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研究生:陳祥弘
研究生(外文):Shiang-Hung Chen
論文名稱:雷射輔助電鍍法製備銅微粒之研究
論文名稱(外文):The formation of micro-scale copper particles in laser assisted electroplating method
指導教授:林震銘
指導教授(外文):Jehn-Ming Lin
學位類別:碩士
校院名稱:國立成功大學
系所名稱:機械工程學系碩博士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2007
畢業學年度:95
語文別:中文
論文頁數:128
中文關鍵詞:雷射奈米粒子電鍍
外文關鍵詞:NanoparticleCopperLaserElectroplating
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本文之研究目的是以自行發展之雷射輔助電鍍法製備微奈米銅粒子,針對不同條件下實驗結果進行觀察比較。在實驗方面,第一部分採用自行組裝之電化學裝置配合連續式及Q-switched 雷射在不鏽鋼試片上進行生成,並使用光學金相顯微鏡及掃描式電子顯微鏡觀察其結果。第二部分針對雷射通過電解液之吸收率以及在陰極極板上所造成的溫升效應進行量測,以自製實驗裝置配合雷射能量計以及熱電偶量測雷射通過電解液之流場後所剩餘的能量以及在陰極版所造成之最高溫度。在數值分析方面使用計算流體力學軟體模擬所使用之噴流流場以及其同軸雷射,探討流場之速度及壓力等情形以及雷射所造成之溫度場。本研究中以高斯能量分布之壁面熱源進行雷射加熱效應的計算,且不考慮電解液所吸收之雷射能量,計算結果和實驗所測得的結果具有一致性。本研究證明了使用雷射輔助電鍍法不添加穩定劑的情況下生成微奈米銅粒子之可行性,所得之實驗及理論分析結果可作為後續研究之基礎。
This study investigates the micro/nano-scale copper particles generated by the laser-assisted electroplating method, and the results have been examined at various experimental conditions.

In the first part of experiment, an electrochemical jet nozzle was made to adopt with continuous-wave and Q-switched Nd:YAG laser to generate micro/nano-scale copper particles. The results were observed by optical and scanning electron microscope. In the second part, the laser energy absorbed by electrolyte and the temperature rise caused by laser radiation on the electrode had been measured.

In the numerical analysis, the flow and temperature fields of the impinging jet of the laser nozzle were simulated simultaneously by a computational fluid dynamic software. A wall heat flux of Gaussian distribution energy profile was used to calculate the flow temperature due to the laser radiation on cathode and the energy absorption in electrolyte was not considered in this study. The results show a good agreement with the experiment. The innovative technique of the proposed device has the capability of generating micro/nano-scale particles and it opens a door of the laser applications for the future.
目 錄


中文摘要…………………………………………………………… I
英文摘要…………………………………………………………… II
誌謝………………………………………………………………… III
目錄………………………………………………………………… IV
表目錄……………………………………………………………… VII
圖目錄……………………………………………………………… IX
符號說明…………………………………………………………… XI

第一章 緒論………………………………………………… 1
1-1 研究目的………………………………………………… 1
1-2 文獻回顧………………………………………………… 4
1-2.1 電化學法生成奈米粒子…………………………… 4
1-2.2 雷射增強電化學…………………………………… 8
1-3 本文架構………………………………………………… 10

第二章 製程原理簡介……………………………………… 12
2-1 雷射電化學原理簡介…………………………………… 12
2-1.1 溫度對電化學效應之影響………………………… 12
2-1.2 質傳對電化學效應之影響………………………… 22
2-2 雷射相關性質…………………………………………… 24
2-2.1 液體對雷射之吸率………………………………… 24
2-2.2 雷射光束功率密度分佈…………………………… 25
2-2.3 Q-switched雷射簡介………………………………… 27

第三章 雷射輔助衝擊噴流電鍍法生成實驗…………………. 28
3-1雷射輔助壁面衝擊自由噴流電鍍之實驗設備及配置... 28
3-2雷射輔助壁面衝擊噴流電鍍法奈微米粒子生成實驗… 32
3-2.1實驗步驟…………………………………………… 32
3-2.2實驗條件…………………………………………… 32
3-2.3結果觀察…………………………………………… 33
3-2.4 EDS成分分析……………………………………… 57
3-3雷射輔助壁面衝擊噴流電鍍實驗……………………… 61
3-3.1實驗步驟及條件…………………………………… 61
3-3.2結果觀察…………………………………………… 62
3-4雷射造成之溫度效應的量..…………………………… 66
3-4.1實驗配置…………………………………………… 66
3-4.2實驗結果…………………………………………… 68
3-5雷射在流場中之被吸收率實驗………………………… 69
3-6 結果與討論……………………………………………… 72

第四章 數值分析…......……………………………………… 74
4-1數值計算軟體FLUENT及計算流程簡介………………… 74
4-2 壁面衝擊噴流及其數值模擬理論簡介………………… 75
4-3壁面衝擊噴流流場及雷射效應之數值分析……………… 83
4-3.1 FLUENT數值計算軟體之多相流模擬可靠度驗證… 83
4-3.2流場及溫度場數值分析之假設………………………… 87
4-3.3模型之建立……………………………………………… 87
4-3.4邊界條件之設定………………………………………… 90
4-3.5模擬計算之結果………………………………………… 92
4-3.6實驗結果與數值分析之比較…………………………… 99
4-4結果與討論………………………………………………… 101

第五章 綜合討論與建議……………………………………… 103
5-1 綜合討論…………………………………………………… 103
5-2 相關建議與未來發展……………………………………… 106

參考文獻…………………………………………………………… 107
附錄A鍍層分佈…………………………………………………… 113
附錄B多相流之物理性質處理…………………………………… 116
附錄C粒徑分析…………………………………………………… 118
附錄D粒子面積比………………………………………………… 123
自述………………………………………………………………… 128
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