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研究生:李政鴻
研究生(外文):Cheng-Hong Li
論文名稱:表面粗糙度對Kovar合金與玻璃接合之影響
論文名稱(外文):The effect of surface roughness on the join between Kovar alloy and glass
指導教授:黃聖芳黃聖芳引用關係
指導教授(外文):Sheng-Fang Huang
學位類別:碩士
校院名稱:中華技術學院
系所名稱:機電光工程研究所碩士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2007
畢業學年度:95
語文別:中文
中文關鍵詞:潤濕性Kovar合金玻璃密封接合表面粗糙度
外文關鍵詞:wettabilityKovar alloyglassSealingsurface roughnessg
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本論文旨在探討Kovar合金之表面粗糙度對玻璃在其表面之潤溼性以及兩者之接合效果的影響。研究方法為利用不同號數之砂紙對之表面進行研磨,以獲得四種不同的表面粗糙度。Kovar合金又分為有先經氧化處理及未經氧化處理兩組,氧化處理為將Kovar合金加熱到700℃,持溫10分鐘,使Kovar合金表面先形成一氧化層。再將玻璃與Kovar合金置於加熱爐中加熱到900℃,持溫15分鐘進行接合。加熱爐的爐氛以空氣為主,並分成放置Ti屑及不放Ti屑兩種方式,藉此控制爐氛中的氧含量。完成接合後,觀察玻璃在Kovar合金表面的攤開情況,並切取玻璃與Kovar合金的剖面,觀察兩者之接觸角,以比較潤溼性之差異,同時以掃瞄式電子顯微鏡觀察玻璃與Kovar合金之接合界面結構。再以電子探束微分析儀分析界面區域之元素分佈情形。實驗結果顯示隨Kovar合金的表面粗糙度增加,造成玻璃與Kovar合金之接觸角隨之變大,潤溼性隨之變差;Kovar合金之表面粗糙度為Ra0.07μm時,在Kovar合金未預氧化,且在爐中放置Ti屑以減少爐氛的氧含量處理條件下,所得的玻璃與Kovar合金之接觸角最小,潤溼性最好;在相同處理條件下,Kovar合金之表面粗糙度不同時,造成界面上氧化層厚度之變化幅度不大;氧化層中元素分佈以Fe含量較高,其次是Si。而Ni和Co的分佈在Kovar合金接合界面區域有較高含量;大部份玻璃與Kovar合金接合試片之拉伸破斷面並不在接合界面,而是在玻璃,顯示接合強度比玻璃的強度還要高。
This study examines the surface roughness of Kovar alloy affected the wetting and sealing of Kovar alloy with 7056 glass. First, the specimens of Kovar alloy were ground into four grade of surface roughness by abrasive papers of #100, #400, #800, and #1200. Then the specimens of Kovar alloy were divided into two groups, one group was undergone pre-oxidization treatment at 700℃ and isothermal holding for 10 minutes to produce an oxide layer on the surface of the Kovar alloy, but another group wasn’t. Finally, the wetting experiment was conducted at 900℃ for 15 minutes to observe the wettability of 7056 glass on the underlying Kovar alloy specimens. During the heating process of the wetting experiment, the air was used to be the atmosphere of furnace, two conditions were employed, one was put some titanium chips inside the furnace to react with the oxygen, another wasn’t. In the mean time, the join specimens of Kovar alloy and 7056 glass were produced.The cross sections of specimens were observed for check the spreading and wetting phenomenon of glass on Kovar surface. The interface structure between glass and Kovar alloy was observed under scanning electron microscope excision (SEM) and elemental analysis was also conducted on the glass-to-metal junction using an electron probe micro-analyzer (EPMA). Experimental results revealed that the contact angle between 7056 glass and Kovar alloy increased (the wettability decreased) as the surface roughness of Kovar alloy increased. The specimen of surface roughness Ra 0.07μm of Kovar alloy, no-pre-oxidization, and titanium chips inside the furnace would have a smallest contact angle between glass and Kovar alloy and show good wettability. In the same treatment condition, the thickness of oxide layer on the surface of the Kovar alloy didn’t depend on the surface roughness of Kovar alloy. There was highest content of Fe in the oxide layer between Kovar alloy and 7056 glass. The second one was Si. The fracture of tensile was mostly located on glass, not on the join interface of glass and Kovar alloy, showing the strength of join was higher than glass.
中文摘要.........................................................................................................................i
英文摘要........................................................................................................................ii
誌謝...............................................................................................................................iii
目錄...............................................................................................................................iv
圖索引...........................................................................................................................vi
表索引............................................................................................................................x

第一章 前言...............................................................................................1
第二章 文獻回顧.......................................................................................3
2.1 鐵-鎳-鈷接合合金............................................................................................3
2.2 封裝用玻璃.......................................................................................................3
2.2.1 封裝用玻璃介紹......................................................................................4
2.2.2 光學玻璃..................................................................................................5
2.2.3 7056玻璃...................................................................................................5
2.3 潤濕現象...........................................................................................................6
2.3.1 氧含量對玻璃潤濕性的影響..................................................................7
2.3.2 表面粗糙度對潤濕性的影響..................................................................7
2.4 氧化速率及氧化層形態...................................................................................7
2.5 玻璃與金屬密封接合處理...............................................................................9
2.5.1 玻璃與金屬密封接合的影響因素........................................................10
2.5.2 氧化物對玻璃與金屬的影響................................................................11
2.5.4 界面反應與鍵結機構............................................................................13
2.6 表面粗糙度.....................................................................................................13
第三章 實驗方法與步驟........................................................................27
3.1 實驗流程.........................................................................................................27
3.2 材料試片準備.................................................................................................27
3.3 表面粗糙度處理.............................................................................................27
3.4 氧化處理.........................................................................................................28
3.5 潤濕性實驗.....................................................................................................28
3.6 接合實驗.........................................................................................................28
3.7 拉伸試驗.........................................................................................................28
3.8 玻璃與Kovar合金接合界面分析...................................................................29
第四章 結果與討論................................................................................36
4.1 表面粗糙度分析.............................................................................................36
4.1.1 不同研磨顆粒對Kovar表面粗糙度之影響..........................................36
4.1.2 氧化處理對Kovar表面粗糙度之影響..................................................36
4.2 玻璃與Kovar合金潤濕性分析.......................................................................37
4.2.1 氧化處理對玻璃與Kovar之潤濕性之影響..........................................37
4.2.2 加熱爐內放Ti屑對玻璃與Kovar潤濕性之影響..................................38
4.3 氧化層厚度及元素分佈分析….....................................................................40
4.3.1 處理條件對氧化層厚度之影響............................................................40
4.3.2 處理條件對氧化層元素分佈之影響....................................................42
4.4玻璃與Kovar合金接合強度分析.....................................................................43
第五章 結論............................................................................................82
第六章 未來研究方向............................................................................83
參考文獻..................................................................................................84
作者簡介..................................................................................................86
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