the unrecorded region was around 4.5 mV. 2mW laser power can not erase recording bit because the power is too low.
The C-AFM and SSPM used in the present study can be very helpful in developing the best strategy for writing and erasing, adjusting composition of phase-change recording material, and adjusting layer thickness and structure.

第一章 前言…………………………………………………………………...1
1.1 序論…….………………………………………………………………….1
1.2光儲存系統的發展……………………..…………………………………..2
1.3光儲存容量的提升…………………………………………………4
1.4 記錄材料及記錄點特性………………………………………….9
1.5 研究動機………………………………………………………...……….12
第二章、實驗設備與研究方法……………………………………….………15
2.1掃描探針顯微術介紹………………………………………..…..15
2.2樣品製備……………………………………………..……………24
第三章 實驗結果與討論…………………………………….………………25
3.1比較C-AFM及SSPM 對於記錄點研究的差異………………25
3.1.1相變化材料因素………………………………………………..29
3.1.2量測機制因素……………………………………………….….29
3.2表面位能顯微術研究擦拭功率對DVD+RW的影響…………32
3.3 不同寫入功率對DVD＋RW記錄點的影響……………………………40
3.4 記錄點檢測技術應用於HD-DVD碟片膜層結構開發…………………45
第四章 結論………………………………………………………………….50

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