臺灣博碩士論文加值系統

本文之目的係以電子迴旋共振化學氣相沉積法來成長奈米碳管與奈米碳團簇，並針對其特性作分析。在成長奈米碳管膜的研究中，本實驗是採用低溫電漿的製程，藉由觸媒膜厚度、微波功率及通入氣體混合比例的改變，利用掃描式電子顯微鏡與穿透式電子顯微鏡來觀察奈米碳管與奈米碳團簇的表面形態與結構，並利用微拉曼光譜儀來分析其石墨結晶化的程度。在研究中發現，觸媒膜厚度的改變對奈米碳管的管長與管徑都會造成影響。當微波功率增加時，奈米碳管的管長也會隨之增加，但是會造成過多的碳雜質堆積。當混合氣體中攜帶氣體的流量增加時，會使奈米碳管中含有較多無序結構的碳。在微拉曼光譜分析中，得知本實驗所合成出的奈米碳管之最佳ID/IG積分比值為1.09。最後，對本文的成果，提出合成奈米碳管的製程改善方法與建議。

In this study, the carbon nanotube (CNT) and carbon nanoclusters will be grown by electron cyclotron resonance chemical vapor deposition (ECR-CVD) method and its’ characteristic will be analyzed. In growing the CNT film study, the experimental parameter that include the thickness of catalyst films, microwave power, and the mixed gas ratio have been grown at low temperature plasma. The surface morphology and structure of CNT and carbon nanoclusters will be examined by scanning electron microscope (SEM) and transmission electron microscope (TEM). The degree of graphitized will be examined by Raman spectrometer. In this study, the thickness of catalyst films will affect the length and diameter of CNT. As the microwave power increasing, the length of CNT will increase, but it will deposit more amorphous carbon. As the carry gas of the mixed gas increasing, the structure of CNT will have more amorphous carbon. The experimental results show that the CNT have best ratio of ID/IG is 1.09. Finally, the study will provide the synthetic method and proposal of CNT.

中文摘要 I
英文摘要 II
致謝 III
目錄 IV
圖目錄 VIII
表目錄 XII
符號表 XIII
第一章 緒論 1
1.1 前言 1
1.2 研究動機 3
1.3 本文架構 4
第二章 理論基礎與文獻回顧 5
2.1 奈米碳管的結構 5
2.2 奈米碳管的機械性質 8
2.2.1 奈米碳管的力學性質 8
2.2.2 奈米碳管的熱傳導性質 9
2.3 奈米碳管之合成方法 10
2.3.1 電弧放電法（Arc-discharge method） 10
2.3.2 雷射蒸發法（Laser vaporization method） 11
2.3.3 太陽能法（Solar energy method） 12
2.3.4 化學氣相沉積法（Chemical vapor deposition method） 12
2.4 奈米碳管之合成機制 18
2.5 奈米碳管之應用 24
第三章 實驗方法 27
3.1 實驗流程 27
3.2 實驗設備 29
3.2.1 電子槍蒸鍍機 29
3.2.2 ECR-CVD系統設備 29
3.3 實驗材料 32
3.4 實驗步驟 33
3.5 表面形態與微結構分析設備 34
3.5.1 高解析掃描電子顯微鏡（Ultrahigh Resolution Scanning Electron Microscope, HR-SEM） 35
3.5.2 場發射穿透式電子顯微鏡（Field Emission Gun Transmission Electron Microscope, FEG-TEM） 36
3.5.3 微拉曼光譜儀（Micro-Raman Spectrometer） 37
第四章 奈米碳管與碳團簇之實驗結果與討論 38
4.1 前處理對觸媒粒子的影響 38
4.2 前處理對合成奈米碳管的影響 40
4.3 觸媒厚度對合成奈米碳管的影響 43
4.4 混合氣體比例對合成奈米碳管的影響 47
4.5 微波功率對合成奈米碳管的影響 53
4.6 奈米碳管結構探討 59
4.6.1 多壁奈米碳管之石墨層 59
4.6.2 奈米碳管之竹節狀結構與異質接面 59
第五章 結論與建議 65
5.1 結論 65
5.2 建議 67
參考文獻 68

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