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研究生:蘇冠同
論文名稱:嵌入軟質PU薄膜之微型應變規的設計與實測
指導教授:林育立林育立引用關係
學位類別:碩士
校院名稱:中華大學
系所名稱:機械與航太工程研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2007
畢業學年度:95
語文別:中文
中文關鍵詞:箔型應變規聚氨基甲酸酯(PU)應變規係數
外文關鍵詞:foil strain gaugepolyurethane (PU)goldgauge sensitivity
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為量測Polyurethane(PU)材料特定部位之應力/應變,本研究設計微型應變規於PU材料之上,有別於一般商業應變規採取間接黏貼於待測物上,本研究以在待測物上直接嵌入應變規的方式設計與實測。研究中使用金(Au)薄膜做為應變規金屬材料,製作尺寸為1 mm * 1 mm * 0.1 μm的應變規,電阻值測得約為200±30 Ω。研究結果顯示,未防潮封裝的應變規,其應變規係數(gauge factor)在應變小於1%時約為4±0.5,應變是在1~1.5%時約為1.8;而完成防潮封裝的應變規,其係數約為2.4。在動態實驗中,應變規的應變會隨頻率增高而降低,然而當應變量在1.5%時,反應會隨頻率增高而變大,可能的原因是金產生塑性變形所引起。經過測試,發現製作的應變規有可靠度的問題,可能也是造成此問題的原因,目前推測可能原因有三點,一:金薄膜與PU之間的介面接著力不佳,二:鍍層結構有空孔與裂紋等不規則表面產生,三:金薄膜的拉伸極限較低。 因此,本研究所設計之金薄膜應變規,應變範圍應受限於1%以內可得較準確之結果,在動態測試方面,因經多次重複的使用,會出現可靠度的問題,因此較適用於短時間的量測。
In this study, micro strain gauge is designed in the polyurethane (PU) thin film to measure the stress/strain in situ. In our design, the strain gauge is embedded in PU which is different to the commercial strain gauge of sticking to the sample. The metal layer of strain gauge used in this study is gold. The overall size of the designed strain gauge is 1 mm x 1 mm x 0.1 μm and the resistance value was measured to be 200±30Ω. The static test of strain gauge without damp proof shows that the gauge sensitivity G was measured to be G=4 when strain range is less than 1%. While G was measurement to be 1.8 when the strain range is between 1~1.5%. The static test of strain gauge with damp proof shows that the G was measurement to be G=2.6 when strain range is less than 1.2%. The dynamic test of strain gauge demonstrates that the strain is reverse proportion with frequency when strain is 0.75%. However, when the strain is 1.5% the strain is direct proportion to the frequency. The possible reason was the plastic deformation of gold was induced. After testing, the microfabricated strain gauge was found having stable problem. There are three possible reasons: 1. The adhesion of gold thin film and the substrate is poor. 2. The surface gold coated layer has many defects. 3. The strain of gold thin film has to be limited in a very low level. As a conclusion, the designed strain gauge in this study can measure more exact data when strain range is less than 1%. In dynamic test, it is suitable only measuring in a short time. Keywords: foil strain gauge, polyurethane (PU), gold, gauge sensitivity
中文摘要 ................................................Ⅰ 英文摘要 ................................................Ⅱ 目錄 ................................................Ⅲ 圖表目錄 ..............................................Ⅴ 第一章 緒論 .............................................1 1.1 前言 .............................................1 1.2 研究動機與目的 ...................................2 第二章 文獻回顧 .........................................3 2.1 PU心瓣的應用 .....................................3 2.2 應變規 ...........................................4 第三章 原理與設計 ........................................6 3.1 應變規原理 .......................................6 3.2 設計 .............................................7 第四章 實驗方法 .........................................10 4.1 製程 ............................................10 4.2 拉伸試驗 .......................................12 4.2.1 靜態測試 .....................................12 4.2.2 動態測試 .....................................13 第五章 實驗結果 .........................................14 5.1 製程 .......................................14 5.2 靜態測試 .......................................17 5.3 動態測試 .......................................19 第六章 結論 .........................................22 參考文獻 ................................................48
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