臺灣博碩士論文加值系統

本論文提出一個高解析度彈性光學感測器，此感測器可量測出剪應力與壓力的大小。此系統獨特的地方為批次製成處理，利用微製程翻模技術實現PDMS作為光傳導的介面。此壓力感測器主要的概念是利用相互交錯的光波導陣列去完成一個可接觸的彈性光學力量感測器。當我們施加壓力時，藉由觀察兩個相鄰並且互相垂直之間的波導物理型變而建構出壓力的分佈圖，接者利用複雜的三維力量圖像演算法去表示壓力與剪應力，透過類神經網路(Neural Network)的架構依照實驗的結果，進行類神經網路的訓練，訓練完成後，可以輕易的辨識出所施加力量的不同形狀。特過類神經網路訓練與比對，微製程彎曲損失(Bend loss)力量光學感測器能夠建構出三維(3-D)力量圖形。

The dissertation describes the development of a mesh waveguide sensor capable of measuring both shear and pressure force at the plantar interface. The uniqueness of the system is in its batch fabrication process, which involves a microfabrication molding technique with poly(dimethylsiloxane)(PDMS) as the optical medium. The pressure sensor consists of an array of optical waveguides lying in perpendicular rows and columns separated by elastomeric pads. A map of normal stress was constructed based on observed macro bending which causes intensity attenuation from the physical deformation of two adjacent perpendicular waveguides. A force image algorithm includes a two-layer neural network system was developed to handle the complexity of construction of three-dimensional planar pressure images.

Chapter 1 Introduction
Chapter 2 Methodology and Material
2.1 Soft lithograph
2.1.1 Rapid pototyping
2.1.2 Replica molding
2.2 photoresister-SU8
2.2.1 Composition and Property
2.3 PDMS
2.3.1 Chemistry
2.3.2 Mechanical properties
Chapter 3 Device Fabrication
3.1 SU-8 Waveguide Mode
3.2 Fabrication of PDMS layers
3.3 PDMS Sensor Device
Chapter 4 Pressure test
4.1 Single Point pressure test
4.2 Different shapes pressure test
Chapter 5 Neural network
5.1 Introduction
5.2 Various shape result analyze in neural network
Chapter 6 Conclusion
Reference
Appendix 1 Neural network program for 4 shapes in MATLAB
Appendix 2 Neural network program for 14 shapes in MATLAB

[1]George M. Whitesides, ”Unconventional Methods and Unconventional Materials for Microfabrication”,1997 International Conference on Solid-State Sensors and Actuators IEEE pp.23-24,1997
[2]Deng, Tao (Dept. of Chem. and Chemical Biology, Harvard University); Wu, Hongkai; Brittain, Scott T.; Whitesides, George M.” Fabrication of topologically complex three-dimensional microfluidic systems in PDMS by rapid prototyping” Analytical Chemistry, Vol 72,pp 3158-3164,Jul 15, 2000,
[3]J. C. McDonald, D. C. Duffy, J. R. Anderson, D. T. Chiu, H. Wu, O.J. A. Schueller, G. M. Whitesides,“Fabrication of Microfluidic Systems in Poly（dimethylsiloxane）”, Electrophoresis, Vol. 21, pp. 27-40, 2000.
[4]Jessamine M. K. Ng Irina Gitlin Abraham D. Stroock George M. Whitesides “Components for integrated poly(dimethylsiloxane) microfluidic systems” Electrophoresis pp. 3461-3473 2002.
[5]Kumar, G. M. Whitesides, “Feature of Gold Having Micrometer to Centimeter Dimensions”, Appl. Phys. Lett. , Vol. 63, pp. 2002-2004, 1993.
[6]Y. Xia, E. Kim, X. M. Zhao, J. A. Rogers, M. Prentiss, G. M. Whitesides, “Complex Optical Surface Formed by Replica Molding Against Elastomeric Masters ”, SCIENCE, Vol. 273, pp. 347-349, 1996.
[7]E. Kim, Y. Xia, G. M. Whitesides, “Polymer Microstructures Formed by Molding in Capillaries ”, Nature, Vol. 376, pp. 581-584, 1995.
[8]J. A. Rogers, K. E. Paul, R. J. Jackman, M. Prentiss, G. M. Whitesides,“Using An Elastomeric Phase Mask for Sub-100nm Photolithography in The Optical Near Field”, Appl. Phys. Lett. , Vol. 70, pp. 2658-2660, 1997
[9]B. D. Terris, H. J. Mamin, M. E. Best, J. A. Logan, D. Rugar,“Nanoscale Replication for Scanning Probe Data Storage ” ,Appl. Phys. Lett. , Vol. 69, pp. 4262-4264, 1996.
[10]T. E. Huber, L. Luo,“Far-infrared Propagation in Metal-wire Micorstructures” Appl. Phys. Lett. , Vol. 70, pp. 2502-2504, 1997.
[11]Daniel B. Wolfef, Richard S. ConroyJ, J. Christopher Love|, Byron Gatesf, Mara Prentiss,George M. Whitesidest “Fabrication of Planar Optical Waveguides by Electrical Microcontact Printing”,2000.
[12]Rebecca J. Jackman, David C. Duffy, Oksana Cherniavskaya,,George M. Whitesides “Using Elastomeric Membranes as Dry Resists and for Dry Lift-Off” Langmuir pp.2973-2984, 1999.
[13]Byung-Ho Jo, Linda M. Van Lerberghe, Kathleen M. Motsegood, and David J.Beebe “Three-Dimensional Micro-Channel Fabrication in Polydimethylsiloxane (PDMS) Elastomer” IEEE JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 9, NO. 1, MARCH 2000.
[14]Paul Miller, Matthias Schueneman, Igor Sbarskia, Thomas Gengenbach, Tom Spurling “A Novel Strategy for the Integration of PDMS Membranes into Thermoplastic Microfluidic Package” 2000.
[15]David A. Chang-Yen and Bruce K,Department of Mechanical Engineering, University of Utah, Salt Lake City, “An Integrated Optical Glucose Sensor Fabricated Using PDMS Waveguides on a PDMS Substrate” 2001.
[16]Chu-Yu Huang, Chao-Shih Liu, Reynold Panergo Cheng-Sheng Huang, Wei-Chih Wang, University of Washington, Department of Mechanical Engineering ” Developments of a Force Image Algorithm for Micromachined Optical Bend Loss Sensor” 2002.
[17]Reynold Panergo, Chao-Shih Liu, Benjamin Estroff, Wei-Chih Wang University of Washington, Department of Mechanical Engineering “Polymeric Waveguide Design of a 2D Scanner” 2002.
[18]Wei-Chih Wang, Reynold Panergo, Christopher M. Galvanin, William Ledoux “A Flexible Micromachined Optical Sensor for Simultaneous Measurement of Pressure and Shear Force Distribution on Foot” department of Mechanical Engineering, Department of Orthopaedics and Sports Medicine, 2000.
[19]PDMS http://web.mit.edu/6.777/www/matprops/pdms.htm
[20]http://en.wikipedia.org/wiki/Polydimethylsiloxane
[21]Yamakawa, Masashi, Noyori, Ryoji “Ab initio molecular orbital study on rhodium(I)-catalyzed isomerization of allylic amines to enamines“ Vol.11, n 10, Oct, , p 3167,1992.
[22]Hopfield, J. J. “COLLECTIVE PROPERTIES OF NEURAL NETWORKS” Proceedings of the Annual Conference on Engineering in Medicine and Biology, , p. 189,1982.
[23]Tank, D. W. (AT&T, Murray Hill, NJ, USA), Hopfield, J. J. “CONCENTRATION INFORMATION IN TIME: ANALOG NEURAL NETWORKS WITH APPLICATIONS TO SPEECH RECOGNITION PROBLEMS” SOS Printing, pp.455-468,1987.