臺灣博碩士論文加值系統

精密定位平台目前已普遍應用於CNC工具機、自動化和半導體產業等。而隨著科技的進步精密定位平台所要求的定位精度亦愈來愈高，使得在微小尺寸下非線性現象如遲滯(hysteresis)、背隙(backlash)、熱變形等因素所造成的影響無法再被忽視。本論文針對精密定位平台系統之非線性特性中的背隙現象來做探討，建立Wiener-Hammerstein型式之系統模型與系統數學方程式，並以最大概似法(Maximum Likelihood)配合Rosenbrock系統識別原理來估測出平台各部的最佳化參數，最後比較平台實際參數與估測所得之輸出兩者的誤差。論文中也將建立系統的噪音動態模型。

The precision positioning table is widely used in CNC machine tool, automation factories, and semiconductor industries etc. As the industrial technology grows rapidly, the precision positioning table needs to be more accurate. In this situation, the micro-scale nonlinear phenomena, such as hystersis and backlash, can not be ignored. This paper studies the nonlinear backlash phenomenon in the precision positioning table. The whole system is modeled as a Wiener-Hammerstein-type nonlinear model. The system parameters are estimated by the method of Maximum Likelihood and using Rosenbrock’s method of rotaling coordinates. The actual output and the system predicted output will be compared. This paper also estimates the noise dynamics for the system.

中文摘要 i
英文摘要 ii
誌　謝 iii
目　錄 iv
表目錄 v
圖目錄 vi
第一章 緒論 1
1.1前言 1
1.2研究動機與目的 1
1.3文獻回顧 2
第二章 系統模型與系統識別 5
2.1系統模型 5
2.1.1第一線性子系統 7
2.1.2系統離散模型 8
2.1.3簡化系統模型 9
2.2系統識別 10
2.2.1最大概似原理 11
2.2.3 Rosenbrock’s method of rotating coordinates 12
第三章 實驗架構與實驗方法 16
3.1實驗流程 16
3.2實驗設備 17
3.3實驗方法 23
第四章實驗結果與參數估測比較 27
第五章 結論與未來展望 39
5.1結論 39
5.2未來展望 39
參考文獻 40

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