臺灣博碩士論文加值系統

利用氧化鋁奈米多孔模板技術來控制一維奈米結構材料的尺寸大小是目前最理想且最成功的方式。藉由氧化鋁奈米多孔模板可輔助成長金屬 (Fe、Co、Ni) 奈米線陣列、半導體 ( CdS、ZnS、ZnO、InP、GaN、GaAs ) 奈米線陣列以及奈米碳 ( CNTs ) 管等一維奈米結構材料。由於氧化鋁模板的孔洞大小相當一致且方向固定，因而以氧化鋁奈米多孔模板製備金屬、半導體奈米線或奈米碳管的尺寸大小、形狀、長寬比與方向性皆能精密控制。其未來可能的應用例如奈米磁性記憶元件、奈米感測元件、奈米光電元件、奈米光電平面顯示器、奈米能源元件以及奈米電子元件等。以氧化鋁奈米多孔模板輔助成長奈米碳管與奈米線已有相關文獻報導，這篇論文將探討如何製備氧化鋁模板及有效控制通道的尺寸。

Using AAO technique to control the size of one-dimensional nanomaterials is a successful method by now. Through using AAO, we can grow one-dimensional nanomaterials like Metallic (Fe, Co, Ni) Nanowire array, Semiconductor (CdS, ZnS, ZnO, InP, GaN, GaAs) Nanowire array and Carbon Nanotubes (CNTs). As AAO has the holes with consistent dimension and fixed direction, the size, shape, length width ratio and directionality of Metallic Nanowire array, Semiconductor Nanowire array and CNTs that made from AAO can be precisely controlled. It has many potential applications such as nano-magnetic memories, nanosensors, nanophotonic devices, Nanophotonic FPDs, nano-energe devices and nanoelectronic devices. There are many articles talking about CNTs and nanowires growth from AAO. This study is focusing on the fabrication of AAO with effective channel dimension control.

摘要 II
英文摘要 III
目錄 IV
表目錄 Ⅶ
圖目錄 Ⅷ
第一章 緒論 1
1.1 前言 1
1.2 研究動機 2
第二章 文獻回顧 4
2.1 陽極處理氧化鋁模板之簡介 4
2.2 氧化鋁奈米多孔模板的結構特徵 5
2.3 氧化鋁奈米多孔模板的成長機制 6
2.4 氧化鋁奈米多孔模板的製備變因 9
參考文獻 29




表目錄
表2.1 不同陽極氧化製作條件[14]。 24













圖目錄
圖1.1 PbS奈米線截面圖，放大倍率2萬倍。 18
圖1.2 PbS奈米線截面圖，放大倍率5萬倍。 18
圖1.3 奈米碳管上視圖。 19
圖1.4 奈米碳管截面圖。 19
圖1.5 孔洞大小一致且方向固定之氧化鋁奈米多孔膜板。 20
圖2.1 多孔氧化鋁模板置備柱狀規則奈米結構之電容流程圖。 20
圖2.2 置備奈米結構在ITO玻璃基板上的流程圖。 28
圖2.3 氧化鋁奈米多孔模板結構圖：(a)側視圖 ( side view ) ﹔(b)上視圖 ( top view ) 。 21
圖2.4 氧化鋁奈米多孔模板結構圖；(a)正面結構示意圖；(b)底部結構示意圖。 22
圖2.5 陽極氧化過程之電流密度-時間曲線圖。 22
圖2.6 (a)硫酸溶液定電壓25 V；(b)草酸溶液定電壓40 V；(c)磷酸溶液定電壓160 V。 23
圖2.7 不同電解液下陽極氧化電壓與孔洞大小的關係。 24

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