臺灣博碩士論文加值系統

本研究是針對多自由度目的而去設計出一個六自由度定位平台，採用壓電材料、配合撓性結構來達到定位效果，在本研究中利用檢核表來激發新的構想，克服平台結構的問題，設計一個新的機構，整體設計乃為一體機構，無需組裝。
本論文的研究步驟主要可分為三個階段，(1)定位平台的概念設計、(2)定位平台的理論分析、(3)定位平台的實體實驗。在設計分析流程中，首先根據設計需求而配合檢核表產生定位平台的概念設計，再針對定位平台的撓性結構之構型分析其靜態與動態特性，最後將理論分析與ANSYS有限元素分析、自然頻率響應實驗的結果三者比較，藉此以驗證整個理論分析流程的正確性並設計出在X方向之最大位移為13.8μm、Y方向之最大位移為13.68μm、Z方向之最大位移為18.58μm、θ之最大旋轉量為42.4μrad、φ之最大旋轉量為351.36μrad、ψ之最大旋轉量為330.44μrad之定位平台。

The purpose of this research is to design a six degree-of-freedom positioning stage. By using flexure hinge and piezoelectric actuator, this stage can achieve precision positioning with nanometer resolution. The Checklist method was used to solve the problem embedded in the conventional precision stage and generate a new conceptual design. We designed a positioning stage in monolithic mechanism with six degree-of-freedom.
In this thesis, the functional requirements were discussed firstly. A conceptual design was followed according to these functional requirements. Then a mathematical model of the stage was constructed. Finite element analysis with experiment was conducted to verify the design. The experiment results show that the stage can achieve a maximum displacement 13.8μm in X axis; 13.68μm in Y axis; and 18.58μm in Z axis. The stage can also achieve a maximum rotation 42.4 μrad around X axis; 351.36μrad around Y axis; and 330.44 μrad around Z axis.

目錄
摘要 I
ABSTRACT II
目錄 III
圖目錄 VI
表目錄 IX
第一章 緒論 1
1-1 前言 1
1-2 文獻回顧 4
1-3 研究目的 7
1-4 研究方法 7
第二章 系統元件與設計概念 9
2-1 功能分析 9
2-2割痕式撓性結構 11
2-3 壓電致動器 13
2-3.1 壓電致動器基本物理性質 14
2-3.2 壓電致動器使用注意事項 17
2-4 平台設計概念 18
2-4.1 檢核表法 18
2-4.2 平台概念產生 22
第三章 定位平台理論分析 25
3-1 X、Y、θ方向之動態方程式之推導 25
3-1.1 X軸推導 25
3-1.2 Y軸推導 27
3-1.3 θ軸推導 29
3-2 Z、φ、ψ方向之動態方程式推導 32
3-2.1 Z軸推導 33
3-2.2 φ、ψ推導 35
第四章 定位平台之ANSYS分析 41
4-1 靜態分析 42
4-2 動態分析 45
4.3 最大位移分析 47
第五章 定位平台之實驗與結果分析 48
5-1 實驗架構 48
5-1.1 電容式感測器 48
5-1.2 PC-Based 控制器 50
5-2 平台自然頻率測試 51
5-3 最大位移測試 53
5-4 耦合測試 55
5-5 結果與討論 58
第六章、結論與未來展望 66
6.1 結論 66
6.2 未來展望 67

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