臺灣博碩士論文加值系統

在有機光電顯示器的應用上，透明導電基板的研發為重要的課題。近年來，以氧化鋅基(ZnO-based)材料取代銦錫氧化物(ITO)材料做為透明導電薄膜電極的研究漸趨熱絡。推究其原因，主要是因為ITO 的價格較為昂貴，並且本身具有毒性，會造成人體與環境的傷害。因此，雖然ITO 透明導電薄膜具有低溫成膜、極低的電阻、不錯的透光率和極平坦的表面等特性。但是，由於其成本高與具毒性等無法忽視的潛在問題，因而使許多研究團體，持續投入研究低成本、無毒性且光電特性足以和ITO 媲美的新型ZnO-based 透明導電膜的開發與研究。
低電阻率、高透光率的新型透明導電基板的透明導電氧化物薄膜的製備及其物理化學特性與濺鍍參數的相互影響關係有待深入研究。本實驗中，我們將以射頻磁控濺鍍法，在玻璃基板上，鍍製AZO(氧化鋅鋁 ZnO-Al2O3)透明導電氧化物薄膜；成長壓力、氧分壓、濺鍍功率、基板溫度等變數對濺鍍薄膜的結晶相、電阻率、載子濃度和移動率、可見光穿透率、表面平整性等薄膜光電特性的影響，期能釐清新型透明導電基板的特性與最佳濺鍍製程參數，對有機光電顯示器的應用發展有助益。

Transparent conducting substrate is an important research and development topic in applications of organic light emitting devices,. Although ITO (indium tin oxide) is probably the most successful transparent conductive oxide (TCO) thin film, however, indium is arelatively scarce element in the earth. Thus, the cost for ITO productionis more expensive than that of others. Besides, the toxic nature of indium could be hazardous to human and environment. For the purpose of overcoming these ITO basically drawbacks, new type ZnO-based materials have been actively studied by many research groups in recent years. The transparent conductive ZnO-based thin films are investigated as an alternative to ITO films. In contrast to ITO materials, the ZnO material is more stable in reduction ambient, nontoxic, and the abundance of its constituent elements makes it available at a low cost. Therefore, ZnO-based thin films have attracted much attention as the transparent electrode.
However, the preparation techniques and properties of new transparent conducting oxide films substrates with low resistivity as well as high transparency are not well understood. In this research, we will study the RF magnetron sputter deposition of new transparent conducting oxide films of AZO (ZnO-Al2O3) on glass substrates. The influences of growth pressure, oxygen partial pressure,sputtering power, and substrate temperature on the electro-optical properties of films such as crystallinity, compound phase, electrical resistivity, carrier concentration and mobility, transmittance of visible light, and surface smoothness etc. will be extensively investigated. Clarification of the optimum process parameters, and physical properties of these new transparent conducting substrates are helpful for the development and practical applications of organic electronic devices.

第一章 緒論 ........................................................................................................1
1-1 前言 ................................................................................................1
1-2 研究動機 .....................................................................................2
1-3 論文架構 .....................................................................................3

第二章 理論與文獻回顧 6
2-1 透明導電膜 6
2-2 透明導電膜之製備 6
2-3 氧化鋅薄膜的結構和特性 8
2-3-1 氧化鋅之晶體結構 8
2-3-2 氧化鋅薄膜摻雜III 族元素之電學性質 8
2-3-3 氧化鋅薄膜摻雜III 族元素之光學性質 9

2-4 有機發光二極體的基本原理和結構 10
2-4-1 載子的注入與傳輸特性 11
2-4-2 有機發光二極體的典型結構 12
2-4-3 有機發光二極體的陽極 12
2-5 濺鍍原理 13
2-5-1 電漿原理 13
2-5-2 射頻濺鍍系統 14
2-6 熱蒸鍍系統 15



第三章 實驗過程與研究方法 20
3-1 實驗材料 20
3-1-1 基板材料 20
3-1-2 靶材材料 20
3-1-3 基板清洗溶劑及實驗氣體 20
3-2 AZO靶材配置 21
3-3 基板選擇與清洗 21
3-4 樣品準備與實驗過程 22
3-4-1 真空濺鍍之實驗步驟 22
3-4-2 真空蒸鍍之實驗步驟 22
3-5 影響氧化鋅薄膜成長因素 23
3-6 AZO薄膜結構的品質分析 24
3-6-1 X光粉末繞射儀 24
3-6-1-1 基本工作原理 24
3-6-1-2 儀器規格與特徵 26
3-6-1-3 應用 27
3-6-2 掃瞄式電子顯微鏡 28
3-6-2-1 基本工作原理 28
3-6-2-2 儀器規格與特徵 30
3-6-2-3 應用 31
3-6-3 原子力顯微鏡 31
3-6-3-1 基本工作原理 31
3-6-3-2 儀器規格與特徵 32
3-6-3-3 應用 33
3-6-4 紫外光-可見光光譜儀 33
3-6-4-1 基本工作原理 34
3-6-4-2 儀器規格與特徵 .34
3-6-4-3 應用 35
3-6-5 電性分析儀器 35
3-7 OLED單體沉積速率之測定 36
3-8 OLED多層元件之電流、電壓與亮度關係曲線圖量測 36

第四章 實驗結果與討論 43
4-1 前言與實驗固定變因 43
4-2 成長壓力之影響 .44
4-2-1 前言 44
4-2-2 電性分析 44
4-2-3 晶體結構分析與表面形態分析 ..........................................................45
4-2-4 光學性質分析 46
4-2-5 總結 46
4-3 氧氣分率之影響 .51
4-3-1 前言 51
4-3-2 電性分析 51
4-3-3 晶體結構分析與表面形態分析 ..........................................................52
4-3-4 光學性質分析 53
4-3-5 總結 53
4-4 射頻功率之影響 .58
4-4-1 前言 58
4-4-2 電性分析 58
4-4-3 晶體結構分析與表面形態分析 ..........................................................59
4-4-4 光學性質分析 59
4-4-5 總結 59
4-5 基板溫度之影響 .64
4-5-1 前言 64
4-5-2 電性分析 64
4-5-3 晶體結構分析與表面形態分析 ..........................................................65
4-5-4 光學性質分析 66
4-5-5 總結 66

4-6 AZO玻璃運用於OLED之陽極
4-6-1 前言 71
4-6-2 AZO與ITO特性比較 71
4-6-3 4-6-2 AZO與ITO運用於OLED陽極 .................................................71

第五章 結論與未來展望 77
5-1 基板不加溫的AZO薄膜 77
5-2 基板加溫的AZO薄膜 77
5-3 AZO薄膜運用於OLED陽極 77
5-4 未來研究建議 77

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