臺灣博碩士論文加值系統

非晶質碳膜是一種用途極廣的材料具有許多的優異性質，如：高化學抵抗性、高硬度、高絕緣性、良好的熱傳導、高紅外光波段的穿透性、高生物相容性，以及耐磨耗性。由於製程上的差異，導致鍍膜擁有很高的壓縮應力，而產生附著力不佳的情況產生，造成薄膜容易與基板剝離。本研究採用微波輔助電子迴旋共振化學氣相沉積法(ECR-CVD)成長非晶質碳膜，以丙烷及氮氣為反應氣體，沉積在矽晶圓上，並改變氣體的混合比例、微波功率、氣體流量探討製程參數對薄膜性質的差異。並以拉曼光譜、傅立葉轉換紅外線光譜、掃瞄式電子顯微鏡、原子力顯微鏡、奈米壓痕量測儀、側向力顯微鏡、紫外光/可見光光譜儀做檢測。研究結果顯示當增加氮氣比例、提高微波功率、增加氣體流量時薄膜性質有明顯的非晶質雜化產生，使得硬度、摩擦特性、光學性質皆有些許的不同。

Amorphous carbon films (a-C) is the material which use commonly has much excellent property, such as high chemistry resistance, high hardness, isolation, fine heat conduction, high infrared wave transparency, high biological compatibility and wear resistance. Due to process difference, the carbon thin films have high compressive stress, to cause not good adhesive force and make the films stripped off the substrate. The microwave electron cyclotron resonance chemical vapor deposition(ECR-CVD) to grow amorphous hydrogenated carbon films. The reaction gases propane and nitrogen as gas source, which deposite on silicon wafer, and discuss films property from change gas proportion, microwave power, gas flow rate. Use raman spectrometer, fourier transform infrared spectrometer, scanning electron microscopy, atomic force microscope, nanoindentation test instrument, lateral force microscopy, ultraviolet/visible spectrophotometer examination. The result revealed that the films character obvious amorphous mix phase produced when nitrogen proportion, microwave power, gas flow rate was both increased, to make the hardness, friction and optical character difference.

目錄
摘要 I
英文摘要 II
誌謝 III
目錄 IV
圖目錄 VII
表目錄 X
符號說明 XI
第一章 緒論 1
1-1 前言 1
1-2 文獻回顧 2
1-3 研究目的 5
1-4 本文架構 5
第二章 理論基礎 6
2-1 非晶質碳膜之成長機制 6
2-1-1 含氫非晶質碳膜 9
2-2 非晶質碳膜結構 12
2-2-1 非晶質碳膜種類 15
2-3 電子迴旋共振化學氣相沉積 17
2-3-1 電漿理論 17
2-3-2 微波電子迴旋共振原理 18
第三章 實驗方法 22
3-1 實驗流程 22
3-2 實驗設備 23
3-2-1 電子迴旋共振系統 23
3-3 實驗步驟 26
3-3-1 實驗材料 26
3-3-2 實驗參數 26
3-3-3 製程步驟 28
3-4 量測與分析 29
3-4-1 結構分析 29
3-4-2 表面分析 33
3-4-3 機械性質分析 37
3-4-4 光學性質分析 42
第四章 結果與討論 43
4-1結構分析 43
4-1-1鍵結型態 43
4-1-2鍵結型態種類 49
4-2表面分析 53
4-3機械性質分析 66
4-3-1 硬度檢測 66
4-3-2 摩擦力檢測 69
4-4光學性質分析 72
第五章 結論與建議 75
5-1 結論 75
5-2 建議 76
參考文獻 77
自述 80

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