臺灣博碩士論文加值系統

　　隨著晶圓尺寸越來越大，重量亦隨之增加，至十二吋晶圓時代，廠房面積亦以不等倍數擴增，物料搬運距離增加，搬運工作已非人力所能負荷，必須仰賴自動化物料搬運系統（Automated material handling system, AMHS）。規劃一個搬運路徑設計，除了滿足晶圓廠中複雜的搬運需求以外，亦需能降低搬運系統所造成的產能損失和簡化現場控制機制，此為當前晶圓廠搬運系統設計上的重要議題。
本研究提出「分段式雙向雙軌迴圈（Segmented Dual-track Bidirectional Loop, SDTBL）」設計型態，將搬運系統的雙軌迴圈劃分為互相獨立的區段，每個區段上僅有一定數量之雙向行進搬運車，在區段間設置的轉運暫存區作為切換區段之功能，也藉由轉運暫存區，將每個獨立的區段連通起來。此搬運系統設計能夠在不增加搬運設備的情況之下，藉由規範搬運車行進範圍消除碰撞或壅塞之潛在風險。本研究提出了兩種SDTBL的劃分型態，同時說明其區段劃分的策略及具體步驟，並建構案例公司自動搬運系統之模擬模式，以模擬實驗分析比較各方案之優劣。

With the increase in the size and weight of 300mm wafers, the factory area also enlarged. Due to the long-distance material flow, it has become necessary to eliminate the manual handling of the wafers, hence an automated material handling system (AMHS) is a must for a 300mm manufacturing facility. It is a valuable issue to design an AMHS not only capable of meeting plenty and complex material handling requirement but also simplifying control and reducing capacity loss.
This research proposes the segmented dual-track bidirectional loop (SDTBL) design for an AMHS. The configuration is based on a double-loop flowpath structre that is divided into non-overlapping segments, each containing certain number of vehicles operating in bidirectional mode. Transfer buffer is set to enable convert between segments and connect each independence zones. This structure elimates congestion and blocking without additional investment by operating vechicles on mutually exclusive tracks. The segmentation strategy and steps under two scenarios are developed in this paper, and a simulation model is constructed to evaluate the performace of each segmented cases.

摘 要 iv
Abstract v
誌 謝 vii
目 錄 viii
圖 目 錄 xi
表 目 錄 xiv
第一章 緒論 1
1.1 研究背景與動機 1
1.2 研究目的 3
1.3 研究範圍與限制 4
1.4 研究流程 4
1.5 論文架構 5
第二章 文獻探討 7
2.1 晶圓廠之設施佈置與物料搬運系統 7
2.2 搬運系統路徑設計與規劃 9
2.2.1 傳統式搬運系統 10
2.2.2 單迴圈搬運系統 11
2.2.3 區域式設計系統 12
2.3 分段式搬運路徑設計 14
2.4 系統模擬方法與工具 16
2.5 搬運系統車輛控制與績效衡量指標 18
2.5.1 空車停放位置 18
2.5.2 空車派車法則 18
2.5.3 績效衡量指標 19
第三章 研究方法 20
3.1 分段式雙向雙軌迴圈設計 20
3.1.1 設計型態說明 20
3.1.2 區段劃分策略說明 21
3.1.3 情境一劃分形式及步驟 22
3.1.4 情境二形式及步驟 24
3.2 模擬模式建構程序 25
第四章 案例分析 28
4.1 研究案例說明 28
4.1.1 現行物料搬運系統運作方法 28
4.1.2 研究假設 31
4.2 區段劃分方案 33
4.2.1 情境一之各方案 33
4.2.2 情境二之各方案 36
4.3 模擬模式建構 42
4.4 實驗設計與分析 47
4.4.1 選定績效衡量指標 47
4.4.2 實驗設計程序 48
4.4.3 模擬實驗結果 52
4.4.4 搬運距離加倍之實驗及分析 66
4.5 實驗分析總結 68
第五章 結論與建議 71
5.1 結論 71
5.2 未來研究建議 72
參考文獻 74
附 錄 78

楊芸惠，民94，結合模擬與模糊多屬性決策方法評估十二吋晶圓廠廠房佈置問題，成功大學製造工程研究所，碩士論文。
莊達人，民90，VLSI製造技術，高利圖書有限公司。
哈建宇，民88，半導體廠晶圓儲存轉存策略與模擬分析，台灣大學機械工程研究所，碩士論文。
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