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研究生:林永昇
研究生(外文):Yung-Sheng Lin
論文名稱:高效能透明有機薄膜電晶體
論文名稱(外文):High Efficiency Transparent Organic Thin Film Transistors
指導教授:陳方中陳方中引用關係
學位類別:碩士
校院名稱:國立交通大學
系所名稱:光電工程系所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2006
畢業學年度:94
語文別:中文
論文頁數:62
中文關鍵詞:有機薄膜電晶體透明修飾層氧化金屬接面電阻
外文關鍵詞:OTFTTransparentbuffer layerMetal oxidecontact resistance
相關次數:
  • 被引用被引用:1
  • 點閱點閱:259
  • 評分評分:
  • 下載下載:41
  • 收藏至我的研究室書目清單書目收藏:1
本論文是利用一種新穎的電極結構來製作透明有機薄膜電晶體,由於indium-tin-oxide(ITO)電極和pentacene的介面能位障較高,因而影響載子注入造成元件特性不佳。經由金屬氧化物(MoO2或V2O5)的修飾,可以使得元件特性大幅的提升。利用這種新穎的電極結構,我們製作出在可見光波段穿透率達60%以上的元件。
此外,實驗發現大部分的吸收來自於半導體層,因此可藉由降低半導體層的厚度來增加元件穿透度,當pentacene厚度降到200Å時,發現元件特性並無變化太多,而元件穿透度已成功達到70%以上。可以預期的是這種透明有機薄膜電晶體將會非常適於用來驅動液晶顯示器。
One novel electrode-architecture has been adapted to fabricate transparent organic thin-film transistors (OTFTs). Due to the high injection barrier of the indium-tin-oxide (ITO)/pentacene interface, the device exhibited a non-ideal behavior. After the modification of the contact by inserting a thin-layer of one metal oxide (MoO2 or V2O5), the device performance was improved dramatically. By using the novel electrode architecture, an OTFT with more than 60 % transmittance in the visible region has been demonstrated.
In addition, the transmittance was further improved by reducing the thickness of the semiconducting layer, which has been identified as the main component absorbing the visible light in the devices. Comparable device performance was still obtained, even though the thickness of pentacene was reduced to 200Å. As a result, one OTFT with over 70% transmittance has been demonstrated successfully. It is anticipated that the transparent OTFTs would be very suitable to be the driving circuits for liquid crystal displays (LCDs).
目 錄
中文提要 ……………………………………………………… i
英文提要 ……………………………………………………… ii
誌謝 ……………………………………………………… iii
目錄 ……………………………………………………… iv
表目錄 ……………………………………………………… v
圖目錄 ……………………………………………………… vii
第一章 序論 ……………………………………………………… 1
1.1、前言 ……………………………………………………… 1
1.2、OTFT半導體及相關元件特性………………………………… 1
1.2.1、有機薄膜電晶體之結構 ………………………………… 1
1.2.2、有機半導體材料簡介 …………………………………… 8
1.2.2.1、高分子(polymer) …………………………………… 8
1.2.2.2、小分子…………………………………………………… 9
1.2.2.3、Pentacene材料之簡介 ……………………………… 10
1.2.3、有機材料的導電機制 …………………………………… 11
1.2.3.1、Hopping ……………………………………………… 13
1.2.3.2、Multiple Trapping and Release…………………… 13
1.2.4、有機薄膜電晶體的載子移動率…………………………… 14
1.2.5、有機薄膜電晶體的操作模式 …………………………… 15
1.2.6、接面電阻 ………………………………………………… 16
1.2.7、元件透明度 ……………………………………………… 19
1.2.8、各項重要參數 …………………………………………… 20
1.2.8.1、載子遷移率(mobility) …………………………… 20
1.2.8.2、Threshold voltage(VT) …………………………… 21
1.2.8.3、Ion/ Ioff 比 ………………………………………… 22
1.2.8.4、次臨界擺幅(Subthreshold swing (s.s.)) ……… 22
1.2.8.5、接面電阻(contact resistance)…………………… 22
第二章 研究動機與目的 ………………………………………… 24
第三章 實驗架構 ………………………………………………… 25
3.1、實驗流程……………………………………………………… 25
3.1.1、ITO 玻璃pattern ……………………………………… 25
3.1.2、基板清洗………………………………………………… 25
3.1.3、PVP介電材料調配與塗佈製程參數 …………………… 25
3.1.4、蒸鍍pentacene 、修飾電極層和源極、汲極 ………… 26
3.2、實驗儀器 …………………………………………………… 27
第四章 實驗結果與討論 ………………………………………… 29
4、修飾電極 ……………………………………………………… 29
4.1、V2O5+Al ……………………………………………………… 30
4.2、MoO2+Al ……………………………………………… 34
4.3、V2O5+ITO …………………………………………… 38
4.4、MoO2+ITO …………………………………………… 42
4.5、元件穿透度 ………………………………………………… 49
4.6、不同pentacene厚度………………………………………… 53
第五章 結論 …………………………………………………… 58
參考文獻 ………………………………………………………… 59
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