跳到主要內容

臺灣博碩士論文加值系統

(44.200.27.215) 您好!臺灣時間:2024/04/13 18:03
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果 :::

詳目顯示

我願授權國圖
: 
twitterline
研究生:蘇俊碩
研究生(外文):Chun-shuo Su
論文名稱:矩形LCD製程中矩形基板上之熱傳實驗分析
論文名稱(外文):Experimental study for the local heat transfer on a rectangular substrate in TFT-LCD manufacturing process
指導教授:楊儒楊儒引用關係
指導教授(外文):Ru Yang
學位類別:碩士
校院名稱:國立中山大學
系所名稱:機械與機電工程學系研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2006
畢業學年度:94
語文別:中文
論文頁數:70
中文關鍵詞:化學氣相沈積液晶測溫技術暫態技術
外文關鍵詞:liquid crystals techniquetransient techniquechemical vapor deposition
相關次數:
  • 被引用被引用:1
  • 點閱點閱:132
  • 評分評分:
  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0
在薄膜電晶體液晶平面顯示器(TFT-LCD)製程中化學氣相沈積法是常用的薄膜製程之一,其基板上之熱傳係數為製程中的重要影響參數,所以本論文應用液晶量測技術,建立暫態液晶量測實驗系統並將其應用在模擬化學氣相沈積過程矩型腔體內低速空氣噴流衝擊至基板之熱傳實驗中。實驗結果經回歸分析,可推導出紐賽數與雷諾數(Re)、分離距(H/D)、腔體大小(B/D)之間的熱傳係數實驗公式。
Chemical vapor deposition is an important thin film process for the fabrication of TFT-LCD(Thin-Film-Transistor Liquid Crystal Display), the heat transfer coefficient on the substrate is the important influence parameter in the manufacturing process. For this reason, the main object of this thesis is to set up a temperature measurement system of transient thermochromatic liquid crystals. Furthermore, an experimental is carried out in the present study to investigate the characteristics of heat transfer resulting from a low speed air jet impinging onto a rectangular substrate confined in a vertical rectangular chamber. Finally, empirical equations are proposed to correlate the effect of Reynolds number、Separation distances and Ratio of outlet.
目錄 (I)

表目錄 (II)

圖目錄 (III)

學術用語 (V)

摘要 (VII)

第一章 前言 (1)

1-1 研究背景和動機 (1)

1-2 文獻回顧 (4)

1-3 研究重點 (8)

第二章 實驗相關理論和方法 (9)

2-1 液晶量測技術基本理論 (9)

2-2 實驗規劃 (13)

第三章 實驗裝置及實驗步驟 (14)

3-1 實驗設備 (14)

3-2 實驗前置作業準備 (18)

3-3 實驗步驟 (20)

第四章 結果與討論 (22)

4-1 雷諾數(Re)對熱傳的影響 (22)

4-2 分離距對熱傳的影響 (23)

4-3 腔體區域大小對熱傳的影響 (24)

4-4 熱傳實驗公式 (25)

第五章 結論 (26)

參考文獻 (57)

附錄A (59)
1.莊達人,VLSI製造技術,高立出版社,1999.
2.顧鴻壽,光電液晶平面顯示器-技術基礎及應用,新文京開發出版社,chapter7(1999).
3.Stringfellow G. B., Organometallic Vapor Phase Epitaxy: Theory and Practice, Academic Press, San Diego, chapter 5 (1989)
4.Morosanu, C. E., Thin Films by Chemical Vapor Deposition, Elsevier, USA,1990.
5.Smith, D.L.,Thin Film Deposition principle & practice, Mcgraw-Hill, USA,1995.
6.Huber, A. M. and Viskanta, R., “Effect of Jet-Jet Spacing on Convective Heat Transfer to Confined, Impinging Arrays of Axisymmetric Air Jets”, International Journal of Heat and Mass Transfer, Vol. 37, No. 18, pp. 2859-2869, 1994.
7.Arjocu, S. C. and Liburdy, J. A., “ Near Surface Characterization of an Impinging Elliptic Jet Array”, Journal of Fluids Engineering, Vol. 121, No. 3, pp. 384-390, 1999.
8.Goldstein, R. J. and Timmers, J. F., "Visualization of Heat Transfer from Arrays of Impinging Jets", Int. J. Heat and Mass Transfer, Vol. 25, No. 12, pp. 1857-1868, 1982.
9.Hollworth, B. R. and Durbin, M., "Impingement Cooling of Electronics", J. Heat Transfer, Vol. 114, pp. 607-613, Aug. 1992.
10.Ireland, P.T., and Jones, T.V., “The Response Time of a Surface Thermometer Employing Encapsulated Thermochromic Liquid Crystals”, J. Physics E, Vol.20, PP.1195-1199, 1987.
11.Camci, C., Kim, K. and Hippensteele, S.A.,“A new hue capturing technique for the quantitative interpretation of liquid crystal image used in convective heat transfer studies”, ASME, J. Turbomachinary, 1992, Vol.114, pp.765-775.
12.Von Wolfersdorf, J., Hoecker, R., and Sattelmayer, T., “A Hybrid Transient Step-Heating Transfer Measurement Technique Using Heater Foils and Liquid-Crystal Thermpgraphy”, Journal of Heat Transfer, 1993, Vol.115, pp.319-324.
13.Wang, Z., Ireland, P.T., Jones, T.V., and Davenport, R., “A Colour Image Processing System for Transient Liquid Crystal Heat Transfer Experiments”, Journal of Turbo machinery, 1996, Vol.118, pp.421-427.
14.Ekkad, S.V. and Han, J.C., “Heat Transfer Inside and Downstream of Cavities Using Transient Liquid Crystal Method”, J. Thermophysics and Heat Transfer, Vol.10, No.3, pp.511-516, 1996.
15.Chyu, M.K. , Ding, H. , Downs, J.P. and Soechting, F.O. ,”Determination of local heat transfer coefficient based on bulk mean temperature using a transient liquid crystals technique”. Experimental Thermal and Fluid Science, Volume 18, Issue 2, Pages 142-149, October 1998.
16.Moffat, R.J.1990, ”Experimetal heat transfer” Keynote Paper,Kn11,proc. 9th int. Heat transfer Conf.,Jerusalem, Vol.1,pp882-890.
17.Valencia, A., Fiebig, M., and Mitra, N. K. , “Influence of heat conduction on determination by liquid crystal thermography ” , 1995, Experimental Heat transfer,8:271-279.
18.Critoph, R.E., Holland, M.K. and Fisher,M., “Comparisons of Steady State and Transient Methods for Measurement of Local Heat Transfer in Plate Fin-Tube Heat Exchangers Using Liquid Crystal Thermography with Radiant Heating”, Int. J. Heat and Mass Transfer, Vol.42, PP.1-12,1999.
19.Carslaw, H.S. and Jaeger, J.C., “Conduction of Heat in Sol id”s, Oxford University Press, U. K., 1959.
20.Hocker, R., “Optimization Of Transient Heat Transfer Measurement Using Thermochromic Liquid Crystal Based On An Error Estimation”, Paper.
21.Yan, Y., Owen, J.M.,“Uncertainties in Transient Heat Transfer Measurements with Liquid Crystal ” Int. J. Heat and Fluid Flow,23, (2002)pp29-35
22.Moffat, R. J., “Described the uncertainties in experimental results”,Experimental Thermal and Fluid Science, 1988, Vol.1, pp.3-17
QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top