臺灣博碩士論文加值系統

在本篇論文中，我們針對新型光子類晶體（photonic quasi crystal）－圓形光子晶體（circular photonic crystal, CPCs）進行光學特性模擬及製作。在製程方面則利用雷射直寫（direct laser writing）配合雙（多）光子吸收技術製作圓形光子晶體，採用低數值孔徑（NA）0.85 顯微物鏡，以及利用非聚焦中心處製作小週期結構。藉此，CPCs晶格週期可由700 nm縮小至550 nm。因此這種光子類晶體可應用於光通訊波段。

In this thesis, we fabricate circular photonic crystals (CPCs) by direct laser writing technique based on multi-photon absorption polymerization effect and finite element method is adopted to simulate the transmission spectra of circular photonic crystals at different incident angles. The low numerical aperture (NA = 0.85) objective lens was used to focus the center part hided laser beam on photoresists surface. By this way, the lattice constant of circular photonic crystals was decreased from 700 nm to 550 nm. Therefore, the CPCs were agree with the infrared wavelengths.

Abstract ------------------------------------------------------- I
摘要 -----------------------------------------------------------II
第一章 導論 ----------------------------------------------- 1
第二章 實驗原理 ----------------------------------------- 5
2.1. 雙（多）光子吸收（two- or multi-photon absorption） ------------------------------------------------------------------ 5
第三章 CPCs原理及模擬 ----------------------------- 10
3.1. 圓形光子晶體 ----------------------------------------- 10
3.2. COMSOL模擬CPCs --------------------------------- 13
3.3. COMSOL模擬之參數設定 ------------------------- 17
3.4. 圓形光子晶體穿透頻譜模擬 ----------------------- 23
第四章 結果與討論 ------------------------------------ 28
4.1. 樣品製作流程及參數 ------------------------------- 28
4.2. 光阻特性簡介 ---------------------------------------- 33
4.3. 實驗架設 ---------------------------------------------- 35
4.4. 實驗結果與討論 ------------------------------------- 37
第五章 結論 ---------------------------------------------- 54
參考文獻 ---------------------------------------------------- 55

[1] E. Yablonovitch, Phys. Rev. Lett, 58, 2059 (1987)
[2] S. John, Phys. Rev.Lett. 58, 2486 (1987)
[3] T.Yoshie, J. Vuckovic, A. Scherer, H. Chenand , and D. Deppe, Appl. Phys. Lett. 79, 4289 (2001)
[4] K. Srinivasan, P. E. Barclay, O. Painter, J. Chen, A. Y. Cho, and C. Gmachl, Appl. Phys. Lett. 83, 1915 (2003).
[5] K. Srinivasan, P. E. Barclay, O. Painter, J. Chen, A. Y. Cho, and C. Gmachl, Appl. Phys. Lett. 79, 3032 (2001).
[6] S. Noda, K. Tomoda, N. Yamamoto, and A. Chutinan, Science 289, 604 (2000)
[7] M. Loncar, D. Nedeljkovic, T. Doll, J. Vuckovic, A. Scherer, and T. P. Pearsall, Appl. Phys. Lett. 77, 1937 (2000)
[8] S. -Y. Lin, E. Chow, V. Hietala, P. R. Villeneuve, J. D. Joannopoulos, Science 282, 274 (1998).
[9] J. D. Joannopoulos, R. D. Meade, and J. N. Winn, Photonic Crystals (Princeton University Press, Princeton, NJ, 1995).
[10] 黃海星, 團聯式共聚物微相分離圖形控制, 國立中正大學物理研究所碩士論文(2006)
[11] 巫晟逸, 自組裝高分子光子晶體製備, 國立中正大學物理研究所碩士論文(2003)
[12] 梁文評, Fabrication of two- and three-dimensional photonic crystals with defect by combining multiple-exposure of two-beam interference and multi-photon polymerization, 國立中正大學機電光整合研究所碩士論文(2005)
[13] 陳柏文, 應用雙光子吸收技術和電化學沈積技術製作二維微奈米結構, 國立中正大學物理研究所碩士論文(2004)
[14] F. Garcia-Santamaria, C. Lopez, F. Meseguer, F. Lopez-Tejeira, J. Sanchez-Dehesa, H. T. Miyazaki, Appl. Phys. Lett. 79, 2309 (2001)
[15] G. Q. Liang, W. D. Mao, Y. Y. Pu, H. Zou, H. Z. Wang, Z. H. Zeng. Appl. Phys. Lett. 89 ,041902 (2006)
[16] T. Kondo, S. Juodkazis, V. Mizeikis, H. Misawa, Opt. Express 17, 7943 (2006)
[17] Y. K. Pang, J. C. W. Lee, C. T. Ho, W. Y. Tam, Opt. Express 14, 9013 (2006)
[18] M. Deubel, M. Wegener, A. Kaso, S. John, Appl. Phys. Lett. 85, 1895 (2004)
[19] D. McPhail, M. Straub, M. Gu, Appl. Phys. Lett 87, 091117 (2005)
[20] M. Deubel, and M. Wegener, S. Linden, G. Von Freymann, Appl. Phys. Lett. 87, 221104 (2005)
[21] J. Serbin, A. Egbert, A. Ostendorf, B. N. Chichkov, R. Houbertz, G. Dornann, J. Schulz, C. Cronauer, L. Frohlich, M. Popall, Opt. Express 28, 301 (2003)
[22] M. Deubel, M. Wegener, S. Linden, G. Von Freymann, S. John, Opt. Lett 31, 805 (2006)
[23] 蔡忠憲, 應用雙光子吸收光聚合化技術於高分子次微米結構製作, 國立中正大學機電光整合工程研究所碩士論文(2003)
[24] Y. S. Chan, C. T. Chan, Z. Y. Liu, Phys. Rev. Lett. 80, 956 (1998)
[25] M. E. Zoorob, M. D. B. Charlton, G. J. Parker, J. J. Baunmberg, M. C. Netti, Nature 404, 740 (200)
[26] N. Horiuchi, Y. Segawa, T. Nozokido, K. Mizuno, H. Miyazaki, Opt. Lett. 29, 1084 (2004)
[27] S. P. Gorkhali, J. Qi, G. P. Crawford, Appl. Phys. Lett. 86, 011110 (2005)
[28] Y. Wang, S. Jian, S. Han, S. Feng, Z. Feng, B. Cheng, D.Zhang, J. Appl. Phys. 97, 106112 (2005)
[29] S. P. Gorkhali, J. Qi, G. P. Crawford, J. Opt. Soc. Am. 23, 149, (2006)
[30] A. Ledermann, L. Cademartiri, M. Hermatschweiler, C. Toninelli, G. A. Ozin, D. S. Wiersma, N. Wegener, G. von Freymann, Nature Mater. 5, 942 (2006)
[31] N. D. Lai, J. H. Lin, Y. Y. Haung, C. C. Hsu, Opt. Express 14, 10746 (2006)
[32] N. D. Lai, J. H. Lin, P. W. Chen, J. L. Tang, C. C. Hsu, Opt. Communications 258, 97 (2006)