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研究生:陶宗賢
研究生(外文):Trong-Hien Dao
論文名稱:壓電驅動之薄膜式微氣壓泵的探討
論文名稱(外文):Study on A PZT-actuated Diaphragm Micro Airpump
指導教授:劉永田
指導教授(外文):Yung-Tien Liu
學位類別:碩士
校院名稱:國立高雄第一科技大學
系所名稱:工程科技研究所
學門:工程學門
學類:綜合工程學類
論文種類:學術論文
論文出版年:2007
畢業學年度:95
語文別:英文
論文頁數:47
中文關鍵詞:
外文關鍵詞:The analysis of variance (ANOVA)Taguchi methodCantilever beamMicro airpumpPZT bimorph actuatorOptimization
相關次數:
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Recently, the piezoelectric (PZT) actuated pump is developed for the applications in biotechnology, chemistry, medicine and engineering industries. Compared with other actuating methods based on such as electrostatic principle, magnetostrictive material, and shape memory alloy, the PZT actuation exhibits good reliability, energy efficiency, and moderated displacement. It can provide a solution to the matter of a supplying a small amount of air to the application in micro fuel cell.
In this thesis, the PZT bimorph actuator used in a micro fuel cell is studied. The actuation of the micro air pump is modeled as a cantilever beam having a mass at its tip. Since the PZT bimorph features large displacement, low driving voltage, and thin structure, it is suitable for supplying air to the micro fuel cell. For examining the motion behavior of driving mechanism based on analysis model, an experimental setup is configured. Verification for the model is made by both experimental and numerical approaches.
For obtaining optimal actuating parameters based on Taguchi method, the waveform type and its amplitude for the actuation of PZT bimorph, the driving frequency, the mass of diaphragm are defined as four affecting factors for investigation. According to the experimental results using Taguchi Method, the optimal actuating parameters are determined as the waveform type being sinusoidal, the driving frequency being 50 Hz, the amplitude of applied voltage being 20 V, and the mass of diaphragm being 0.07 g. In addition, the analysis of variance (ANOVA) is employed to identify the driving frequency as the most important parameter, which account for 75.26% to the effect in velocity and 79.63% to the effect in displacement of the process variance. The experimental results show that, the velocity and the displacement of the PZT bimorph are 10.82 mm/s and 10.6 µm, respectively, the approaches carried out in this thesis can provide a systematic methodology for designing a new actuating mechanism using PZT bimorph for the application in precison industry.
Abtract i
Acknowledgements iii
Contents iv
List of Tables vi
List of Figures vii
Nomenclature ix
Chapter 1 Introduction 1
1.1 Background 1
1.2 Classification of micro pumps 1
1.2.1 Positive Displacement Pump (Reciprocating pump) 2
1.2.2 Rotary pump 2
1.3 Operation principle of diaphragm micro pump 3
1.4 Objective of thesis 4
1.5 Contents of thesis 4
Chapter 2 Analysis model of PZT actuator diaphragm micro air pump 6
2.1 Introduction 6
2.2 Structure and working principle of the experimental setup modeling 6
2.3 Natural frequency of actuation structure 8
2.4 Amplitude of diaphragm 12
2.5 Flow rate in vent 15
Chapter 3 Experimental verification 17
3.1 Actuating mechanism based on analysis model 17
3.2 Experimental setup 18
3.2.1 Function Generator 20
3.2.2 High speed bipolar amplifier 21
3.2.3 Laser Doppler vibrometer 22
3.2.4 Wave runner Oscilloscopes 23
3.3 Experimental results 24
3.3.1 First order natural frequency 24
3.3.2 Motion behavior of the PZT bimorph 25
3.3.3 Peak amplitude affected by applied voltage 27
3.3.4 Motion behavior affected by driving frequency 27
Chapter 4 Optimal actuating parameters micro air pump obtained by taguchi approach 29
4.1 Taguchi method 29
4.1.1 The static Taguchi method 29
4.1.2 Conceptual S/N ratio 30
4.2 Experiment design 32
4.2.1 Selection of the factor and their levels 32
4.2.2. Design and analysis of actuating parameters 33
4.2.2.1 Orthogonal array with dummy level and assignment of factors 33
4.2.2.2. Average response analysis by each level 34
4.3 Evaluation and analysis of data by S/N dB value 34
4.4 Analysis of variance 40
4.4.1 Total sum of the square 41
4.4.2 Sum of square of unknown factors 43
4.5 Confirmation tests 43
Chapter 5 Conclusions 46
References 47
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[2] G. J. K. Acress, 2001, “Recent advances in fuel cell technologies and its applications”, Sensors and Actuators A, pp. 6-100.
[3] T. A.Zawodzinski, 2000, “A comparative study of water uptake by and transport through ionomeric fuel cell membranes”, Sensors and Actuators B, pp. 140-152.
[4] A. C. Cohen, 2001, “Extra-oral digestion in predaceous terrestrial arthropoda”, Sensors and Actuators B, pp. 1215-1223.
[5] W. Peter, 2004, “Micropumps-past, progress and future prospects”, Sensors and Actuators B 105, pp. 28-38.
[6] L. J. Thomas, S. P. Bessman, 2002, “Prototype for an implantable micropump powered by piezoelectric disk benders”, Sensors and Actuators B, pp. 516-520.
[7] W. J. Spencer, W. T. Corbett, L. R. Dominguez, D. B. Shafer, 2005, “An electronically controlled piezoelectric insulin pump and valves”, IEEE Trans. Sonic Ultrason, pp. 153-156.
[8] S. C. Chen, C. H. Cheng, Y. C. Lin, 2006, “Analysis and experiment of a novel actuating design with a shear mode PZT actuator for microfluidic application”, Sensor and Actuators A 135, pp. 1-9.
[9] M. Joshi, 2005, “Piezoelectric micropump for drug delivery application”, The University of Texas at Arlington in Partial Fulfillment.
[10] Y. Xing, Y. W. Zhao, C. X. Hye, L. Bing, 2006, “Study on a PZT-actuated diaphragm pump for air supply for micro fuel cells”, Sensor and Actuators, A 130-131, pp. 531-536.
[11] A. A. Shabana, 1991, “Theory of vibration”, Volume II: Discrete and continuous systems, Springer-Verlag, Mechanical engineering series.
[12] W. Y. Fowlkes, C. M. Creveling, 1995, “Engineering methods for robust product design”, Addision-Wesley, Engineering Process Improvement Series
[13] D. Mandar, S. Laxman, 2007, “PZT thin film for low voltage actuation: Fabrication and characterization of the transverse piezoelectric coefficient”, Sensor and Actuators, A 135, pp.690-699.
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