臺灣博碩士論文加值系統

在本論文中，我們是以超音波霧化輔助的方式，透過vapor-liquid-solid(VLS)機制在1000°C左右成長氧化鋅的奈米線。首先以超音波噴霧的方式將金粒子沉積於矽基板上，而以此金粒子當作成長氧化鋅奈米線的催化劑。之後，再將基板與氧化鋅粉末置於石英管中，通入氬氣，以高溫爐加熱，並適當的控制基板溫度、成長時間和成長壓力，來產生氧化鋅奈米線。
我們用原子力顯微鏡(Atomic Force Microscope)觀察金粒子之粒徑，再將所成長的氧化鋅奈米結構用掃描式電子顯微鏡(Scanning Electron Microscope)看其表面的型態，最後以PL(photoluminescence)光譜分析其光學特性。

In this thesis, a novel ultrasonic spray assisted method with vapor-liquid-solid (VLS) mechanism was utilized to grow ZnO nanowires at 1000°C. First, the gold nanoparticles deposited on Si substrates by the method of ultrasonic spray were used as catalyst for nanowire growth. Secondly, the substrate and ZnO powder were put into the quartz tube and then heated by a furnace. During the process, the Ar was flowed continuously into the growth system. The substrate temperature, the growth time, and the O2 pressure were adjusted properly to optimize the growing condition of ZnO nanowires.
The diameters of gold nanoparticles were obtained by AFM (Atomic Force Microscope). The SEM (Scanning Electron Microscope) was used to observe the ZnO morphology. The optoelectronical characteristic of the structures was analyzed by PL(photoluminescence).

中文摘要 i
英文摘要 ii
誌謝 iii
目錄 iv
表目錄 v
圖目錄 vi
第一章 緒論 1
1.1 前言 1
1.2 研究目的 2
第二章 理論基礎與文獻回顧 4
2.1 氧化鋅的特性 4
2.2 奈米線之成長方法 6
2.2.1 VLS 成長方法 6
2.2.2 VS成長方法 9
2.2.3 SLS成長方法 9
第三章 實驗 11
3.1 氧化鋅奈米結構成長 11
3.1.1 實驗裝置 11
3.1.1.1 超音波噴霧 11
3.1.1.2 高溫爐系統 13
3.1.2 實驗步驟 14
3.1.2.1 基板裁製 14
3.1.2.2 基板清洗 14
3.1.2.3 金粒子噴灑 14
3.1.2.4 氧化鋅奈米結構成長 15
3.2實驗分析 18
3.2.1 AFM 18
3.2.2 SEM 23
3.2.3 PL 光譜 26
第四章 實驗結果與討論 27
4.1 催化劑成長 27
4.2 影響奈米結構成長因素 29
4.2.1 成長壓力 29
4.2.2 成長溫度 34
4.2.3 成長時間 40
4.3其他氧化鋅奈米結構 43
　　第五章　結論 46
參考文獻 47

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