臺灣博碩士論文加值系統

液晶配向在平面顯示面板製程中扮演著重要的角色，而在傳統的刷磨配向會對液晶面板製程造成靜電、微塵汙染等缺點，更會造成大面積面板配向度不均勻現象，因此開始有非接觸式配向的提出，藉以改善上述的問題。電漿束配向即是最受矚目的一項非接觸配向技術之一，本論文亦是針對電漿束配向後的光電性質作量測分析。
　　電漿源產生的模式為利用常壓電漿噴覆的概念去實作低壓下的電漿噴流器產生電漿束。配向膜基板製作部分，由旋轉塗佈機與烤箱將配向膜材料聚亞醯胺製作於玻璃基板上，而後進行電漿束配向的處理。為了觀察電漿束對聚亞醯胺配向膜的影響，我們藉由原子力顯微鏡(AFM)去觀察配向處理過後的配向膜表面結構，以及利用傅立葉紅外線光譜儀(FTIR)去量測聚亞醯胺三種官能基對紅外線光的吸收情形，三種官能基分別為亞醯胺基、苯環基、Ｃ-Ｏ-Ｃ鍵結。待合成液晶盒後，利用光學儀器去實踐晶體旋轉法來求得預傾角，而錨定能的量測則藉由外加電場的高電場法去做透光率的量測，進而求得錨定能。
　　實驗數據分析顯示，入射電漿束的角度與時間對於表面結構與官能基的改變有著顯著的影響，當垂直入射3分鐘與30°入射3分鐘，表面結構呈現較劇烈的起伏，錨定能各為8.43×10-5J/m2及1.60×10-5J/m2，顯示當液晶分子與配向膜有效接觸面大時，有高錨定能的呈現，相較於刷磨配向要調高刷磨強度所造成的高錨定能，用電漿束產生高錨定能可減少玻璃基板損毀的優點與微粒的汙染。FTIR量測方面，可明顯顯示出配向的機制：當平行配向方向量測所得到的吸收率平均比垂直量測的吸收率高出3%以上。且由Ｃ-Ｏ-Ｃ鍵結間的吸收情況可說明其鍵結方向有異向性的趨勢：當平行主鏈方向量測時有7%的吸收情況發生在60°入射10分鐘時。在預傾角分析方面，尚無法由表面結構得知與預傾角的關係，但可由FTIR亞醯胺基的吸收率看出：再同一個電漿入射時間下，吸收率越高，預傾角越大。

Liquid crystal alignment plays an important role for the wide-viewing technology in the flat panel display manufacturing. Today, the contacting alignment for flat panel display will induce the disadvantages of static electricity and particle pollution, especially uniform alignment issue in the future larger area display manufacturing. Therefore, non-contacting alignments are proposed to improve these issues in these years. However, the plasma alignment is the most attractive in non-contacting alignment than others because of flexible control on the uniformity and having larger pre-tile LC angle. This thesis focus on the analysis of photoelectrical characteristics of LC cell after plasma beam alignment.
Plasma beam is carried out by using the concept of plasma thruster operating at low pressure. LC cells are made by spin coater and hi-temperature oven to coated and baked PI on glass substrate, after plasma beam treatment then seal them. In order to understand what changes on PI, we observe sample surface with AFM and analysis molecular functional group separately with FTIR. Polyimide’s characterful molecular functional groups are imide, benzene and Ｃ-Ｏ-Ｃ group. We also measure pre-tilt angle with crystal rotation method by polarized laser system, and anchoring energy with high electric field method.
Results show that incident angle of plasma beam and treatment time can affect surface roughness and surface structure functional group. The anchoring energy is 8.43×10-5J/m2 and 1.60×10-5J/m2 at vertical and 30°plasma beam incident angle respectively for three minute. It seems that larger contacting area has higher anchoring energy. FTIR measurements demonstrate the alignment effect from the parallel average absorption higher than vertical absorption rate about 7%. It meansＣ-Ｏ-Ｃbond direction distribution has the trend of anisotropy, and higher absorption rates lead to the larger pre-tilt based on our experiment.

第一章 緒論...........................1
1.1 前言..............................1
1.2 文獻回顧..........................2
1.3 研究動機與文獻回顧................5
1.4 實驗研究目的............7
1.5 論文架構................8
第二章 液晶盒的動態響應理論..............................9
2.1 向列型液晶特性...............................9
2.1.1 雙折射現象...............................9
2.1.2 電場對向列型液晶的影響..................14
2.1.3 分子排列的秩序參數S ....................15
2.1.4 連續彈性體形變理論......................16
2.2 錨定能理論..................................18
2.2.1　錨定能介紹..............................18
2.2.2　極角錨定能量測原理......................19
2.3 穿透率量測理論..............................23
2.3.1 理論推導................................23
2.3.2 穿透率定義..............................26
2.4 預傾角量測理論..............................26
第三章 配向膜基本性質與電漿束配向原理...................31
3.1 配向膜簡介..................................31
3.1.1 PI介紹..................................31
3.1.2 高分子定向配向機制......................32
3.2 電漿表面處理理論............................34
3.2.1 電漿特性與基本原理......................34
3.2.2 PI膜電漿表面處理........................38
3.3 電漿噴流器..................................42
3.3.1 電漿噴流原理介紹........................42
3.3.2 電漿噴流器結構介紹......................42
第四章 實驗架構.........................................45
4.1 材料相關參數................................46
4.2 電漿配向處理製作與觀察......................47
4.2.1 配向前處理..............................47
4.2.2 電漿束配向處理..........................49
4.2.3 AFM表面結構觀察.........................51
4.2.4 FTIR配向膜官能基分析....................52
4.3 液晶盒製程與量測............................54
4.3.1 液晶盒製作..............................54
4.3.2 極角錨定能量測架構......................55
4.3.3 預傾角量測架構..........................57
第五章 實驗結果與討論...................................59
5.1 配向膜AFM觀測結果..........................59
5.2 配向膜官能基FTIR分析.......................63
5.3 預傾角量測結果..............................70
5.4 錨定能量測結果..............................74
5.5 傳統刷磨配向與電漿束配向之比較..............79
參考文獻.........................................83

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