臺灣博碩士論文加值系統

本論文的研究目的在於利用我們實驗室自己濺鍍成長出來的金屬性超導體－二硼化鎂（MgB2）薄膜，配合微影蝕刻等黃光室製程，來設計及製作微小型的微波濾波器元件，並研究其濾波效果。在T 10K時，實驗量測出來平均插入損耗在0.5dB以下，接近由電腦軟體所模擬出來的結果。帶通濾波的中心頻率頻約在6GHz。此項成品體積（大小約5mm × 5mm × 0.5mm），將可以應用於無線網路、無線通訊系統上。

目錄
第一章 緒論
1-1 研究動機.......................................................................................1
1-2 超導體MgB2簡介........................................................................1
1-3 超導微波濾波器簡介...................................................................4
1-4 論文組織架構概要.......................................................................4
第二章 理論分析及元件設計
2-1 射頻（RF）& 微波（Microwave）簡介..................................5
2-2 共面波導（coplanar waveguide）..............................................7
2-3 散射參數（Scattering parameter）...........................................10
2-4 帶通濾波器原理及設計............................................................12
2-4-1 濾波器設計原理簡介......................................................12
2-4-2 濾波器設計原理..............................................................15
2-5 電腦軟體模擬（Agilent Advanced Design System）..............27
第三章 濾波器實作與量測
3-1 MgB2超導薄膜製備...................................................................30
3-1-1 RF磁控濺鍍設備介紹.....................................................32
3-1-2 MgB2超導薄膜製備流程................................................35
3-2光罩製作.....................................................................................39
3-2-1 光罩製作系統介紹..........................................................39
3-2-2 光罩製作流程..................................................................40
3-3 黃光室微影蝕刻........................................................................41
3-3-1 微影蝕刻機台系統介紹..................................................41
3-3-2 曝光顯影蝕刻流程..........................................................41
3-4 微波特性量測............................................................................45
3-4-1 量測系統介紹(向量網路分析儀N5230A)...................45
3-4-2 量測流程..........................................................................47
第四章 量測結果分析與討論
4-1 薄膜特性量測與分析................................................................51
4-2微波量測的結果.........................................................................57
4-3 影響濾波器響應的原因............................................................61
4-4 改善方法....................................................................................66
第五章 結論
5-1 總結............................................................................................67
5-2 未來展望....................................................................................67
參考文獻..................................................................................................70
附錄A.......................................................................................................75
附錄B.......................................................................................................76
圖表索引
表1-1 MgB2與YBCO比較表..................................................................3
表1-2 無線網路規格表............................................................................4
表2-1 等漣波低通濾波器原型的元件值（g0=1, , N=1~10）.......20
表2-2 各種濾波器所對應之低通濾波器原型的電感、電容轉換表....23
表2-3 濾波器圖形參數表......................................................................28
表2-4 模擬所使用之各項參數表..........................................................29
表3-1 濺鍍參數表..................................................................................37
表4-1 TF121與TF122製備條件與TC..................................................51
表4-2 TF121與TF122臨界溫度與平整度表........................................55
表4-3 模擬與量結果比較表..................................................................58
表4-4 元件TF121不同溫度各項特性表...............................................59
表4-5元件TF122不同溫度各項特性表...............................................58












圖2-1 微波通訊系統圖............................................................................6
圖2-2 單一平面結構(a)槽線 (b)共面帶線 (c)共面波導.......................9
圖2-3 共面波導結構(a)3D結構圖 (b)剖視圖........................................9
圖2-4 雙埠網路(a)電壓波電流波示意圖 (b)反射透射示意圖............12
圖2-5 CPW式髮夾梳形濾波器(a)平面電路圖 (b)等效電路圖............13
圖2-6 濾波器設計流程圖.......................................................................14
圖2-7各式濾波器頻率響應圖................................................................16
圖2-8 N=2的低通波器原型.................................................................19
圖2-9 低通波器原型之階梯電路及其元件定義..............................19
圖2-10 (a)低通濾波器原型的響應曲線 (b)帶通濾波器的頻率響應曲線..............................................................................................................23
圖2-11 改變兩共振器之間距離之頻率響應圖.....................................26
圖2-12 濾波器圖形及各項參數............................................................28
圖2-13 超導濾波器模擬之頻率響應圖................................................28
圖3-1 (a)不銹鋼容器（cell）設計圖 (b)實體圖...................................31
圖3-2 磁控濺鍍系統示意圖..................................................................34
圖3-3 高溫爐裝置示意圖......................................................................35
圖3-4 (a)光罩實體圖 (b)局部放大圖....................................................39
圖3-5 (a)等向性及 (b)非等向性蝕刻結構剖面圖................................41
圖3-6曝光顯影蝕刻流程圖...................................................................44
圖3-7 (a)元件TF121 (b)元件TF122.......................................................45
圖3-8 低溫量測系統剖面圖..................................................................46
圖3-9 整體量測系統示意圖..................................................................46
圖3-10 樣品座裝置圖............................................................................50
圖3-11 樣品座(a)俯視圖 (b)側視圖.....................................................50
圖4-1 (a)R-T溫度-電阻量測曲線 (b)TC附近的放大圖.......................52
圖4-2 (a)(b)TF121以AFM原子力顯微鏡作表面分析.........................53
圖4-3 (a)(b)TF122以AFM原子力顯微鏡作表面分析.........................53
圖4-4 (a)元件TF121 (b)元件TF122AFM測厚結果..............................55
圖4-5 (a)(b)TF121 (c)(d)元件TF122以光學顯微鏡觀察之影像..........56
圖4-6 元件TF121之散射頻率響應圖...................................................57
圖4-7 元件TF122之散射頻率響應圖...................................................57
圖4-8 元件TF121不同溫度之S21頻率響應圖.....................................58
圖4-9 元件TF122不同溫度之S21頻率響應圖.....................................59
圖4-10 元件TF121及元件TF122不同溫度之頻寬曲線圖.................60
圖4-11 元件TF121及元件TF122不同溫度之中心頻率曲線圖.........60
圖4-12 元件TF121及元件TF122不同溫度之插入損耗曲線圖.........60
圖4-13 硼的K-edge近緣X光吸收光譜................................................62
圖4-14 氧的K-edge近緣X光吸收光譜................................................62
圖4-15 鎂的K-edge近緣X光吸收光譜................................................62
圖4-16 六階髮夾梳型帶通濾波器圖形................................................64
圖4-17 元件YL1108之散射參數頻率響應圖......................................64
圖4-18 元件YL1108不同溫度之S21頻率響應圖.................................64
圖4-19 元件YL1108不同溫度之中心頻率曲線圖..............................65
圖4-20 元件YL1108損耗曲線圖..........................................................65
圖5-1 超高真蒸鍍系統圖(a)正視圖 (b)剖視圖...................................68

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