臺灣博碩士論文加值系統

本論文利用有限元素法以多重物理量分析模擬軟體FEMLAB，建立一以銅/鑽石/銅三層膜構成的散熱元件模型，分析銅與鑽石的介面熱應力。上層銅厚度2µm，改變中間層的鑽石厚度（20µm、50µm、100µm），及底層銅的厚度（100µm、200µm、300µm）。假設元件的製程後無殘留應力，在一般空氣對流的環境下，當元件由室溫27℃上升至溫度100℃、200℃、300℃時，以膜厚的改變，做為散熱元件的參數條件，分析散熱元件在不同膜厚對於不同的溫度，所產生的變形量及應力變化。
本論文研究模擬後發現，以銅/鑽石/銅三層膜構成的散熱元件，在固定之溫度負載下，其最大剪應力，在薄膜厚度改變時，固定上層銅厚度情況下，則最大剪應力會因為鑽石層厚度增加而變大，而且在鑽石厚度為50-70µm時，應力增加較平緩，但同時考慮鑽石熱傳隨鑽石厚度增加，在100µm時有較好的熱傳效果，而底層銅的厚度變化對於最大剪應力沒有太大的影響，所以本論文結論建議鑽石厚度在70µm時對此鑽石、銅三層膜散熱元件是較佳的選擇。其最大變形量，在薄膜厚度固定上層銅厚度及中間層鑽石厚度時，變形量會因為底層銅厚度增加而變小。

The main purpose of this research is to utilize the FEMLAB multiphysics software as to analyze the thermal stress of Cu/Diamond/Cu three-layered heat spreader device. The alteration of film thickness under different temperatures(allowing the device to increase from room temperature of 27°C to 100°C, 200°C and 300°C), with upper Cu layer of 2µm, altered middle diamond layer(20µm, 50µm 100µm), and lower Cu layer(100µm, 200µm, 300µm)(assuming that there is no residual stress produced after the manufacture of heat spreader device), is regarded as the conditional parameter of heat spreader device in analyzing the deformation rate and stress variation produced.

After simulation of the research, it was found out that a maximum shear stress is attained under a fixed temperature load. And, when the film thickness is altered and under a fixed thick of Cu layer, the shear stress will become bigger due to the thickness of the diamond layer increases, when the diamond layer is 50-70µm, stress increases slowly; but it is considered to be the greatest effect when the heat transfer of diamond is at 100µm; thus selection of 70µm would be a better option in this paper suggestion, and that the alteration of the thickness of lower Cu layer will not cause great effect to max shear stress.) After stabilizing the thickness of upper Cu layer and middle diamond layer, the maximum deformation rate will become smaller when the thickness of lower Cu layer increases.

第一章 緒論
第二章 薄膜應力
2.1前言
2.2內應力
2.3熱應力
2.4 Stoney 方程式
第三章 有限元素模擬
3.1前言
3.2有限元素方法的基本步驟
3.3有限元素模型
3.3.1 熱傳分析
3.3.2 結構分析
3.4模擬參數
3.5網格選取及取點分析
第四章 結果與討論
第五章 結 論
附錄 A 鑽石與其他材料性質比較
附錄 B 散熱元件三維(3D)模擬
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