燃料電池是一新的能源技術，目前各國正如火如荼展開研究工作。為了發展更經濟的質子交換膜型燃料電池，技術人員都將焦點放於能提供更好的性能表現和更低的價格的新技術。被認為最有可能降低製造成本的即為流場板。目前廣泛使用的材質為石墨，依照不同電池種類，石墨板也有所不同，但是不管何種石墨材料都有相同的問題：製造成本高和加工困難。若利用金屬材料取代石墨，則可大幅度降低材料的成本。但金屬材料與石墨有著相同的問題；加工困難。一般金屬加工方式不外乎傳統加工之方式，以數值控制加工方式製作流場板，但此方式對縮小電池尺寸卻有其極限在。若以非傳統加工方式中的放電加工或是電鑄成型來製作流場板，其加工時間慢與加工成本過高為最大之缺點，不符合量產之效率。由於一直無法降低製作成本與開發出適當的量產製程，導致商業化的燃料電池一直無法正式量產推廣。
本研究旨在以不鏽鋼金屬為加工材料，利用金屬材料的高強度、導電度、氣密性等特性，研究非傳統加工中之微電化學加工製程於金屬薄型流場板之製作。微電化學加工法（micro-Eletrochemical machining，簡稱μECM）為非傳統加工方法中的一種。簡單來說，其原理為利用〝兩電極放在電解液中，通以直流電源，金屬會由陽極電解出來〞。由於其在加工過程中不涉及機械能及熱能的作用，且此加工方法中金屬切除速率相當高、加工速度快、加工過程中陰極刀具不損耗，故適合應用於金屬微細加工量產，達成生產成本下降的目的。
本研究分主要利用MEMS及電鑄製程成型μECM之具微結構陰極電極。建立電化學加工設備，此設備需具進給之能力，以符合製作薄型流場板時，調整加工間隙之需求。最後以電化學加工製程試作不鏽鋼薄型流場板，了解其可行性與未來機台改善目標。

An efficient and cost effective method for producing flow channels of metallic bipolar plates is essential in making metallic fuel cell a potential technology. Research works on CNC machining, MEMS technology, micro-machining and chemical etching has their drawbacks.
In this paper, the micro-electrochemical machining (μECM) technology is proposed for producing metallic flow channels. The μECM process is the reverse of electroplating process. It is applicable to any conducting materials. It is a zero stress process with minimum thermal effect. By connecting the substrate to the anode and the die to the cathode, the substrate will be dissolved until it has the mirror image geometry of the die. Clean and smooth flow channels could be produced efficiently.
The die with the mirror image of flow channels is produced by the MEMS and LIGA technology. The SS316L stainless steel is the substrate material. A prototype of μECM system was design and manufactured for this study. It consists of a high precision feeding mechanism for the die (cathode), corrosion resistant fixture and platform, a subsystem for pumping and filtering of electrolyte, and a power supply. Process parameters such as electrical density, electricity type, gap between electrodes and electrolyte flow rate were also studied in order to evaluate process efficiency and surface quality.
A single cell flow plate was produced which had an effective area of 2.5 cm by 2.5 cm and thickness of 1 mm. The dimensions of the width and depth of the flow channels were 500μm and 200μm, respectively. The geometry and surface quality of the flow channels under various process parameters were measured. The results showed that the μECM technology produces good quality metallic flow channels very efficiently.

書名頁..........................ii
論文口試委員審定書...............iii
授權書..........................iv
中文提要........................vii
英文提要.......................viii
誌謝 ............................ix
目錄..............................x
表目錄..........................xii
圖目錄.........................xiii
第一章 緒論......................1
1.1 研究背景與目的.............1
1.2 研究目標..................4
1.3 文獻回顧..................4
1.4 論文架構..................7
第二章 研究理論介紹..............10
2.1 電化學加工原理介紹...........10
2.1.1 電化學加工之加工參數.........12
2.1.2 電化學加工電解液簡介.........16
2.1.3 電解液的基本要求與特性........17
2.1.4 常見的電解液分類.............20
2.2 LIGA-like技術與電鑄製程的應用...21
2.2.1 LIGA技術....................22
2.2.2 LIGA-like技術...............23
第三章 研究方法與實驗設備..........24
3.1 研究方法及實驗規劃............24
3.2 實驗設備簡介.................26
3.2.1 電化學加工設備...............26
3.2.2 電鑄銅設備...................32
3.2.3 檢測儀器.....................33
第四章 應用UV-LIGA製程之電極製作....36
4.1 電化學加工微結構電極製作........36
4.2 陰極電極模仁成型流程............36
4.3 陰極電極電鑄成形...............47
第五章 微電化學加工機台..............56
5.1 電化學加工機台簡介..............56
5.2 進給裝置程式撰寫................62
第六章 電化學加工參數測試與不鏽鋼流場板加工..70
6.1 簡易封閉夾治具設計...............71
6.2 陽極加工件加工深度量測............74
6.3 陽極加工件側向擴孔程度量測.........78
6.4 陽極加工件表面雜散腐蝕現象觀察......81
6.5 小結－電化學加工參數測試...........82
6.6 機台加工與結果量測.................83
6.7 小結－機台加工與結果...............88
第七章 結論與未來展望..................89
7.1 結論.............................89
7.2 未來展望.........................90
參考文獻................................92

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