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研究生:邱清華
研究生(外文):Ching-Hua Chiu
論文名稱:<110>垂直致動微型光開關及可旋轉穿透式光柵之設計研發
論文名稱(外文):Optical Switch and Rotational Transmission GratingActuated by <110> Vertical Comb Actuators
指導教授:劉承賢劉承賢引用關係
指導教授(外文):Cheng-Hsien Liu
學位類別:碩士
校院名稱:國立清華大學
系所名稱:動力機械工程學系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2006
畢業學年度:94
語文別:英文
論文頁數:88
中文關鍵詞:(110) 晶片濕式蝕刻V 型彈簧直立式梳狀致動器
外文關鍵詞:(110) waferwet etchingV-shape springvertical comb drive
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本論文針對在光學微系統中相當重要的元件-微光學掃瞄鏡面做一完整的研究。利用微光學鏡面,可以應用在光通訊產業中,像是光開關(Optical Switch)、光遮斷器(Optical Chopper)或是在其他領域諸如光譜學(Optical Spectroscopy)、生醫影像(Biomedical Imaging)、掃描器(Scanner、Barcode Scanner)、雷射印表機(Laser Printers)等,應用範圍相當廣泛,是目前相當受到重視的一個研究方向。
近年來在世界各地有相當多的研究團對在進行相關的研究,但當微光學鏡面漸漸商品化的過程中,對於鏡面成本的控制與性能的要求越來越高,因此如何製作一個低成本、高轉角的鏡面成為本論文研究的主題。在本論文中,我們利用<110>的矽晶圓在非等向性蝕刻液中會出現垂直晶格面的特性,製作垂直梳狀製動器,利用濕蝕刻的方式可以有效降低製作的成本,在製程的重複性(Repeatability)上也會比較好的表現。另外我們使用硼擴散(Boron Diffuse)的製程方式,製作V型彈簧(V-Shape Spring)做為我們的致動彈簧,這樣可以有效的增加轉動角度,並同時防止側向吸附(Side Stiction)的現象,使可以在更高的驅動電壓下穩定轉動。同時,此碩士研究延伸研究主題,以類似相同的製程,在微鏡面上做出光柵(Grating)的結構進行分析及設計,進一步增加元件的應用範疇。
本論文已成功完成微鏡面的設計、製程、模擬以及性能測試,並驗證該低成本、高轉角鏡面的可行性,在光柵的部分,也已經完成光柵的設計及一部份的製程,本論文報告光柵的設計及微機電製程技術製作完成的成果。
Micro scanning mirrors developed by Microsystem technology have been widely developed because of the widespread applications in displays, optical switches, interferometric system, optical spectroscopy and biomedical imaging. There has been increasing interest recently in micro scanning mirrors actuated by the vertical comb-drive actuators due to the advantages of low power consumption, high speed actuation, compact size and low cost from the batch fabrication.
Quite a few groups have studied the micro scanning mirror actuated by vertical comb actuators. However, based on the marketing concern, the control of the fabrication cost and the requirement of the performance are getting more important. A low cost but still with high performance, a large scanning angle, microsystem mirror is essential. In this research, we used <110> wafer and fabricate the vertical comb actuators via wet etching process to approach the goal of cost down. A boron diffused process was utilized to fabricate the V-shape spring which can improves the scanning angle and prevent the side stiction phenomenon effectively. In addition, a grating on mirror structure was also studied in this thesis to broaden the applications.
We have done the design, fabrication process, theoretical analysis, numerical simulation, including the generated torque and the V-shape spring, and the experimental performance measurements for the microsystem mirror in this research. We also verified the feasibility of the low cost and high performance scanning mirror. The optimal design and some preliminary fabrication of the grating have been done and reported in this thesis.
Contents
Contents i
List of Fig.s iii
List of Tables viii

Chapter 1 Introduction
1-1 Background 1
1-2 Literature of Vertical Comb-drive Actuators 2
1-3 Motivation and Goal 7
Chapter 2 Design Concept
2-1 Characteristic of anisotropic wet etching. 14
2-1.1 Orientation of <110> wafer 14
2-1.2 Characteristic of silicon etchant 15
2-1.3 The Influence of Boron Diffusion in KOH Etching 18
2-1.4 Length etching rate of <110> beam 20
2-2 Fabrication Process 22
Chapter 3 Theoretical Analysis and Numerical Simulation
3-1 Theorem Analysis 33
3-1.1 Electrostatic Torque 33
3-1.2 The Design of V-shape Springs 41
3-1.3 The Design of the Rotational Transmission Gratings44
3-1.4 The Reflectance of the Scanning Mirror 46
3-2 Simulation Results 47
3-2.1 Simulation Results of <110> Si Wet Etching 47
3-2.2 Effect of Vertical Gap 47
3-2.3 Vibration Modes 48
Chapter 4 Experiment Results
4-1 Results of Wet Etching 67
4-2 Fabrication Tasks and Discussion 69
4-3 Fabrication result and device performance 71
Chapter 5 Conclusions & Future Work 84
Reference 86
[1] W. C. Tang, T.-C. H. Nguyen, and R. T. Howe, “Laterally Driven Polysilicon Resonant Microstructures”, Sensors and Actuators A 20, 1989, pp.25-32.

[2] R. A. Conant, J. T. Nee, K. Y. Lau, and R. S. Muller, “A flat high-frequency scanning micromirror”, in Tech. Dig. 2000 Solid-State Sensor and Actuator Workshop, pp. 6-9

[3] R. Conant, J. Nee, K. Lau, R. Muller, "Dynamic Deformation of Scanning Micromirrors," in Proc. IEEE/LEOS Int. Conf. on Optical MEMS, 2000, pp.49-50

[4] J. M. Kim, Y. C. Ko, D. H. Kong, K. B. Lee and D. Y. Jeon, “Fabrication of Silicon Optical Scanner for Laser Display” in Proc. IEEE/LEOS Int. Conf. on Optical MEMS, 2000, pp.13-14

[5] J. H. Lee, etc. “Design and fabrication of scanning mirror for laser display”, Sensors and Actuators A 96, 2002, pp. 223-230

[6] U. Krishnamoorthy, D. Lee and O. Solgaard, “Self-aligned vertical electrostatic combdrives for micromirror actuation”, J. Microelectomech. Syst. Vol.12, 2003, pp. 458-464.

[7] J.-L. A. Yeh, H. Jiang and N.C. Tien, “Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator”, J. Microelectromech. Syst. Vol.8, 1999, pp.459–465

[8] J.-L. A. Yeh, C.-Y. Hui and N. C. Tien, “Electrostatic model of an asymmetric combdrive”, J. Microelectromech. Syst. Vol.9, 2000, pp.126–135

[9] C.-Y. Hui, J.-L. Yeh and N. C. Tien, “Calculation of electrostatic forces and torques in MEMS using path-independent integrals”, J. Micromech. Microeng. 10, 2000, pp.477–482

[10] P. R. Patterson, D. Hah, H. Nguyen, H. Toshiyoshi, R. Chao, and M. C. Wu “A scanning micromirror with angular comb-drive actuation”, in Proc. IEEE Micro Electro Mechanical Systems (MEMS ’02), pp.544-547

[11] O. Tsuboi, I. Sawaki, F. Yamagishi, etc. “A rotational comb-driven micromirror with a large deflection angle and low drive voltage”, in Proc. IEEE Micro Electro Mechanical Systems (MEMS ’02), pp.532-535

[12] J. Kim, S. Park, D. Cho, “A Novel Electrostatic Vertical Actuator Fabrication in One Homogeneous Silicon Wafer Using Extend SBM Technology”, in Proc. Int. Conf. Solid State Sensors, Actuators and Microsystems (Transducers ’01), pp.756-759

[13] V. Milanovic, S. Kwon, and L. P. Lee, “High aspect ratio micromirrors with large static rotation and piston actuation”, Photonics Technology Letters, Vol.16, 8, 2004, pp. 1891 - 1893

[14] V. Milanovic, S. Kwon, and L. P. Lee, “Vertical Microlens scanner for 3D imaging”, in Tech. Dig. 2002 Solid-State Sensor and Actuator Workshop, pp. 207-231

[15] S. Kwon, V. Milanovic, and L. P. Lee, “A High Aspect Ratio 2D Gimbaled Microscanner with Large Static Rotation”, in Proc. IEEE/LEOS Int. Conf. on Optical MEMS, 2002, pp. 149-150

[16] J. Hsieh, C. C. Chu, J. M. L. Tsai, and W. Fang “Using extended BELST fabricating vertical comb actuator for optical application”, in Proc. IEEE/LEOS Int. Conf. on Optical MEMS, 2002, pp. 133-134

[17] A. Selvakumar and K. Najafi, “High density vertical comb array microactuators fabricated using a novel bulk/poly-silicon trench refill technology”, in Tech. Dig. 2002 Solid-State Sensor and Actuator Workshop, pp. 138–41

[18] Mitsuhiro Shikida, Kazuo Sato, Kenji Tokoro, Daisuke Uchikawa. “Differences in anisotropic etching properties of KOH and TMA”, Sensors and Actuators A, 80 2000, pp.179–188

[19] E. D. Palik, H. F. Gray, and P. B. Klein, “A Raman study of etching silicon in aqueous KOH”, J. Electrochem. Soc., Vol.130, 1983, pp.956-959

[20] E. D. Palik, V. M. Bermudez, and O. J. Glembocki, “Ellipsometric study of orientation-dependent etching of silicon in aqueous KOH”, J. Electrochem. Soc. Vol.132, 1985, pp. 871-883

[21] E. D. Palik, V. M. Bermudez, and O. J. Glembocki, “Ellipsometric study of the etch-stop mechanism in heavily doped silicon”, J. Electrochem. Soc., Vol.132, 1985, pp.135-141

[22] H. Seidel, L. Csepregi, A. Heuberger,“Anisotropic Etching of Crystalline Silicon in Alkaline Solutions I”, J. Electrochem. Soc., Vol.137, 11, 1990, pp.3612-3626.

[23] H. Seidel, L. Csepregi, A. Heuberger, “Anisotropic Etching of Crystalline Silicon in Alkaline Solutions II”, J. Electrochem. Soc., Vol.137, 11, 1990 p.3626-3632.

[24] E. Steinsland, M, Nese, G. Kittilsland, et al., “Boron Etch-stop in TMAH Solutions”, Sensors and Actuators A, 54 1996, pp.728-732

[25] S.-H. Kim, S.-H. Lee, H.-T. Lim, “(110) Silicon Etching for High Aspect ratio comb structures”, in Proc. IEEE Int. Conf. on ETFA, 1997, pp.248-252

[26] Huikai Xie, Gary K. Fedder, et al. “A CMOS Mirror with Curled-Hinge Comb Drive”, J. Microelectromech. Syst., Vol.12 2003, pp.450-457

[27] Dooyoung Hah, P. R. Patterson, H. D. Nguyen, Hiroshi Toshiyoshi and Ming C. Wu, “Theory and Experiments of Angular Vertical Comb-Drive Actuators for Scanning Micromirrors”, J. Microelectromech. Syst., Vol.10 2004, pp.505-513

[28] E. Bassous and A. C. Lamberti, “Highly selective KOH-Based Etchant for boron-doped silicon structures”, Microelectronic Engineering, Vol.9 1989, pp.167-170

[29] C. C. Lee, Y. C. Chang, C. M. Wang, J. Y. Chang and G. C. Chi, “Silicon-based transmissive diffractive optical element,”, Optical Letters, Vol.28, 2003, pp.1260-1262.
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