臺灣博碩士論文加值系統

本文設計以台積電0.35μm 2P4M CMOS製程，設計有別於一般常見到的電容式及電阻式濕度感測器。此微濕度感測器包含了感測MOS、感濕薄膜、溫度感測及電路的部份；感測MOS的部份主要是通入閘極電壓，進而在源極和汲極之間的電子反轉層產生電流。感測MOS的通道長度為4μm、寬度為100μm，並採用陣列式的結構，藉此放大電流。所選用的感測薄膜對於水汽，有良好的靈敏度，其合成採用溶膠凝膠法，可有效地降低成本。溫度感測的部份，採用繞線狀的poly層作為溫度感測器，從電阻的變化感測溫度。而後將源極和汲極之間產生的電流搭配上電路，將電流轉換成輸出電壓，藉由輸出電壓的改變，達到感測相對濕度的目的，此設計即為MOSFET型式微濕度感測器。
此研究以CMOS製程整合FET微濕度感測器與電路於單一晶片上，並且利用溶膠凝膠法製作三氧化鎢之感濕薄膜，有效地降低了製作成本，並利用三氧化鎢吸附水氣之後，釋放電子的特性，進而完成感測濕度的效果。於實驗數據顯示，在溫度25°C下，感測25~85％的相對濕度，輸出電壓的變化量為45mV，靈敏度
為7.5mV/ %RH 。

The MOSFET (metal oxide semiconductor field effect transistor) micro humidity sensors are manufactured by TSMC 0.35 μm CMOS(complementary metal oxide semiconductor). This study is different from the capacitive or resistant humidity sensors. The MOSFET humidity sensors includes sensing MOS﹐circuits, temperature sensors and sensing film. The sensing MOS generates a change in current when supplying a voltage to the gate of sensing MOS. The length and width of gate in the sensing MOS are 4 μm and 100 μm, respectively. In order to increase the current variation the humidity sensors are designed as an array of sensing MOS. The sensing film is sensitive to vapor water, which it is prepared by the sol-gel process and calcined at 300℃ for 4 hours. In this way﹐we can effectly decrease the cost. The temperature sensors is designed using the polysilicon layer of the CMOS process. The temperature sensors have a change in resistance as the temperature varies. A circuit is used to convert the current variation into the output voltage.
Experimental results show that the sensitivity of the sensor is 7.5mV/ %RH at 25℃ under the humidity range of 25-85 % RH.

致謝 i
中文摘要 iii
Abstract iv
目錄 v
表目錄 vii
圖目錄 viii
第一章 緒論 1
　1.1 前言 1
　1.2 文獻回顧 2
　1.3 研究動機 6
第二章 結構及設計 7
　2.1 感測器的設計 8
　 2.1.1 感測區 8
　　2.1.2 量測電路及模擬 10
2.1.3 溫度感測 15
　2.2 感測原理 17
　2.3 三氧化鎢的性質 18
第三章 FET濕度感測器製作 22
　3.1 晶片佈局 22
　3.2 晶片的後製程 22
　3.3 三氧化鎢的製備 25
　3.4 晶片的後製程與打線 38
第四章 實驗結果與討論 44
　4.1 量測架構 44
　4.2 實驗結果 45
　　4.2.1 閘極輸入電壓1V 45
　　4.2.2 閘極輸入電壓0.7V 50
　4.3 溫度感測 55
4.4 結果與討論 56
第五章 結論與未來展望 58
附錄A 不同通道長度的濕度感測區域 59
附錄B 電路Hspice檔 65
附錄C 恆溫恆濕機操作手冊 67
附錄D 濕度表示法 71
附錄E PH meter使用方法 72
參考文獻 73




















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