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研究生:李建志
研究生(外文):Chien-Chih Lee
論文名稱:過濾式陰極電弧沉積(Ti,TiAl)N/(Ti,TiAl)CN混合鍍膜之特性研究
論文名稱(外文):Study on Characteristics of (Ti,TiAl)N/(Ti,TiAl)CN Mixed Coatings by Filtered CAD Process
指導教授:許正勳許正勳引用關係
指導教授(外文):Cheng-Hsun Hsu
學位類別:碩士
校院名稱:大同大學
系所名稱:材料工程學系(所)
學門:工程學門
學類:綜合工程學類
論文種類:學術論文
論文出版年:2006
畢業學年度:94
論文頁數:103
中文關鍵詞:耐磨耗TiAl)CN(TiTiAl)N(Ti過濾器陰極電弧沈積耐腐蝕
外文關鍵詞:TiAl)CN(TiTiAl)N(TiCathodic arc depositionCorrosion
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本研究主要是利用陰極電弧(Cathodic arc deposition, CAD)沉積系統,並附加過慮器來改善CAD製程沉積微粒過大之缺點,因TiN、TiAlN、TiCN鍍膜各有其優缺點,且此三種鍍膜也已被廣泛研究討論,因此本實驗同時使用Ti金屬與TiAl合金兩種靶材,通入N2與C2H2氣氛為製程條件,來沈積(Ti,TiAl)N與(Ti,TiAl)CN兩種混合鍍膜,以期得到較三種廣泛研究之鍍膜優異的性質,並與附加Filter效應做比較。

經實驗得知,Filter改善了CAD particle過大之缺點,在表面粗操度、鍍膜附著性與孔隙率有極大的改善,且鍍膜結構不變,又因孔隙率隨particle縮小而減少,在抗蝕性方面有較好的表現,但是particle縮小,使得鍍膜沉積速率降低。
The work investigated to improve the defect of the bigger particle by Cathodic Arc Deposition (CAD) system with filtered. Because the TiN、TiAlN and TiCN coatings are popularly investigated before. Thereby, in this case, use a Ti target and TiAl target moreover N2 and C2H2 gases are through into with the process parameters to deposited (Ti,TiAl)N and (Ti,TiAl)CN two mixed films. They expect to obtain excellent properties besides to compare with filtered effect.

Via knew with the experiment, the filter improves the defect of bigger particle, there are best improvement in roughness (Ra)、adhesion and porosity, moreover the structure cannot change. Also because the porosity decrease to improved with the corrosion resistance. But the particle decrease resulted in the decrease of depositing rate.
中文摘要…….………......…………………………………………..……I
Abstract…….……...……….........………………………….……………II
List..….…………………......………………………………...…………III
Table List……………….......……………………………..…………... VII
Figure List...………….......………………………………..…………..VIII
Chapter 1 Introduction………………………...........………………….1
Chapter 2 Literature review….…..…...………………….…………….2
2.1 DC53 molding steel…….……………..…………….…………..2
2.2 Physical vapor deposition (PVD)………..……………………...3
2.3 Structural model of physical vapor deposition coating…….…...4
2.4 Cathodic arc deposition(CAD)……….…………..…..…………4
2.4.1 Cathodic arc deposition principle………………..………..5
2.4.2 Cathodic arc deposition technology good and bad points……………………………………………………..5
2.4.3 Particle production and influence…………..……………..6
2.4.4 Prevents the particle the method…………………………..6
2.5 Coating design……………………...…………………………...7
2.5.1TiN…………………………………………………………7
2.5.2 TiAlN...……………………………………………….…..8
2.5.3 TiCN……………………………………………………....8
2.5.4 (Ti,TiAl)N、(Ti,TiAl)CN…………………………………8
2.6 Coatings of hardness measure……………….………………….8
2.7 Coatings of adhesion measure………...…………………..…….9
2.8 Coating ingredient and structure analysis………..…………..….9
2.9 The coatings corrode the behavior……………………….…….10
2.9.1 Corrosion definition……………………..….……………10
2.9.2 Corrosion type……………………...……………………10
2.9.3 Corrosion organization………………..…………………12
2.9.4 Thin film porosity survey..................................................14
2.10 Calowear test............................................................................15
Chapter 3 Experimental and step………................................………..26
3.1 Experimental material……………………….…………………26
3.2 Experimental flow…………………….………….……………27
3.3 Substrate heat treatment……………….…….………….……...28
3.4 Coating pretreatment…………….…………………………….28
3.5 Coating treatment………………..…………………………….28
3.6 Coating structure and property analysis……………………….31
3.6.1 X-Ray diffraction, XRD…………..…….……….………31
3.6.2 Scanning electron microscopy, SEM……………….……31
3.6.3 Field Emission Microscopy, FE- SEM..…………..……..31
3.6.4 Electron Probe Micro-Analysis, EPMA………….……...31
3.6.5 X-ray Photoelectron Spectroscopy, XPS………......…….32
3.6.6 Hardness test…………..………………..………………..32
3.6.7 Adhesion test…….…………………………...………….32
3.6.8 Wear test…………………………………………………33
3.6.9 Roughness test.………...………………………………...34
3.6.10 Water contact angle test..……………….………………34
3.7 Corrosion test…………………………………………………..35
3.7.1 Polarization curve test………………...…………………35
3.7.2 Porosity measured……………...………………………..35
Chapter 4 Results and discussions………………..........……………36
4.1 Observe the coating surface……………………………………36
4.1.1 Observe the coating surface morphology……………..…36
4.1.2 Attaches Filter to the coating surface porosity influence..39
4.2 Coating surface ultimate analysis………………..……………42
4.2.1 EPMA analysis….....................……….….…………42
4.2.2 XPS quantitative analysis……………………………51
4.2.3 XPS surface bonding analysis……………….………56
4.3 Coating structure analysis……………...………….……….61
4.4 Coating thickness and coating rate………………………...65
4.5 Coating property analysis.......……………...……………...69
4.5.1 Hardness measured………....………………………69
4.5.2 Roughness measured……….....……………………69
4.5.3 Adhesion test…………..…………...………………72
4.5.4 Water contact angle measured………...……………74
4.5.5 Calo wear test……………....………………………76
4.5.6 Electrochemistry corrosion test…………..………...79
Chapter 5 Conclusion………...............................................................83
Chapter 6 Reference……….…………………………………………84
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