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研究生:陳李坤
研究生(外文):Li-Kun Chen
論文名稱:低溫共燒陶瓷嵌入式電容與共振器元件之研究
論文名稱(外文):Analysis Of Embedded Capacitors and Resonators in Low-Temperature Cofired Creamic Technology
指導教授:許�睇�
學位類別:碩士
校院名稱:國立中興大學
系所名稱:電機工程學系所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
畢業學年度:95
語文別:中文
論文頁數:78
中文關鍵詞:低溫共燒陶瓷電容共振器髮夾型
外文關鍵詞:LTCCcapacitorresonatorhairpin
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本論文第一部分設計了四種LTCC 內埋式電容元件,經由傳統之π模型等效電路,萃取其電容值,經由相互比對,可知所萃取出的容值皆能與模擬十分接近,並且模型之頻率響應可準確至自我諧振頻率點附近,同時再針對四種不同結構的電容,討論其特性,比較容值的大小,找出最佳的設計。第二部分則完成了應用在壓控振盪器上的髮夾型共振器,包含了基礎理論與數學式的推導。最後,則利用之前所設計之 LTCC 內埋式電容元件,改變共振器的設計結構,並有效的縮小電路模組面積。
At the first part of the thesis, we design four kinds of LTCC embedded components capacitors. The extraction result via traditional equivalent π model and match the simulation result. Compared with the simulation result the measurement shows us the frequency response of adopted model can approach the device’s Self-Resonant-Frequency. And then we would compare all four capacitors with each other and find the differences among the characteristic, find out the best design. At the second part of thesis, we design and implement a hairpin resonator of Voltage-Controlled Oscillator and introduce the basic theory and derive the mathematic types. Finally, we use the designed LTCC embedded components capacitors to change the design structure of the resonators and decrease the area of module size efficiently.
中文摘要 i
英文摘要 ii
目錄 iii
圖目錄 iv
表目錄 vii
第一章 序論 1
1.1 研究動機 1
1.2 文獻回顧 1
1.3 論文架構 2
第二章 低溫共燒陶瓷(LTCC)製程技術 3
2.1 低溫共燒陶瓷簡介 3
2.2 LTCC 製程技術 4
2.3 LTCC 的模擬軟體工具 7
2.4 LTCC 的封裝與模組化 8
第三章 低溫共燒陶瓷內埋式電容元件設計 10
3.1 簡介 10
3.2 目前研究現況 10
3.3 設計原理與方法 13
3.4 模擬與量測結果 15
3.4.1 MIM 電容器 15
3.4.2 VIC 電容器 18
3.4.3 IDC 電容器 25
3.4.4 WSC 電容器 35
3.5 討論 54
第四章低溫共燒陶瓷內埋式共振器設計 57
4.1 簡介 57
4.2 串聯與並聯電路 57
4.3 共振器設計原理 63
4.4 模擬與量測結果 68
4.5 討論 74
第五章 結論與未來工作目標 75
5.1 結論 75
5.2 未來工作目標 75
參考文獻 76
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