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研究生:房勵成
研究生(外文):Li-ChenFan
論文名稱:使用加入薄層之脊狀波導作為一分八分光器之設計
論文名稱(外文):Design of 1×8 ridge-waveguide beam splitter: Incorporating a thin layer in the ridge
指導教授:王立康
指導教授(外文):Li-Karn Wang
學位類別:碩士
校院名稱:國立清華大學
系所名稱:光電工程研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2006
畢業學年度:94
語文別:中文
論文頁數:59
中文關鍵詞:分光器薄層一分八多模干涉傾斜
外文關鍵詞:beam splitterthin layer1 to 8multi-mode interferencetilted
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由於目前網路附加應用的需求增加,使得光纖網路得以蓬勃發展,加上台灣在半導體工業上的卓越成就,因此利用矽(Si)基板並在其上沈積二氧化矽( )製作導光層與設計光學元件成為當今的主流研究,利用半導體的導光特性加上半導體製程的成熟技術與經驗,使得由半導體製作的光通訊元件能以較低的成本矽(Si)基板取得原料,且利用半導體製程的設備機台得以大量、精準的生產出高品質的產品,且設備機台都可以互相通用,不需額外負擔機台的成本。
本論文主要是在探討在矽晶圓上設計具有高折射率薄膜的MMI分光器(Multi-mode Interference beam splitter),而MMI分光器基本的架構為光波導,因此我們利用目前最具可信度的BPM(Beam Propagation Method)光學軟體來模擬出單模波導的尺寸規格,並以此單模波來設計1×8 MMI分光器,並利用光會向高折射率的區域集中的特性,探討在脊狀波導中加入高折射率薄膜的特性,並探討波導中加入或不加入薄膜所造成的分光損失(excess losss)、彎曲損失(bending loss),以及探討光纖更波導因為模態的不匹配所造成的耦合損失(coupling loss),並針對這些損失來著手改善,以期能夠設計出最低損失的1×8分光器。
接著想進一步減短1×8分光器的長度,以達到減少成本、微小化、簡化製程可量產的目標;我們利用3層1×2分光器堆疊擺放來完成1×8分光器,所以我們將MMI分光器以傾斜擺放的方式,這樣可以減少1×2分光器間連接的距離,使得整體1×8分光器尺吋大小得以減少。
Chapter 1 序論……………………………………………..………………………1
Chapter 2 理論與原理……………………………………………………………6
2-1 平板波導(Slab waveguide)理論………...…………………………………6
2-2 多模干涉(MMI)原理……………………………………….…………..10
2-2-1自成像原理(Self-imaging principle)…………………………….10
2-2-2傳播常數(Propagation constant)………………………………10
2-3-3 導播模態傳播分析(Guided-Mode Propagation Analysis)……..12
2-3-4一般干涉(General Interference)………………………………….14
2-3-5限制干涉(Restricted Interference)………………………………15
Chapter 3 模擬與分析……………………………………………………..……19
3-1 埋藏式通道波導結構分析……………………………….……….………...19
3-1-1 模態分析(Mode analysis)…………………………...………..……19
3-1-2脊狀波導之改良.…………..………………………………….…23
3-1-3 彎曲波導之損耗分析…………....…………………………….….26
3-2分析1×2 MMI分光器之模擬設計……………………………...………30
3-3分析1×8 MMI分光器之模擬設計…………….…….………………...37
3-4傾斜式1×8 MMI分光器之模擬設計…………………………………41
Chapter 4 結論………………………………..…………………………………51
4-1結論………………………………………………………………………..51
4-2未來展望…………………………………………………………………..52
Chapter 5 參考文獻……………………………….……………………………53
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