臺灣博碩士論文加值系統

本研究發展出新的偏振光調變式近場光學顯微鏡架構來量測雙折射材料之光學參數；為了達到奈米尺度偏光量測儀器的目標，本研究將近場光學顯微鏡結合了共路徑外差干涉術和基因演算法，然而在偏振光調變式近場光學顯微鏡架構當中，探針及其光纖的雙折射和雙向衰減率特性往往是需要克服的主要問題，因為它們會破壞入射至樣本前的光偏振狀態，使得解析干涉訊號非常困難。與以往架構的解析方式比較，本研究應用基因演算法來幫助極化控制器補償光纖的雙折射特性，另一方面解析探針雙向衰減率參數。且不同於其他的解析方式為強度型解調變，環境之擾動甚大，而此研究所採用之解調變皆為相位方式，針對樣品如波片之雙折射及光軸方向進行量測，所得之結果較不受光強擾動。

A new method of polarization-modulation (PM) near-field optical microscopy (NSOM) with birefringence measurement is described. In this research, common path heterodyne interferometer and genetic algorithm are combined with the NSOM to establish nanometer scale polarimetric measurement instruments. The birefringence and the diattenuation in the probe are severe problems for PM-NSOM. They will destroy polarization state of the incident light, and make signals demodulation very difficult. In comparison to previous measurement methods, this developed scheme applies genetic algorithm to help polarization controller compensate the birefringence in the fiber and to determine the diattenuation in the probe tip. On the other hand, the intensity-demodulation system which other schemes use is perturbed by surrounding disturbance easily. This system measures phase instead of intensity, so we can quantitatively measure the birefringence and the optical axis of birefrigent materials such as quarter-waveplate without influence of the intensity variation in nano-scale area.

Abstract I
中文摘要 II
Table of Contents III
List of Figures VI
List of Tables X

Chapter 1 Introduction 1
1.1 Preface 1
1.2 Review of the Near-field Scanning Optical Microscopy 1
1.3 Review of the PM-NSOM 4
1.4 Review of the Genetic algorithm 5
1.5 Motivation 6
1.6 Overview of Chapters 7

Chapter 2 Birefringence Materials 15
2.1 Preface 15
2.2 The Optical Properties of Birefringence 15
2.3 Phase Retardation 19
2.4 The Stress-Optic Law 21

Chapter 3 Basic Theory 28
3.1 Preface 28
3.2 Common-Path Heterodyne Interferometry 28
3.2.1 Basic Theory of Heterodyne Interference 29
3.2.2 The Modulating Technique of Electro-Optic Modulator 31
3.2.3 Electro-Optic Modulation 31
3.2.4 Amplitude Modulation 33
3.2.5 Calibration the axis alignment of an EO modulator 36
3.3 Genetic Algorithm 38
3.3.1 Fitness Function 38
3.3.2 Reproduction 39
3.3.3 Crossover 41
3.3.4 Mutation 42
3.4 Electric Field Distribution in Near-Field Optics 43
3.4.1 Photon Tunneling Effect 43
3.4.2 Classical Electrodynamics 45
3.4.3 Fourier Optics 48
3.5 Basic Configuration of NSOM 50
3.5.1 Tuning fork in the Shear Force Detection 51
3.5.2 The Probe of NSOM 52

Chapter 4 New PM-NSOM system 60
4.1 Preface 60
4.2 Method for Measuring Fiber Probe Diattenuation and Residual Retardance 60
4.2.1 Principle and Simulation 60
4.2.2 Genetic Algorithm Model for Extracting Fiber Probe Parameters 64
4.2.3 Quadrant Determination Problem in Phase Extraction 66
4.3 Sequential Method for Measuring the Principal Axis Angle and Phase Retardation of a Linear Birefringence Sample 68
4.3.1 Principle 68

Chapter 5 Experimental Setup and Results 76
5.1 Preface 76
5.2 Measurement System Setup 76
5.2.1 Aurora-3 NSOM 76
5.2.2 Experimental Setup 78
5.2.3 Calibration in the Measurement System 79
5.3 Experimental Results 81
5.3.1 Experimental Results of the Two Probe Parameters 81
5.3.2 Single Point Measurement Results 82
5.3.3 Birefringent Image Results 83
5.4 Discussions 85
5.4.1 Discussion on the Phase Retardation and the Optical Axis Orientation for Single Point Measurement 85
5.4.2 Discussion on the Phase Retardation and the Optical Axis Orientation for Scanning Images 86

Chapter 6 Conclusions and Future Work 105
6.1 Conclusions 105
6.2 Future Work 106

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Autobiography 116

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