臺灣博碩士論文加值系統

電熱式微致動器因具有輸出力大、操作容易、製程簡單等優點，為微機電系統常用的驅動方式。本文採用系統方塊分割的方式，將微致動器結構分割成數個電阻、熱阻、熱容、彈簧等之組合，進而建構此機電熱系統之模型。本文首先分析微致動器由輸入電壓到輸出位移量之系統響應，並以實驗數據佐證模型之正確性。然後探討不同外型微致動器的致動能力及幾何參數對於靜態響應之影響。本研究可以作為未來微致動器設計參數參考之依據。

According to the advantages such as strengthened output force, easy operation, and simple manufacturing process, the electro-thermal micro-actuators are popular in current micro-electro-mechanical systems (MEMS). In this thesis, we adopt a lumped modeling approach that separates the actuator structure apart into several components of electrical resisters, heat resisters, heat capacitors, mechanical springs, etc., and then constructs the mathematical model for the system. The research first analyzes the static relationship between the input voltage and the output displacement and verifies it through experiments, and then discusses the actuating capability for three different actuator structures. The research can contribute to the design of future micro-actuators.

中文摘要 ……………………………………………………………i
英文摘要 ……………………………………………………………ii
目錄 ……………………………………………………………iii
圖目錄 ……………………………………………………………vi
表目錄 ……………………………………………………………viii

第一章 緒論…………………………………………………………1
1.1 前言…………………………………………………………1
1.2 文獻回顧……………………………………………………2
1.3 研究動機與目的……………………………………………5
1.4 本文內容摘要………………………………………………5

第二章 電熱式微致動器結構設計理論基礎………………………7
2.1 電熱式微致動器結構設計…………………………………7
2.2 基本理論基礎………………………………………………8
2.2.1 電阻、焦耳熱及熱變形……………………………………8
2.2.2 位移分析……………………………………………………9
2.2.3 結構彈性矩陣………………………………………………11

第三章 實驗方法與量測結果………………………………………13
3.1 實驗方法……………………………………………………13
3.2 機台設備與量測方法………………………………………16

第四章 電熱式微致動器之系統分析………………………………19
4.1 系統方塊分割………………………………………………20
4.1.1 電路部分……………………………………………………20
4.1.2 熱源部分……………………………………………………20
4.1.3 熱傳部分……………………………………………………21
4.1.4 膨脹變形部分………………………………………………22
4.1.5 迴授效應部分………………………………………………23
4.2 系統整合……………………………………………………24

第五章 靜態致動能力分析比對與討論……………………………28
5.1 靜態特性……………………………………………………29
5.1.1 冷臂長度變化之影響………………………………………33
5.1.2 冷臂寬度變化之影響………………………………………35
5.1.3 熱臂寬度變化之影響………………………………………36
5.1.4 間隙長度變化之影響………………………………………38
5.2 三種模型比較………………………………………………40

第六章 結論與未來研究方向………………………………………44

參考文獻 ………………………………………………………………46

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