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研究生:楊正宇
研究生(外文):Chen-Yu Yang
論文名稱:表面聲波元件在扭力感測器之應用
論文名稱(外文):The Applications of Surface Acoustic Wave on Torque Sensors
指導教授:林海平林海平引用關係
學位類別:碩士
校院名稱:大葉大學
系所名稱:車輛工程學系碩士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2007
畢業學年度:95
語文別:中文
中文關鍵詞:表面聲波扭力感測器
外文關鍵詞:Surface Acoustic WaveTorque sensor
相關次數:
  • 被引用被引用:1
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表面聲波(surface acoustic wave;SAW)元件是為於積體電路的時期所發展;隨著指叉型設計(IDT)的進步下,已可有效降低插入耗損( IL ),而這使SAW除了通訊用零件的用途外,又因其壓電特性而近來常用在物理感測功能方面的研究上。
本研究以先瞭解SAW元件本身物理之特性,對壓電材料基本性質以及IDT距離變化與中心頻率的關係做基本瞭解,再經由軟體模擬來設計可用於量測軸體受扭力而產生應變之雙SAW模組,並對實體SAW模組做應變/頻率飄移的測試,而後在對於欲放置在軸體上的實驗設計製作以相對軸心正負45度角量測的雙軸向SAW扭力感測器,最後進行雙SAW扭力感測器與應變規之間的比對。
最後藉由外部控制掃頻控制的部份來取代網路分析儀量測SAW感測器的訊號,並測試在有線與無線的情況下訊號傳遞的差別,替SAW扭力感測器模組未來在無線化做為初步的發展設計。
Surface acoustic wave(SAW)component is follow with integrated circiut develop; along with "IDT" designing progress ,already reduce to plug Insertion Loss (IL) effectively. and this makes SAW in addition to the use of telecommunication kit ,because piezoelectric characteristic and in common use detect the research of function in the physics recently up.
The physical characteristic that this research understand SAW first, to the basic quality of the piezoelectric materic material and IDT distance change the relationship with center frequency does basic understanding, design a double SAW that can use to be subjected to torque and strain module in the shaft body through the software emulation .The test also done strain and frequency to float to move to the SAW module, design which places on the shaft body to manufacture with the twin shaft of opposite axis plus or minus 45 degrees corner measurement toward SAW torque a sensor, last carry on the ratio of a pair of SAW torques sensor and strain gage.
Finally by the exterior control sweep the part of pin control to replace the network analysis instrument measurement SAW the signal of the sensor, and test signal under the condition that wired and wireless deliver of difference, it will development design of being used as the first step in the wireless in the future for the SAW torque sensor module.
目錄
封面內頁
簽名頁
博授權書 iii
中文摘要 iv
ABSTRACT v
誌謝 vi
目錄 vii
圖目錄 x
表目錄 xv
第一章 序論 1
1.1前言 1
1.2文獻回顧 2
1.3 研究目的 4
第二章 表面聲波之理論分析 5
2.1 固體中的彈性波 6
2.2 表面聲波原理 7
2.3 壓電原理 9
2.3.1 正壓電效應 9
2.3.2 逆壓電效應 10
2.4 表面聲波元件壓電基材 11
2.5 基板參數 14
2.5.1 插入損失 (Insertion Loss , IL) 14
2.5.2機電耦合係數Electromechanical Coupling Coefficient 15
2.5.3 溫度頻率係數 TCF 16
2.6 交插指狀轉換器(IDT) 17
2.7 感測型SAW之種類 20
2.7.1 延遲線(delayline)型SAW元件 20
2.7.2 共振型SAW元件 23
第三章 SAW實體扭力量測 25
3.1架構及電路測試 25
3.1.1 SAW頻率偏移現象 25
3.1.2 軸體的扭力量測 27
3.1.3 雙SAW電路模擬 28
3.1.4 實體SAW感測器設計 32
3.1.5 FR4板之電路製作 33
3.1.6 綁線與量測 35
3.2 SAW與扭力應變之關係 42
3.2.1 SAW基板受力 42
3.2.2 SAW之敏感度 43
3.2.3 SAW之應變/頻飄實測 44
3.3 SAW扭力量測 53
3.3.1 軸上直接量測 53
3.3.2 薄片型感測器 59
第四章 SAW與無線發射接收模組測試 67
4.1 無線通訊原理及基本調變技術 67
4.1.2 主動式詢答系統模組硬體介紹 68
4.1.3 接收端RX電路架構 72
4.1.4 發設端TX電路架構 73
4.1.5 耦合天線 73
4.2 雙極SAW詢答模組掃頻測試 75
第五章 結論與未來研究方向建議 81
5.1 結論 81
5.2 研究建議 83
參考文獻 84
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