臺灣博碩士論文加值系統

本實驗利用中頻雙極式磁控與非平衡磁控濺鍍混合系統，濺鍍固體碳靶及鋯靶，被覆含鋯氮氫類鑽碳膜。主要目的為研究氮氣對於含鋯氫氮類鑽碳膜的磨潤性質與被覆刀具之乾切削性能。
實驗中鍍膜被覆共分為三階段：第一階段，主要目的為探討鋯靶電流對鍍膜的影響；第二階段，改變氮氣流量的大小，得到不同氮氣含量的鍍膜，探討不同氮含量對鍍膜磨潤性質的影響;第三階段，降低鋯靶電流大小，再進行不同氮氣流量鍍膜磨潤性質的探討，以求優劣差別明顯。以掃瞄式電子顯微鏡(SEM)與能譜儀(EDS)對鍍層斷面及磨耗面分析。
由第一階段鍍膜被覆得知：鍍膜硬度會隨著鋯靶電流的升高而下降；經SRV磨耗試驗證實鋯靶電流為0.4A時，鍍膜有最高的抗磨耗性以及最佳附著性。
經第二階段與第三階段鍍膜被覆，我們得到含氮量0∼10at.%的有氫碳膜擁有較低摩擦係數與較高的抗磨耗性且由拉曼光譜儀(Raman- Spectroscopy)觀察各鍍膜結構的sp3/sp2鍵結比例變化及G、D 波峰偏移的位置來比對SRV磨耗實驗的結果，最後將鍍膜應用於微鑽針以及車刀刀片上，發現與SRV磨耗試驗結果一致，含氮量在8∼10at. %表現優於含氮量在12∼30at. %，微量氮氣可以改善鍍膜抗磨耗性，提升刀具的使用壽命。

The main purpose of this study is to research the tribological properties and cutting performance of a-C:H:N coatings prepared by sputtering graphite and Zirconium targets with a medium frequency Twin magnetron sputtering and unbalanced magnetron sputtering hybrid system.
It contains three stages of research in the study. We focus the influence of Zr target current on the properties of coatings in first stage. We change the current of Zirconium target to get various Zirconium quantities of coatings in second and three stage.
In second and three stage, We change the current of nitrogen to get various nitrogen content a-C:H:N coatings. We confer in what kind of parameter had the best tribological performance and use SRV to study the resistant abrasion of films. The films cross-section and wear surface analysis be used by SEM and EDS. Through the research of the first stage we know that the hardness of the coatings decrease and the adhesion of the coatings increase with the zirconium target current. After SRV tribological test we verify that the coating prepared under the 0.4A has highest wear resistance and adherent properties.
We got coatings with nitrogen content range from zero to ten atomic percent in second three stage. Through the study we can know that adding micro content nitrogen contributes to the adhesion of the coatings and the coatings have the lower friction coefficient and higher wear resistance. Then we will be use Raman Spectroscopy observed the variety of sp3/sp2 bond proportion of films structure and G、D peak position deflection to compare the result of resistance wear test.
Finally, we would abstain the best nitrogen content for apply cutting tool and PCB drilling needle as the same as SRV test results that nitrogen content from eight to ten atomic percent better than twelve to thirsty atomic percent. The micro content of nitrogen can promote the tool life and wear resistance properties.

考試合格證明書……………………………………………………….I
中文摘要……………………………………………………………II
英文摘要……………………………………………...…………..III
致謝…………………………………………...……………………..IV
總目錄……………………………………………………...………..V
表目錄…………………………………….…………………......XII
圖目錄……………………………….………………………….…XIII
第一章 緒論………………………………………..………………..1
1-1前言…………………..………………..…..…………………..1
1-2 研究動機………………………..……..……...……………..2
第二章 文獻回顧…………………....……....................3
2-1 類鑽碳膜之基本特性……………………..…………....…….3
2-2 類鑽碳成膜法……………………..……………………..…….3
2-3利用UBM濺鍍法製DLC膜的特性……………………….………..4
2-4 含氫類鑽碳與非含氫類鑽碳之比較………………….....…..5
2-5惰性氣體（氮氣）對於鍍膜影響…………………….….….....7
2-6 拉曼光譜分析在類鑽碳膜的應用…………….………...…..7

第三章 實驗方法與步驟……………………………………………….9
3-1 實驗目的…………………………………………………………9
3-2實驗流程………………………………………….…………………9
3-3鍍膜製作與實驗方法…………………….…………………………9
3-1-1 濺鍍參數與鍍膜安排……………………………………………9
3-3-2 濺鍍系統與靶材配置……………………...………………..10
3-3-3 鍍膜成分與元素分佈分析…………………...……….…...10
3-3-4 鍍膜顯微結構分析 …………………...…………….……..10
3-3-5 硬度實驗 ……………………………………..…………..…11
3-3-6 附著性實驗……………………………………………......11
3-3-7 耐熱性實驗..………………………………...……………..12
3-3-8 磨耗實驗...……………………………...…..…………12
3-3-9 乾車削實驗…………………………………………………..13
3-3-10 PCB 鑽削實驗 ………………....………..…………..…13
3-4 實驗設備………………………………………………...………13
第四章 結果與討論……………………………………………...…16
4-1第一階段鍍膜基本性質……………………………………...…16
4-1-1拉曼光譜分析、鍍層結晶構造………………………………..16
4-1-2鋯靶電流對鍍膜硬度之影響……………….…………….……17
4-1-3第一階段鍍膜之附著性…………………………….…………17
4-1-4第一階段鍍膜磨潤性能測試………………….…………….18
4-2 第二階段鍍膜基本性質………………………………………..19
4-2-1 拉曼光譜分析、鍍層結晶結構………………………....…20
4-2-2氮氣流量對鍍膜硬度之影響……….……………….…….20
4-2-3第二階段鍍膜之附著性…………….……………….………..21
4-2-3 第二階段鍍膜之附著性………………………………………21
4-2-4 第二階段鍍膜磨潤性質測試…………………………………21
4-3 調整爐階段鍍膜基本性質……………………….………………22
4-3-1 拉曼光譜分析…………………………………………………23
4-3-2 調整爐階段鍍膜之附著性……………………………………23
4-3-3 調整爐階段鍍膜磨潤性質測試……………………………….23
4-4 第三階段鍍膜基本性質.......................................................24
4-4-1 拉曼光譜分析、鍍層結晶構造……….…………………..24
4-4-2 氮氣流量對鍍膜硬度之影響………………………………..25
4-4-3 第三階段鍍膜之附著性……………………………………….25
4-4-4 第三階段鍍膜磨潤性質測試…………………………………26
4-5 鍍膜磨潤性質分析…………………………………….……….27
4-5-1 第一階段鍍膜與AISI 1045銅柱線磨………………….…….27
4-5-2 第三階段鍍膜與AISI 52100點磨………………….…….…27
4-5-3 第三階段鍍膜與AIS1045及磷青銅圓柱線磨…………….….28
4-5-4 第三階段鍍層磨耗機構………………………………...….29
4-5-4-1 鍍層與AISI 52100鉻鋼球對磨………………………….29
4-6 熱處理對鍍膜的影響………………………………………...…30
4-7 PCB 微鑽孔鑽削實驗………………………...…………………30
4-8 車削磨耗試驗………………………...……………………..31
第五章 結論………………………………..….……………………33
5-1 結論…………………………………….…..………………33
5-2 實驗心得……………………………………...……………34
第六章 參考文獻………………………………...………………36
附錄

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