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研究生:林柏如
研究生(外文):Bo-Ru Lin
論文名稱:局部電化學沉積法之製程改良及三維結構製作
論文名稱(外文):Localized Electrochemical Deposition Process Improvement and Fabrication of Three-Dimensional Structure
指導教授:李春穎李春穎引用關係林招松林招松引用關係
指導教授(外文):Chun-Ying LeeChao-Sung Lin
學位類別:碩士
校院名稱:大葉大學
系所名稱:機械工程研究所碩士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2007
畢業學年度:95
語文別:中文
論文頁數:80
中文關鍵詞:局部電化學沈積懸臂樑水平沈積
外文關鍵詞:localized electrochemical depositioncantilever structurefuturehorizontal deposition
相關次數:
  • 被引用被引用:2
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  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0
一般而言,電化學沈積常用來在金屬表面沈積金屬(電鍍)或翻製經光罩微影蝕刻製作的微模型(電鑄)。然而,藉由局部感應電場的方法來沈積金屬的話,即可省略光罩或是微模仁的製作,進而可減少整體的製作成本及光罩或微模仁製作時所產生的誤差。再者,利用局部電化學沈積的方法可以輕易的製作出具有微米等級尺寸且具有高細長比之結構物。在微製程下所製作出之微結構,其微結構的機械特性很容易受到製程的影響,而且與大尺寸結構物會具有不同的機械特性。本研究即是改良局部電化學沈積法來製作出更好的微米尺寸等級之銅金屬懸臂樑結構物,並探討在不同陽極及水平沈積之製程條件下時,對結構物沈積行為之影響。找出最適合之沈積條件以製作出更好之微柱結構,再量測微柱之動態共振頻率,來定量探討沈積微柱之結構內孔洞度。另外,本研究也利用X-Y軸平面方向之步進馬達,配合Z軸方向之步進馬達,沈積二維及三維微結構,並觀察其表面狀況。成功製作出之二維及三維微結構,日後便可觀察其更多之機械特性,以期未來能廣泛的受到應用。
In general, electrochemical deposition has been employed to deposit metal on the metallic surface (plating) or to deposit metal for duplicating the patterns prepared by photolithographic process (electroforming). However, by locally controlling the induced electric field to selectively deposit metal, the lithography process for prepare the pattern by masks can be spared. Thus, it can reduce fabrication cost and error of masks or molds. Furthermore, using a localized electrochemical deposition can produce micro-sized structures with high aspect ratio easily. Usually, the structure which is fabricated by micro-process, demonstrates mechanical properties different from its bulk material counterparts. In this study, we improve the localized electrochemical deposition by employing horizontally aligned anode to fabricate a cantilever beam of Cu which is in the dimensions of micrometers. The effects of various control parameters of the deposition process are also studied. The fundamental resonance frequency of the cantilever structure is measured and the apparent density, thereby the porosity, of deposited structure is quantified. In addition, we control the movement of the X-Y axes step motor platform and Z axis step motor to deposit two-dimensional and three-dimensional micro-structures. With the successfully manufactured two-dimensional and the three dimensional microstructures, further study on their physical characteristics in the future can be recommended.
第一章 緒論
1.1 前言
1.2 研究動機
1.3 本論文架構
第二章 文獻探討
2.1 局部電化學沈積基本原理
2.2 局部電化學沈積微結構之方法
第三章 實驗方法與進行步驟
3.1 實驗設備
3.2 局部電化學沈積反應
3.3 LabVIEW的簡介及程式設計概念
3.3.1簡介
3.3.2程式設計概念
3.3.3 LabVIEW程式編寫
3.4 Z軸方向步進馬達之控制設備
3.4.1繼電器
3.4.2達靈頓電路
3.5 X-Y軸方向步進馬達控制設備
3.6 前處理
3.6.1舊尖端電極之製作方式
3.6.2新尖端電極之製作方式
3.6.3陰極底材之製作方式
3.6.4鍍液調配
3.7 微柱結構金相之觀察
3.8 ANSYS電場模擬
3.9 微柱結構動態特性之量測
第四章 結果與討論
4.1 微結構節狀形成之探討
4.2 利用ANSYS軟體分析陽極脫落之狀況
4.3 使用改良之製程沈積微結構
4.3.1 使用環氧樹脂灌入玻璃管之陽極沈積微結

4.3.2 使用環氧樹脂之陽極沈積微結構
4.3.3 使用純玻璃管之陽極沈積微結構
4.4 金相顯微試片之觀察
4.5 微結構之機械性質
4.6 二維及三維微結構之製作
第五章 結論與未來展望
5.1 結論
5.2 未來展望與研究方向
參考文獻
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