本研究係依據一矩形矽質隔膜於不同受壓下所產生第一共振頻的改變為設計原理，並透過矩形矽質隔膜於受壓下所產生之基頻(fundamental mode)變化即可得知通入氣體壓力之大小。於本研究所設計之微型氣壓感測器除了基於一公式理論解外，並以一套裝數值模擬軟體FEMLAB進行設計與原件效能評估；本研究之壓力感測器其製作為使用微機電製程之濕式蝕刻進行矽質隔膜製作，並以溶交凝膠法備製一層厚度約為0.6μm之壓電薄膜為驅動。
於本研究中使用頻譜分析儀與光纖位移器於壓電薄膜通入40伏特電壓進行掃頻，量測實驗結果本壓力感測器之第一共振頻為33.3KHz，與數值模擬結果35.94KHz之誤差值為9.2%，其後並以一U形管壓力計為氣壓增益，並量測在不同壓力下本壓力感測器所產生共振頻的改變，最後得到本研究設計之壓力感測器解析度為19 Hz/mbar。

This research consists of design, simulation and fabrication of a gas flow sensing micro pressure sensor. Two kinds of piezoelectric PZT were used to excite the micro–pressure sensor. One is commercially available bulk PZT The pressure sensor is made of silicon and Pyrex glass, and is actuated by a piece of bulk PZT. The other one was PZT thin films developed by our laboratory. The actuation element for silicon thin film and gas flow pressure change the frequency of the fundamental mode was demonstrated. Performance tests of the pressure sensor include frequency response and resonance shift of the gas flow pressure.
Finally the FEMLAB simulation result of this pressure sensor was 35.94 KHz，and the experimental result is 33.3 KHz. In this pressure sensor sensitivity 19 Hz/psi was also obtained. In this study, the objective is to develop a feed–back system for sensing air pressure variation. In the future, this pressure sensor can be used for factory safety system and to detect any pernicious gases leak.

中文摘要 i
英文摘要 ii
致謝 iii
目次 iv
表目錄 vi
圖目錄 vii
第一章 序論 1
1-1 前言 1
1-2 研究動機 2

第二章 文獻回顧 6

第三章 理論與模擬 13
3-1四邊固定之平板共振頻率計算 13
3-2 FEMLAB模擬 15

第四章 微機電製程 23
4-1 微機電前段矽基材製程 23
4-2 腔體與矽質隔膜濕式蝕刻製程 32

第五章 壓電膜製程 51
5-1 壓電材料發展史 51
5-2 鐵電性與壓電性 51
5-2-1 鐵電性 52
5-2-2 壓電性 54
5-3 溶膠-凝膠法 55
5-4 PZT sol之調配 57
5-5 溶液檢測 58
5-6 壓電膜製程概述 59
5-7 壓電膜製程探討 60
5-7-1 白金厚度對於製程影響 61
5-7-2 白金退火對於製程影響 64
5-7-3 白金退火隔離改良 76
5-7-4 基材表面研磨 83
5-7-5 每層不同厚度改良壓電膜附著不良之情形 89

第六章 量測 99
6-1 實驗架構概述 99
6-2 共振頻量測 100
6-3 壓電膜振動與感測器量測 116
6-4 單次通入小壓差量測 120
6-5 壓力感測器標準化靈敏度(normalized sensitivity)計算 122
6-6 重現性、迴圈與大範圍氣壓量測 122
6-7 流量量測 128

第七章 結果與討論 132
參考文獻 134

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