臺灣博碩士論文加值系統

觸覺感測器被廣泛的應用在機電與生物醫學領域中，本研究主要以高分子材料做為基材，利用微機電製程技術以高分子與金屬多層膜堆疊製作可撓式觸覺感測器；別於一般壓力感測器，我們以聚亞醯胺、PDMS與液晶高分子不同特性的塑膠材料多層堆疊，提出一種無體加工及無犧牲層釋放製程的元件設計，減少許多繁瑣的製程步驟。以ANSYS 有限模擬軟體求證設計完成的元件結構之可行性，並且將模擬結果的數值做為元件尺寸製作的參考。一般高分子材料的表面普遍為斥水性且附著性不佳，此特點對於金屬化與高分子多層堆疊的製程相當不利，提出以氧電漿表面改質技術改善高分子表面的濕潤性與提高其表面能，藉由量測三種不同液體的接觸角，利用“列夫薛茲-凡得瓦爾/路易斯酸鹼法” 計算並說明高分子表面能的變化。以濺鍍法在PDMS 表面鍍鈦金屬定義電極圖形，但容易因為熱應力的因素導致金屬電極破裂，本文提出兩種方法改善其製成問題；第一，先以延展性較好的金做為電鍍起始層，利用黃光微影定義電極形狀，接著電鍍鎳補強因內應力所造成金薄膜產生皺褶處；其次，利用鈦起始層對於電鍍附著力不佳的特點，以膠帶的黏性將電鍍電極轉印於其上，可避免直接在PDMS 上鍍膜所造成的問題。本研究提出的製程方法將改善高分子在製作元件所造成的問題，並且成功的堆疊出3層高分子與2層金屬的多層結構，並且在面積3.3×3.3 cm2 的範圍內做出空間解析度650 µm 之36 × 36 陣列電容感測器。

Tactile sensors are widely applied in electro-mechanic and bio-medical field. The aim of this study is designing the tactile sensor by stacking polymer and metal multilayer on polymer substrate in MEMS. A novel sensor design is presented that process omits bulk machining or sacrificial layer releasing. Therefore, complicated fabrication steps are reduced. The feasibility of designed device is verified by finite element software and simulation results could be the references for deciding the size of sensor. Polymer surfaces are generally associated with poor adhesion and wettability which are defects regarding stack and metallization of polymers. So the technique of surface modification by using O2 plasma is utilized to enhance the moistness of polymer surface and surface energy. According to three measured liquid contact angles and Lifshitz-van der Waals/Lewis acid-base approach method, the variation of polymer surface energy can be described. Besides, the Titanium electrode which is sputtered on PDMS surface would crack easily due to thermal stress effect. For this reason, there are two methods to improve questions in this thesis. First, Au which has good ductility is utilized to be the seed layer and the pattern of electrode is defined by photolithography. Then Au thin film wrinkle induced by internal force can be improved by Ni electroplating. Moreover, according to the low adhesion for electroplating Ni on Ti seed layer, Ni electrode is imprinted on tape to prevent the crack. In this study, the presented process can improve the defect of fabricating polymer device. Finally, it is successful to fabricate the capacitive sensor which has three polymer layers and two metal layers. 36 × 36 capacitive sensor arrays are made in 3.3×3.3 cm2 and space resolution is 650 µm.

中文摘要 I
Abstract II
致謝 III
目 錄 IV
表目錄 VI
圖目錄 VII
第一章 緒 論 1
1.1 前言 1
1.2 可撓式元件發展現況 2
1.3 研究目標 6
1.4 論文架構 7
第二章 文獻回顧 8
2.1觸覺感測器之應用 8
2.1.1智慧型機器人 8
2.1.2 遠距操作 10
2.1.3 生物醫學應用 11
2.2 觸覺感測器的分類 15
2.2.1 壓阻式感測器 15
2.2.2 壓電式感測器 22
2.2.3 電感式感測器 24
2.2.4 電容式感測器 26
2.2.5 光學式感測器 29
2.3 小結 30
第三章 元件設計與製程規劃 32
3.1 可撓式觸覺感測器之結構設計 33
3.1.1 結構設計 33
3.1.2 可撓式觸覺感測器之結構設計模擬分析 37
3.1.3 光罩設計與製作 45
3.2 製程步驟 47
3.2.1 初步製程設計與規劃 47
3.2.2 製程改善 51
3.3 製程設備 54
3.3.1 黃光微影製程設備 55
3.3.2 金屬薄膜沉積製程設備 58
3.3.3 高分子材料之表面改質技術 60
3.3.4電鍍製程設備 61
3.3.5 微奈米熱壓印製程設備 64
3.3.6 表面形貌檢測與觀察儀器 66
第四章 結果與討論 68
4.1 熱壓印技術於高分子凸塊結構製作 68
4.1.1 矽模仁製作 68
4.2.2 熱壓轉印 73
4.2 氧電漿表面改質技術應用於改善高分子之附著性 83
4.3 解決PDMS 上之金屬破裂問題 91
4.4 訊號量測 99
第五章 結論與未來展望 103
5.1 結論 103
5.2 未來展望 105
參考文獻 106

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