臺灣博碩士論文加值系統

本實驗室致力於軟性電子製程的開發，其重點在於有機薄膜的沉積技術，而有機薄膜沉積技術的關鍵點在於低溫製程、均勻與可控制膜厚以及圖案化的能力，現今本實驗室開發之製程「創新物理式微接觸印刷技術」已可達大面積均勻薄膜沉積，但是對於圖案化能力仍需詳加探討。
所以本文中，將對此製程技術應用於圖案化有機薄膜做一探討，並且為此製程性能提供了一些數據上的評估。製程特性於圖案化有機薄膜產生的議題包含了以下六點，pairing、crosstalk、solvent-induced defect、edge effect、shrinkage以及幾何條件對應膜厚變化的現象，此文內皆有詳細定義其形成機制且提出解決方法，並輔以實驗驗證。現階段可以達到之有機薄膜最小線寬為5.1μm，解析度為10μm；在製程能力的評估方面，針對於圖案化有機薄膜的應用上，可以得到良好的膜厚控制能力，並且對於膜厚變化量的RMS標準差約落於4%至16%之間。

Our group have been devoted to flexible electronics fabrication for a long time. There are three key technical challenges for flexible electronics fabrication: depositing thin film on substrate without heating, the thickness controllability and uniformity of the thin film, and patterning. In previous research, deposition of large-area thin films with good uniformity had been achieved by an “Innovative μCP(micro contact printing) process” developed by the group.
In this research, the patterning fidelity of the proposed μCP process is thoroughly evaluated. Issues of pairing, crosstalk, solvent-induced defect, edge effect, shrinkage, and “geometry-dependent film thickness” have been identified. Formation mechanism and solution of each issue, except the last one, are proposed and experimentally verified. At the current stage, the minimum line width of 5.1μm with 10μm in resolution is achieved. Thickness RMS variation of patterned thin films falls in the range of ~4% to ~16%.

第一章 緒論
1-1 前言
1-2 創新微接觸印刷製程簡介
1-3 研究動機以及目的
1-4 文獻回顧
1-5 論文貢獻
第二章 製程問題以及解決方法
2-1 Pairing
2-1.1 定義
2-1.2 形成機制
2-1.3 解決方法
2-2 Crosstalk
2-2.1 定義
2-2.2 形成機制
2-2.3 解決方法
2-3 Solvent-induced Defect
2-3.1 定義
2-3.2 形成機制
2-3.3 解決方法
2-4 Edge Effect
2-4.1 定義
2-4.2 形成機制
2-4.3 解決方法
2-5 Shrinkage
2-5.1 定義
2-5.2 形成機制
2-5.3 解決方法
2-6 Geometry-dependent Film Thickness
2-6.1 定義
2-6.2 形成機制
2-6.3 解決方法
第三章 製程能力評估
3-1 有機薄膜線寬表現觀察
3-1.1 最小可達線寬
3-1.2 線寬變化評估
3-2 膜厚均勻度以及膜厚控制能力評估
3-2.1 針對平坦圖章為製程媒介的能力評估
3-2.2 針對具圖案化結構圖章為製程媒介的能力評估
第四章 結論以及未來工作
4-1 結論
4-2 未來工作
參考文獻
附錄A 創新物理吸附式微接觸印刷製程參數定義
附錄B POST-Reflowing treatment的參數定義
附錄C 修改式的創新物理吸附式微接觸印刷製程參數定義
附錄D 線寬資料點取樣說明
附錄E 膜厚資料點取樣說明

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