臺灣博碩士論文加值系統

微熱壓製程一般而言具有設備成本低、環境要求低、可製造高深寬比元件及可同時進行尺寸差異大的圖樣轉印，最重要的是不因光的特性而在尺寸上有所限制。現今文獻記載尺寸亦突破10nm，另有許多利用微熱壓印製程所製做出的產品也相繼被研究開發。本研究不論在實驗與模擬皆極欲探知製程參數中熱壓壓力與保壓時間所引起的潛變行為對於微熱壓製程的影響。在實驗方面，分別以兩種高分子材料及兩種初始膜厚進行不同壓力負載、保壓時間與模穴間距的壓印實驗，藉以瞭解潛變行為在不同製程條件下對充填率的影響。另配合FEM電腦模擬以潛變模型進行模擬分析，比對實驗與模擬中潛變行為的效應。

Hot embossing processes also be named nanoimprint lithography as a method to fabricate polymer structures . As well as we know it is a low cost , general applicability ,and high aspect ratio method . Many studies which success to make up products with hot embossing process were published . The creep effect is the most important thing that we want to know how powerful is it during embossing process . So this study try to discover that how embossing pressure , embossing time and pattern size to influence on hot embossing processes with experiments and simulation .

中文摘要 i
英文摘要 ii
誌謝 iii
目錄 iv
表目錄 vi
圖目錄 vii
符號對照 ix

第一章 緒論 1
1.1 前言 1
1.2 文獻回顧 4
1.2.1 微熱壓成形之有限元素分析 4
1.2.2 微熱壓成形之實驗研究 7
1.3 本文架構 8
第二章 有限元素分析 11
2.1 有限元素之基本理論 11
2.2 非線性求解之演算法 11
2.3 接觸判定與處理 12
2.4 網格重建之選擇 13
2.5 熱壓成形之材料本質方程 14
2.6 潛變 15
2.7 FEM材料參數設定 15
2.8 FEM邊界簡化 16
2.9 FEM幾何模型的建立與網格化 16
第三章 實驗設備與步驟 27
3.1 實驗設備 27
3.1.1 旋轉塗佈機 27
3.1.2 氣液壓動力熱壓機 27
3.1.3 3D光學顯微鏡 27
3.2 實驗步驟 28
3.2.1 PMMA高分子旋轉塗佈（僅薄膜式熱壓實驗） 28
3.2.2 微熱壓成形 29
3.2.3 微結構量測與充填率計算 29
3.2.3.1 薄膜式熱壓實驗 29
3.2.3.2 薄板式熱壓實驗 30
3.3 製程參數 31
第四章 結果與討論 43
4.1 薄膜式熱壓實驗結果 43
4.2 薄板式熱壓實驗結果 44
4.3 FEM電腦模擬結果 45
4.4 誤差來源 47
4.4.1 實驗誤差 47
4.4.2 量測誤差 48
4.4.3 FEM模型的假設與簡化誤差 48
第五章 結論與建議 69
5.1 結論 69
5.2 建議 69

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