臺灣博碩士論文加值系統

本文提出以微聚焦線型雷射為主動光源結合三角量測原理發展的扇形雷射光束掃瞄量測系統，經過適當的校正後可用來量測工件的表面粗糙度與三維輪廓。量測系統主要包括微聚焦線型雷射、CCD攝影機與鏡頭、四軸移動機台、一部個人電腦及控制量測程式等。根據散射原理得知，可由影像上掃描線的平均寬度評估工件的粗糙度；利用不同高度塊規之校驗結果，可由計算工件與基準平面掃瞄線中心偏移量求出高度值。若工件表面為平整面，則可同時量測其表面粗糙度與平面度。
以本系統進行實例應用，在塑膠射出成型板材粗糙度與平面度檢測中，以表面粗度儀校驗粗糙度量測結果，誤差為0.033μm；以三次元量測儀校驗平面度量測結果，誤差為7μm。在BGA錫球的共面度檢測中，所量得的共面度為0.1274mm，也可經由量測結果得知BGA的缺銲情況。

A sectorial laser beam scanning measuring system based on the triangulation principle was developed in this study, to measure the surface roughness and the workpiece profile after a suitable calibration. The developed system mainly consists of a micro-focus sectorial line laser, an image processing system, a PC-based 3-axis machine, and a PC. According to the scattering theorem, a correlation was investigated between the surface roughness of the workpiece measured with a precision stylus instrument and the average fringe line width projected onto the workpiece surface. The height value of the object can be calculated, based on the offset between the position projected onto the object and the position projected onto platform after carrying out the calibration with gauge blocks. For a workpiece with flat surface, its surface roughness and flatness can be determined simultaneously.
The developed system was applied to measure the surface roughness and flatness of a plastic sheet. The surface roughness deviation between the measurement using the developed system and that of a stylus surface roughness measurement instrument was about 0.033 μm. The flatness error deviation between the measurement using the developed system and that of a coordinate measuring machine was about 7 μm. The co-planarity of a BGA socket can also be measured by the developed system, the measured result was about 0.1274 mm. In addition, the position related to the lack of the solder ball could also be detected by the developed system.

中文摘要…………………………………………………………………I
Abstract…………………………………………………………………II
致謝……………………………………………………………………IV
目錄………………………………………………………………………V
圖索引…………………………………………………………………IX
表索引…………………………………………………………………XIII
符號表…………………………………………………………………XIV
第一章 緒論……………………………………………………………1
1.1 研究動機與目的………………………………………………1
1.2 文獻回顧………………………………………………………2
1.3 研究方法與論文架構…………………………………………5
第二章 扇形雷射光束掃描系統之整合 ………………………………7
2.1 系統設定………………………………………………………7
2.2 光源系統………………………………………………………9
2.2.1 微聚焦雷射………………………………………………9
2.2.2 照明方式………………………………………………10
2.3 取像系統……………………………………………………12
2.3.1 CCD工作原理………………………………………12
2.3.2 鏡頭……………………………………………………14
2.3.3 影像擷取卡介紹………………………………………15
2.4 電控系統……………………………………………………16
2.4.1 四軸移動機台…………………………………………16
2.4.2 CCD攝影機與光源夾治具研製……………………18
2.5 資訊系統……………………………………………………19
2.6 量測系統之整合……………………………………………20
2.7 系統校正……………………………………………………23
2.7.1 三角量測法定位原理…………………………………23
2.7.2 參數估計法……………………………………………25
2.7.3 對映函數法……………………………………………26
2.7.4 經緯線格點校正法……………………………………28
2.7.5 量測系統校正方式……………………………………30
2.7.6 X方向之補正值………………………………………31
2.8 量測比對設備………………………………………………32
2.8.1 表面粗糙度量測儀……………………………………32
2.8.2 三次元座標量測儀……………………………………33
第三章 量測系統的相關原理與流程規劃……………………………36
3.1 數位影像處理………………………………………………36
3.1.1 空間迴旋運算…………………………………………38
3.1.2 影像平滑濾波…………………………………………39
3.1.2 二值化處理……………………………………………42
3.1.3 掃瞄線線寬與中心之判定……………………………43
3.2 表面粗糙度量測原理………………………………………44
3.2.1 表面組織的定義與粗糙度表示法……………………45
3.2.2 反射光與粗糙度關係…………………………………49
3.2.3 量測方法………………………………………………53
3.3 高度校驗……………………………………………………54
3.3.1 雷射掃瞄線與影像之關係……………………………54
3.3.2 量測方法………………………………………………55
3.4 平面度量測…………………………………………………56
3.4.1 量測方法………………………………………………56
3.4.2 平面度的計算方法－最小平方法……………………57
3.5 三維輪廓量測………………………………………………59
3.5.1 量測方法………………………………………………59
3.5.2 真球度的計算方法……………………………………60
3.5.3 曲面表示法－Ferguson surface……………………62
第四章 實驗結果與數據分析………………………………………66
4.1 粗糙度校驗結果……………………………………………66
4.2 高度校驗結果………………………………………………69
4.3 平面度校驗結果……………………………………………73
4.4 三維輪廓量測校驗結果……………………………………75
4.5 量測系統之應用……………………………………………79
4.5.1 應用實例一：塑膠射出成型板材的粗糙度與平面度量測 ……………………………………………………… 79
4.5.2 應用實例二：BGA之共面度檢測……………………82
第五章 結論與討論……………………………………………………88
5.1 結論…………………………………………………………88
5.2 討論…………………………………………………………89
參考文獻 ………………………………………………………………91
作者簡介 ………………………………………………………………97

1. Tang, C. W., Liang, X. C., Zou, C. P., “Analysis on Modern Measuring Methods of Curved Surfaces”, SPIE, Vol. 2101, pp. 122-124, 1993.
2. Tai, W. C., Chang Ming, “Noncontact Profilometric Measurement of Large-Form Parts”, Optical Engineering, Vol. 35, No. 9, pp. 2730-2735, 1996.
3. Zhou, H., Chen, J., Yang, D., Buckley, S., “Efficient Image-Processing Method in 3D Vision Inspection”, SPIE, Vol. 3029, 1997.
4. Qifeng, Y., Dongsheng, Z., Zhihui, L., Tiehan, Q., “Accurate Measurement of 3D Coordinate of an Object with Subpixel Technique”, IEEE International Conference on Systems, Man and Cybernetics, Vol. 1, pp. 484-486, 1996.
5. Suenaga, Y., “3D Measurement Technologies for Computer Animation”, Proceeding Computer Animation ´96, pp. 167-174, 1996.
6. Petr Beckmann, Andre Spizzichino,”The scattering of electromagnetic waves from rough surfaces”, Chap.1-5, Pergamon Press Ltd, 1987.
7. Whitehouse, D. J., “Comparison Between Stylus and Optical Methods for Measuring Surfaces”, Annals of the C.I.R.P., Vol. 37, pp. 649-653, 1988.
8. Oh, K. J., Lim, C. S., Kim Daiwoo, “Development of On-line Measurement System of Surface Roughness for Cold-Rolled Steel Sheet”, Instrumentation and Measurement Technology Conference, 1996.
9. 修芳仲，”SMC試片表面特性量測法研究”，國立台灣大學機械工程研究所碩士論文，1990.
10. 楊景焜，”鋼材精製面之非接觸式表面粗糙度量測系統研究”， 國立台灣科技大學機械工程所碩士論文，2001.
11. Zhou, Z. F., Zhang, T., “An Integrated Opto-electric for Multi- parameter Measurement”, Proceedings of the International Instrumentation Symposium, Vol. 47, pp. 397-404, 2001.
12. Shlychkov, V. I., “Study of the precision characteristics of algorithms for measuring the coordinates in triangulation devices”, Journal of Optical Technology, Vol. 72, No. 6, pp.482-485, 2005.
13. Bickel, Y., Hausler, G., Maul, M., “Triangulation with Expended Range of Depth”, Opt. Eng., Vol. 24, pp. 975-977,1985.
14. Huynh, D. Q., Owens, R. A., “Line Labelling and Region Segmentation in Stereo Image Pairs”, Image and Vision Computing, Vol. 12, No. 4, pp. 213-225, 1994.
15. Luo, P. F., Chao, Y. J., Sutton, M. A., “Application of Stereo Vision to Three-Dimensional Deformation Analysis in Fracture Experiments”, Opt. Eng., Vol. 33, No. 3, pp. 981-990, 1994.
16. Blostein, S. D., Huang, T. S., “Error Analysis in Stereo Determination of 3-D Point Positions”, IEEE, Vol. 9, No. 6, pp. 752-765, 1987.
17. Manthey, D. W., KnappⅡ, K. N., Lee, D., “Calibration of a Laser Range-Finding Coordinate-Measuring Machine”, Opt. Eng., Vol. 33, No. 10, pp. 3372-3380, 1994.
18. Bradley, C., Vickers, G. W., “Free-Form Surface Reconstrustion for Machine Vision Rapid Prototyping”, Opt. Eng., Vol. 32, No. 9, pp. 2191-2200, 1993.
19. Wang, Guoyu, Zheng, Bing, Li, Xin, Houkes, Zweitze, Regtien, Paul P. L., “Modelling and calibration of the laser beam- scanning triangulation measurement system”, Robotics and Autonomous Systems, Vol. 40, No. 4, pp. 267-277, 2002.
20. Zhang, G. Y., Xu, X. P., Song, J. W., Yang, L., Li, C. Z., An, Z. Y., “3-D curved surface profile measuring system using laser scanning optical triangulation”, Zhongguo Jiguang/Chinese Journal of Lasers, Vol. 30, No. SUPPL., pp. 140-142, 2003.
21. Isgro, Francesco, Odone, Francesca, Verri, Alessandro, “An open system for 3D data acquisition from multiple sensor”, 7th International Workshop on Computer Architecture for Machine Perception, CAMP 2005, pp. 52-57, 2005.
22. Yee, S. R., Griffin, P.M., “Three-Dimensional Imaging System”, Opt. Eng., Vol. 33, No. 6, pp. 2070-2075,1994.
23. Godhwani, A., Bhatia, G., Vannier, M. W., “Calibration of a Multisensor Structured Light Range Scanner”, Opt. Eng., Vol. 33, No. 4, pp. 1359-1367, 1994.
24. 張維哲，”以雷射二極體陣列作高速三維輪廓量測”，中原大學機械工程學系博士論文，2004.
25. Xu, Li, Huang, Sujuan, Han, Jingjing, Yu, Yingjie, Zhang, Zhijiang, “A three dimensional shape measurement method: Structured light space-time stereo”, The International Society for Optical Engineering, Vol. 6066, Vision Geometry XIV - Proceedings of SPIE-IS and T Electronic Imaging, 2006.
26. 林高輝，”映射函數三維空間影像量測技術研究”， 中原大學機械工程學系博士論文，2002.
27. 林俊育，”機器視覺系統簡介與應用”，量測資訊第86期，pp. 9-11，2002.
28. N.N., “LasirisTM Laser Diode Product Instruction Manual”, StockerYale Company, Canada, 2003.
29. 梁俊傑，”DVD與VCD光碟表面瑕疵檢測系統之開發”，國立屏東科技大學機械工程系碩士論文，2002.
30. Rafael C. Gonzalez ＆ Richard E. Wood原著/吳成柯等譯，”數位影像處理”，儒林出版，台北，1993.
31. 衛祖賞，”數位影像處理”，全華出版，台北，1988.
32. N.N., “CV-M9CL Operation Manual”, JAI Company, USA, 2003.
33. N.N., “C-Mount Objektive / Lenses”, Schneider Company, Germany, 2005.
34. N. N., “HIWIN PCI-4P Hardware Manual”, HIWIN Microsystem Corp., 2004.
35. N. N., “HIWIN PCI-4P Motion Library Reference Manual”, HIWIN Microsystem Corp., 2004.
36. N. N., “SaperaTM Processing Programmer´s Manual”, Edition 5.2, Coreco Inc., 2003.
37. 范光照、章明、姚宏宗、許智欽，”逆向工程技術及應用”，高立圖書有限公司，1999.
38. 鄭銘翔，”海床小尺度粗糙度之量測”，國立中山大學海下技術研究所碩士論文，2004.
39. 繆紹剛，”數位影像處理 活用Matlab”，全華出版，台北，1999.
40. 梁為翔，”以微鑚頭鑚削PCB板之最佳鑚削參數及其磨耗檢測之研究”，國立台灣科技大學機械工程所碩士論文，2004.
41. Russ, John C., The Image Processing Handbook, 2nd Edition, CRC Press, Boca Raton, 1995.
42. Demant Christian, Streicher-Abel Bernd, Waszkewitz Peter, Industrielle Bildverarbeitung, Springer, 1998.
43. ”以三次元量測及逆向工程重建CAD模型之技術”，模具技術資訊第63期，臺灣區模具工業同業公會，台北，2000.
44. 范光照、張郭益，”精密量具及機件檢驗”，高立圖書有限公司，1998.
45. Fan, K. C., “Computer-Aided Calibration of the Accuracy Performance of NC Machine Tools”, Ph.D Thesis, UMIST, 1984.
46. 陳信宏，”雷射探頭整合於電腦控制四軸機台作小型元件之逆向工程量測”，國立台灣科技大學機械工程所碩士論文，2003.
47. 林家興、戴競志，”應用類神經網路於電腦影像為基礎的BGA封裝的量測與檢驗”，中國機械工程學會第二十一屆全國學術研討會論文集，pp.4685-4690，2004.