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研究生:林秀珈
研究生(外文):Hsiu-Chia Lin
論文名稱:利用電漿沉積與添加酚醛樹脂製備高靈敏度與抗水性濕度感測器
論文名稱(外文):Fabrication of high sensitive and water- resistive humidity sensor by phenol formaldehyde resin and plasma treatment
指導教授:陳克紹陳克紹引用關係
指導教授(外文):Ko-Shao Chen
學位類別:碩士
校院名稱:大同大學
系所名稱:材料工程學系(所)
學門:工程學門
學類:綜合工程學類
論文種類:學術論文
論文出版年:2006
畢業學年度:94
語文別:英文
論文頁數:84
中文關鍵詞:酚醛樹脂電漿沉積濕度感測器
外文關鍵詞:plasma treatmentphenol formaldehyde resinhumidity sensor
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感測元件製備以不同比例酚甲醛樹脂(phenol-formaldehyde resin)與水溶性單體NaSS (Sodium styrenesulfonate)混合後,以UV光接枝聚合於基材表面。在濕度改變時因吸水解離會提升離子導電,酚甲醛樹脂可以防止離子流失,故可以得到高的濕度感應性,此相對濕度感測器在一般環境下可長時間放置,但沒有好的抗水洗效果。本研究的改良方法在梳型電極表面以電漿PECVD的方式沉積HMDSZ (hexamethyldisilazane)薄膜 ,此薄膜表面具有疏水性又具活性基與過氧化基的特性,活性基與過氧化基以利後續接枝聚合,可化學結合固定濕度感應膜,可以期待膜具有耐抗水性質。結果可知阻抗測量變化範圍為4 order在相對濕度35~95%。由電漿前處理後遲滯效應由原本13.6%下降至1.4%。抗水性阻抗測試在酚甲醛樹脂添加量越多與電漿前處理阻變化與重量變化越少,反應時間R.H.63%到93% 在6秒內即可反應完成。
For fabricating the excellent water-resistant humidity sensitive layer, the organic humidity sensitive monomer mixed with phenol-formaldehyde resin solution was successfully prepared by spin-coating on comb-shaped electrodes. The spin-coating sensitive layers were exposed to UV-light to induce grafting and curing reaction. Mixing with the resin solution cam improve the adhesion between the polymerized film and electrode substrate. Unfortunately, it tends to solve in water because the adhesion between the copolymerized monomer and electrode substrate is poor. When we deposit hydrophobic HMDSZ (hexamethyldisilazane) plasma film onto the comb-shaped electrodes as an interface before grafting, the plasma treatment can provide the free radicals that can bond with humidity-sensitive polymer strongly by graft reaction, therefore the device has a good water resistivity.
The impedance can very by 4 order between humidity of35~95%. Temperature dependence, hystersis, response time, water durability under various environments were also investigated.
摘要 I
Abstract II
Acknowledgement III
List of figures VII
List of Tables XII
List of Tables XII
Chapter 1 Introduction 1
Chapter 2 Literature reviews 3
2.1 Plasma 3
2.1.1 What is plasma 3
2.1.2 Plasma generation 4
2.1.3 Plasma Modification 5
2.1.4 Plasma Treatment 7
2.2 Surface photo-grafting 8
2.3 Humidity defines and expresses 10
2.3.1 Important indicators of humidity sensor 12
2.3.2 Species of humidity sensor 17
2.3.2.1 Ceramic humidity sensor 17
2.3.2.2 Electrolyte humidity sensor 21
2.3.2.3 Quartz crystal humidity sensor 21
2.3.2.4 Polymer humidity sensor 22
2.4 Ion conducting polymer sensors 25
2.4.1 Humidity sensors using polymer electrolytes 26
2.5Phenol-formaldehyde resin [58] 27
Chapter 3 Experimental 33
3.1 Experimental flowchart 33
3.2 Material 34
3.2.1 Reagents 34
3.2.2 Substrates 34
3.3 Instruments 34
3.4 Preparation of R.H. sensor 37
3.4.1 Reagents for cleaning sample surface: 37
3.4.2 Monomers for plasma deposition 37
3.4.3 Precurse preparation 37
3.4.4 The precursor coating device 38
3.4.5 UV grafting 38
3-5 Analyses methods 38
3-5.1 Surface hydrophilicity 38
3-5.2 FTIR analyses 38
3-5.3 Measurement of Film thickness 39
3-5.4 FESEM analyses 39
2.5.5 ESCA (XPS) analyses 39
3-6 Humidity sensitive properties 40
3.6.1 Impedance versus Humidity test 40
3.6.2 Hysteresis test 40
3.6.3 Response time test 40
Chapter 4 Results and Discussion 46
4.1 Durability of films in water atmosphere 46
4.2 Deposited thickness 47
4.3 IR spectra 47
4.4 SEM morphology 48
4-5 ESCA analysis 49
4.6 Humidity sensitive characteristics 49
4.7 Hysteresis of the sensor devices 52
4.8 Temperature depenadnce of the sensor devices 53
4.9 Response time of the sensor devices 54
4.10 Water durability 55
Chapter 5 Conclusion 76
Reference 78
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